JPS5184641A - - Google Patents

Info

Publication number
JPS5184641A
JPS5184641A JP50123338A JP12333875A JPS5184641A JP S5184641 A JPS5184641 A JP S5184641A JP 50123338 A JP50123338 A JP 50123338A JP 12333875 A JP12333875 A JP 12333875A JP S5184641 A JPS5184641 A JP S5184641A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50123338A
Other languages
Japanese (ja)
Other versions
JPS5516070B2 (fr
Inventor
Basozu Aanesuto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of JPS5184641A publication Critical patent/JPS5184641A/ja
Publication of JPS5516070B2 publication Critical patent/JPS5516070B2/ja
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B9/00—Blowing glass; Production of hollow glass articles
    • C03B9/30—Details of blowing glass; Use of materials for the moulds
    • C03B9/32—Giving special shapes to parts of hollow glass articles
    • C03B9/33—Making hollow glass articles with feet or projections; Moulds therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14475—Structure thereof only for on-demand ink jet heads characterised by nozzle shapes or number of orifices per chamber
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S239/00—Fluid sprinkling, spraying, and diffusing
    • Y10S239/19—Nozzle materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Weting (AREA)
  • Facsimile Heads (AREA)
  • Nozzles (AREA)
JP12333875A 1974-12-31 1975-10-15 Expired JPS5516070B2 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US537799A US3921916A (en) 1974-12-31 1974-12-31 Nozzles formed in monocrystalline silicon

Publications (2)

Publication Number Publication Date
JPS5184641A true JPS5184641A (fr) 1976-07-24
JPS5516070B2 JPS5516070B2 (fr) 1980-04-28

Family

ID=24144139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12333875A Expired JPS5516070B2 (fr) 1974-12-31 1975-10-15

Country Status (7)

Country Link
US (1) US3921916A (fr)
JP (1) JPS5516070B2 (fr)
CA (1) CA1037519A (fr)
DE (1) DE2555462C2 (fr)
FR (1) FR2296504A1 (fr)
GB (1) GB1492465A (fr)
IT (1) IT1054354B (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56155772A (en) * 1980-02-22 1981-12-02 Celanese Corp Precise orifice nozzle device for ink injecting printer and its manufacture
JPS59184666A (ja) * 1983-04-05 1984-10-20 Yokogawa Hewlett Packard Ltd 液体噴霧装置
JPS6198558A (ja) * 1984-10-15 1986-05-16 エーテイーアンドテイー　テレタイプ　コーポレーシヨン ノズル及びそのノズル構造を形成するプロセス
JP2010267951A (ja) * 2008-12-30 2010-11-25 Fujifilm Corp ノズル形成方法

