JPS5260069A - Crystal growth - Google Patents

Crystal growth

Info

Publication number
JPS5260069A
JPS5260069A JP13587475A JP13587475A JPS5260069A JP S5260069 A JPS5260069 A JP S5260069A JP 13587475 A JP13587475 A JP 13587475A JP 13587475 A JP13587475 A JP 13587475A JP S5260069 A JPS5260069 A JP S5260069A
Authority
JP
Japan
Prior art keywords
crystal growth
compound
group iii
growth
eptaxially
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13587475A
Other languages
Japanese (ja)
Other versions
JPS5826655B2 (en
Inventor
Yasuo Seki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP13587475A priority Critical patent/JPS5826655B2/en
Publication of JPS5260069A publication Critical patent/JPS5260069A/en
Publication of JPS5826655B2 publication Critical patent/JPS5826655B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE:To mix Al in group III-V compound by additionally introducing gas containing alkyl Al to the reaction system in a process of eptaxially growing group III-V compound and performing the growth.
JP13587475A 1975-11-12 1975-11-12 The best way to do it Expired JPS5826655B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13587475A JPS5826655B2 (en) 1975-11-12 1975-11-12 The best way to do it

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13587475A JPS5826655B2 (en) 1975-11-12 1975-11-12 The best way to do it

Publications (2)

Publication Number Publication Date
JPS5260069A true JPS5260069A (en) 1977-05-18
JPS5826655B2 JPS5826655B2 (en) 1983-06-04

Family

ID=15161783

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13587475A Expired JPS5826655B2 (en) 1975-11-12 1975-11-12 The best way to do it

Country Status (1)

Country Link
JP (1) JPS5826655B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6016899A (en) * 1983-07-07 1985-01-28 Nec Corp Ii-v compound crystal and its pulling method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6016899A (en) * 1983-07-07 1985-01-28 Nec Corp Ii-v compound crystal and its pulling method
JPH0450280B2 (en) * 1983-07-07 1992-08-13 Nippon Electric Co

Also Published As

Publication number Publication date
JPS5826655B2 (en) 1983-06-04

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