JPS5192740A - - Google Patents

Info

Publication number
JPS5192740A
JPS5192740A JP50144047A JP14404775A JPS5192740A JP S5192740 A JPS5192740 A JP S5192740A JP 50144047 A JP50144047 A JP 50144047A JP 14404775 A JP14404775 A JP 14404775A JP S5192740 A JPS5192740 A JP S5192740A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50144047A
Other languages
Japanese (ja)
Other versions
JPS62229B2 (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5192740A publication Critical patent/JPS5192740A/ja
Publication of JPS62229B2 publication Critical patent/JPS62229B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/06—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals
    • C03C17/09—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0084—Producing gradient compositions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/25—Metals
    • C03C2217/263—Metals other than noble metals, Cu or Hg
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Metallurgy (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physical Vapour Deposition (AREA)
  • Optical Filters (AREA)
  • Surface Treatment Of Glass (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP50144047A 1974-12-06 1975-12-05 Expired JPS62229B2 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA215,398A CA1014889A (fr) 1974-12-06 1974-12-06 Pellicules minces a dielectrique pulverise

Publications (2)

Publication Number Publication Date
JPS5192740A true JPS5192740A (fr) 1976-08-14
JPS62229B2 JPS62229B2 (fr) 1987-01-06

Family

ID=4101793

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50144047A Expired JPS62229B2 (fr) 1974-12-06 1975-12-05

Country Status (7)

Country Link
JP (1) JPS62229B2 (fr)
CA (1) CA1014889A (fr)
DE (1) DE2554854A1 (fr)
FR (1) FR2333056A1 (fr)
GB (1) GB1496590A (fr)
NL (1) NL7514208A (fr)
SE (1) SE435298B (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57177971A (en) * 1981-04-28 1982-11-01 Yoichi Murayama High frequency ion plating device
JPS58140705A (ja) * 1982-02-15 1983-08-20 Fujitsu Ltd 光学フイルタおよびその製造方法
JPS61269804A (ja) * 1985-05-23 1986-11-29 松下電器産業株式会社 誘電体膜の製造法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4142958A (en) * 1978-04-13 1979-03-06 Litton Systems, Inc. Method for fabricating multi-layer optical films
DE3027256A1 (de) * 1980-07-18 1982-02-18 Robert Bosch Gmbh, 7000 Stuttgart Mehrschichtsystem fuer waermeschutzanwendungen und verfahren zu seiner herstellung
GB2264718B (en) * 1992-03-04 1995-04-26 Univ Hull Coatings produced by vapour deposition
GB2310218B (en) * 1996-02-13 1999-12-22 Marconi Gec Ltd Coatings
GB9901093D0 (en) * 1999-01-20 1999-03-10 Marconi Electronic Syst Ltd Method of making coatings

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1953070A1 (de) * 1968-10-28 1970-09-10 Western Electric Co Verfahren zum Herstellen eines auf Tantal basierenden Schichtwiderstandes
DE2215151A1 (de) * 1972-03-28 1973-10-04 Siemens Ag Verfahren zum herstellen von duennen schichten aus tantal

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1953070A1 (de) * 1968-10-28 1970-09-10 Western Electric Co Verfahren zum Herstellen eines auf Tantal basierenden Schichtwiderstandes
DE2215151A1 (de) * 1972-03-28 1973-10-04 Siemens Ag Verfahren zum herstellen von duennen schichten aus tantal

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57177971A (en) * 1981-04-28 1982-11-01 Yoichi Murayama High frequency ion plating device
JPS58140705A (ja) * 1982-02-15 1983-08-20 Fujitsu Ltd 光学フイルタおよびその製造方法
JPS61269804A (ja) * 1985-05-23 1986-11-29 松下電器産業株式会社 誘電体膜の製造法

Also Published As

Publication number Publication date
GB1496590A (en) 1977-12-30
SE7513312L (sv) 1976-06-08
FR2333056A1 (fr) 1977-06-24
SE435298B (sv) 1984-09-17
CA1014889A (fr) 1977-08-02
DE2554854A1 (de) 1976-06-16
NL7514208A (nl) 1976-06-09
JPS62229B2 (fr) 1987-01-06

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