Families Citing this family (84)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4007464A (en) * 1975-01-23 1977-02-08 International Business Machines Corporation Ink jet nozzle
US4014029A (en) * 1975-12-31 1977-03-22 International Business Machines Corporation Staggered nozzle array
US4047184A (en) * 1976-01-28 1977-09-06 International Business Machines Corporation Charge electrode array and combination for ink jet printing and method of manufacture
US4106976A (en) * 1976-03-08 1978-08-15 International Business Machines Corporation Ink jet nozzle method of manufacture
US4035812A (en) * 1976-07-12 1977-07-12 The Mead Corporation Ink jet recorder and charge ring plate therefor with reduced deplating current
US4169008A (en) * 1977-06-13 1979-09-25 International Business Machines Corporation Process for producing uniform nozzle orifices in silicon wafers
US4146899A (en) * 1977-10-13 1979-03-27 The Mead Corporation Formed orifice plate for ink jet printing apparatus
US4184925A (en) * 1977-12-19 1980-01-22 The Mead Corporation Solid metal orifice plate for a jet drop recorder
US4239586A (en) * 1979-06-29 1980-12-16 International Business Machines Corporation Etching of multiple holes of uniform size
US4229265A (en) * 1979-08-09 1980-10-21 The Mead Corporation Method for fabricating and the solid metal orifice plate for a jet drop recorder produced thereby
US4430784A (en) * 1980-02-22 1984-02-14 Celanese Corporation Manufacturing process for orifice nozzle devices for ink jet printing apparati
JPS5764563A (en) * 1980-10-07 1982-04-19 Fuji Xerox Co Ltd Ink particle jet apparatus of multi-nozzle ink jet printer
JPS57182449A (en) * 1981-05-07 1982-11-10 Fuji Xerox Co Ltd Forming method of ink jet multinozzle
JPS57208262A (en) * 1981-06-18 1982-12-21 Ibm Drop-on demand type ink jet printing method
EP0078337B1 (fr) * 1981-10-30 1987-04-22 Ibm Deutschland Gmbh Dispositif de contact pour la connexion amovible de composants électriques
US4583690A (en) * 1983-04-05 1986-04-22 Hewlett-Packard Company Anti-wetting in fluid nozzles
CA1210067A (fr) * 1983-12-08 1986-08-19 Ronald D. Baxter Capteur a isfet et methode de fabrication
EP0355862B1 (fr) * 1984-09-28 1993-01-13 Matsushita Electric Industrial Co., Ltd. Imprimante à jet d'encre
US4733823A (en) * 1984-10-15 1988-03-29 At&T Teletype Corporation Silicon nozzle structures and method of manufacture
US4756508A (en) * 1985-02-21 1988-07-12 Ford Motor Company Silicon valve
US4628576A (en) * 1985-02-21 1986-12-16 Ford Motor Company Method for fabricating a silicon valve
US4647013A (en) * 1985-02-21 1987-03-03 Ford Motor Company Silicon valve
US4768751A (en) * 1987-10-19 1988-09-06 Ford Motor Company Silicon micromachined non-elastic flow valves
WO1989008787A1 (fr) * 1988-03-14 1989-09-21 Baxter International Inc. Systemes presentant des mecanismes de regulation de debit a vitesse constante et variable
US5176360A (en) * 1988-03-14 1993-01-05 Baxter International Inc. Infusor having fixed and variable flow rate control mechanisms
US5014750A (en) * 1988-03-14 1991-05-14 Baxter International Inc. Systems having fixed and variable flow rate control mechanisms
US5009251A (en) * 1988-11-15 1991-04-23 Baxter International, Inc. Fluid flow control
SG45171A1 (en) * 1990-03-21 1998-01-16 Boehringer Ingelheim Int Atomising devices and methods
DE4112150C2 (de) * 1990-09-21 1998-11-19 Bosch Gmbh Robert Lochkörper und Ventil mit Lochkörper
IL100224A (en) * 1990-12-04 1994-10-21 Dmw Tech Ltd Spray nozzle
DE4104019C1 (fr) * 1991-02-09 1992-04-23 Robert Bosch Gmbh, 7000 Stuttgart, De
ATE173197T1 (de) * 1992-08-31 1998-11-15 Canon Kk Tintenstrahlkopfherstellungsverfahren mittels bearbeitung durch ionen und tintenstrahlkopf
US6007676A (en) 1992-09-29 1999-12-28 Boehringer Ingelheim International Gmbh Atomizing nozzle and filter and spray generating device
IL107120A (en) * 1992-09-29 1997-09-30 Boehringer Ingelheim Int Atomising nozzle and filter and spray generating device
DE69415362T2 (de) * 1993-02-17 1999-06-10 DENSO CORPORATION, Kariya-city, Aichi-pref. Flüssigkeiteinspritzventil
US5569187A (en) * 1994-08-16 1996-10-29 Texas Instruments Incorporated Method and apparatus for wireless chemical supplying
US5908414A (en) * 1995-05-03 1999-06-01 Tricumed Gmbh Implantable infusion pump
DE19515722C1 (de) * 1995-05-03 1996-07-25 Tricumed Gmbh Implantierbare Infusionspumpe
US5992769A (en) * 1995-06-09 1999-11-30 The Regents Of The University Of Michigan Microchannel system for fluid delivery
GB2302842B (en) * 1995-07-03 1998-12-30 Seiko Epson Corp A nozzle plate, ink-jet head and manufacturing method thereof
JP3386099B2 (ja) * 1995-07-03 2003-03-10 セイコーエプソン株式会社 インクジェット式記録ヘッド用ノズルプレート、これの製造方法、及びインクジェット式記録ヘッド
US5658471A (en) * 1995-09-22 1997-08-19 Lexmark International, Inc. Fabrication of thermal ink-jet feed slots in a silicon substrate
US5757400A (en) * 1996-02-01 1998-05-26 Spectra, Inc. High resolution matrix ink jet arrangement
US6352209B1 (en) 1996-07-08 2002-03-05 Corning Incorporated Gas assisted atomizing devices and methods of making gas-assisted atomizing devices
EP0910478A4 (fr) * 1996-07-08 1999-09-01 Corning Inc Dispositifs d'atomisation a rupture de rayleigh et procedes de fabrication de ces dispositifs
BR9710223A (pt) 1996-07-08 2000-01-18 Spraychip Systems Dispositivo de atomização auxiliado por gás.
US5901425A (en) * 1996-08-27 1999-05-11 Topaz Technologies Inc. Inkjet print head apparatus
WO1998047712A1 (fr) * 1997-04-18 1998-10-29 Topaz Technologies, Inc. Plaque de buse pour tete d'impression par jet d'encre
EP0985534A4 (fr) * 1997-05-14 2001-03-28 Seiko Epson Corp Procede de formation d'ajutage pour injecteurs et procede de fabrication d'une tete a jet d'encre
JP3530744B2 (ja) * 1997-07-04 2004-05-24 キヤノン株式会社 インクジェット記録ヘッドの製造方法
DE19742439C1 (de) * 1997-09-26 1998-10-22 Boehringer Ingelheim Int Mikrostrukturiertes Filter
EP1044172A4 (fr) * 1997-12-19 2005-01-19 Corning Inc Bruleur et procede de production de suies d'oxyde metallique
WO2000015321A1 (fr) * 1998-09-17 2000-03-23 Advanced Bioanalytical Services, Inc. Systeme monolithique integre microfabrique d'electronebulisation et de chromatographie en phase liquide et procede associe
US6363606B1 (en) * 1998-10-16 2002-04-02 Agere Systems Guardian Corp. Process for forming integrated structures using three dimensional printing techniques
US6633031B1 (en) 1999-03-02 2003-10-14 Advion Biosciences, Inc. Integrated monolithic microfabricated dispensing nozzle and liquid chromatography-electrospray system and method
JP2001179987A (ja) * 1999-12-22 2001-07-03 Samsung Electro Mech Co Ltd ノズルプレート及びその製造方法
CN1237572C (zh) 1999-12-30 2006-01-18 阿德维昂生物科学公司 多电雾化装置、系统和方法
JP2003520962A (ja) 2000-01-18 2003-07-08 アドビオン バイオサイエンシーズ インコーポレーティッド 分離媒体、複式電気噴霧ノズルシステム、および方法
KR100499118B1 (ko) 2000-02-24 2005-07-04 삼성전자주식회사 단결정 실리콘 웨이퍼를 이용한 일체형 유체 노즐어셈블리 및 그 제작방법
DE10101875B4 (de) * 2001-01-16 2006-05-04 Infineon Technologies Ag Elektronisches Bauteil mit aufeinander gestapelten Halbleiterchips und Verfahren zu seiner Herstellung
JP3881985B2 (ja) * 2001-12-04 2007-02-14 株式会社アトック 石英ガラス製流体送給用単穴ノズル及び石英ガラス製流体送給用多穴バーナヘッド
JP3975272B2 (ja) * 2002-02-21 2007-09-12 独立行政法人産業技術総合研究所 超微細流体ジェット装置
EP1665353A4 (fr) * 2003-09-09 2006-11-29 Csg Solar Ag Procede ameliore de gravure de silicium
WO2005024920A1 (fr) * 2003-09-09 2005-03-17 Csg Solar, Ag Procede ameliore de formation d'ouvertures dans une matiere de resine organique
WO2005024959A1 (fr) * 2003-09-09 2005-03-17 Csg Solar, Ag Reglage de masques par refusion
WO2005039696A1 (fr) * 2003-10-21 2005-05-06 The Regents Of The University Of Michigan Systeme d'interface neuronal intracranien
US7347532B2 (en) * 2004-08-05 2008-03-25 Fujifilm Dimatix, Inc. Print head nozzle formation
US9014796B2 (en) 2005-06-14 2015-04-21 Regents Of The University Of Michigan Flexible polymer microelectrode with fluid delivery capability and methods for making same
EP1931419B1 (fr) * 2005-10-07 2016-08-10 NeuroNexus Technologies, Inc. Reseau de microelectrodes multivoie modulaire
US8195267B2 (en) 2006-01-26 2012-06-05 Seymour John P Microelectrode with laterally extending platform for reduction of tissue encapsulation
JP4881126B2 (ja) * 2006-10-25 2012-02-22 株式会社東芝 ノズルプレートの製造方法、および液滴吐出ヘッドの製造方法
US8731673B2 (en) 2007-02-26 2014-05-20 Sapiens Steering Brain Stimulation B.V. Neural interface system
US20100276505A1 (en) * 2007-09-26 2010-11-04 Roger Earl Smith Drilling in stretched substrates
US8958862B2 (en) 2007-10-17 2015-02-17 Neuronexus Technologies, Inc. Implantable device including a resorbable carrier
US8565894B2 (en) * 2007-10-17 2013-10-22 Neuronexus Technologies, Inc. Three-dimensional system of electrode leads
US8224417B2 (en) 2007-10-17 2012-07-17 Neuronexus Technologies, Inc. Guide tube for an implantable device system
US8498720B2 (en) 2008-02-29 2013-07-30 Neuronexus Technologies, Inc. Implantable electrode and method of making the same
US20090240314A1 (en) * 2008-03-24 2009-09-24 Kong K C Implantable electrode lead system with a three dimensional arrangement and method of making the same
US9289142B2 (en) 2008-03-24 2016-03-22 Neuronexus Technologies, Inc. Implantable electrode lead system with a three dimensional arrangement and method of making the same
JP2012507417A (ja) * 2008-10-31 2012-03-29 フジフィルム ディマティックス， インコーポレイテッド ノズル噴出口成形
EP2488098B1 (fr) * 2009-10-16 2014-03-19 Neuronexus Technologies Système d'interface neuronale
CN102686147B (zh) 2009-11-05 2016-01-20 格雷特巴奇有限公司 波导神经接口装置
US9155861B2 (en) 2010-09-20 2015-10-13 Neuronexus Technologies, Inc. Neural drug delivery system with fluidic threads
JP6901446B2 (ja) 2018-09-03 2021-07-14 株式会社東芝 無線通信装置、無線通信システム、無線通信方法及びプログラム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4959575A (fr) * 1972-06-29 1974-06-10

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2665946A (en) * 1951-05-29 1954-01-12 Arthur E Broughton Spray nozzle
US2834635A (en) * 1955-06-22 1958-05-13 Muellermist Irrigation Co Liquid spray device
US2987262A (en) * 1959-11-24 1961-06-06 Lodding Engineering Corp Removable and replaceable shower device
US3125295A (en) * 1960-12-30 1964-03-17 Crystal
US3211088A (en) * 1962-05-04 1965-10-12 Sperry Rand Corp Exponential horn printer
JPS5040616B1 (fr) * 1970-03-18 1975-12-25
US3655530A (en) * 1970-06-15 1972-04-11 Mead Corp Fabrication of orifices

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4959575A (fr) * 1972-06-29 1974-06-10

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56155772A (en) * 1980-02-22 1981-12-02 Celanese Corp Precise orifice nozzle device for ink injecting printer and its manufacture
JPS59184666A (ja) * 1983-04-05 1984-10-20 Yokogawa Hewlett Packard Ltd 液体噴霧装置
JPH0333110B2 (fr) * 1983-04-05 1991-05-15 Hewlett Packard Co
JPS6198558A (ja) * 1984-10-15 1986-05-16 エーテイーアンドテイー　テレタイプ　コーポレーシヨン ノズル及びそのノズル構造を形成するプロセス
JP2010267951A (ja) * 2008-12-30 2010-11-25 Fujifilm Corp ノズル形成方法
US8641171B2 (en) 2008-12-30 2014-02-04 Fujifilm Corporation Forming nozzles

Also Published As

Publication number Publication date
IT1054354B (it) 1981-11-10
GB1492465A (en) 1977-11-23
JPS5516070B2 (fr) 1980-04-28
DE2555462C2 (de) 1982-06-03
FR2296504A1 (fr) 1976-07-30
US3921916A (en) 1975-11-25
DE2555462A1 (de) 1976-07-08
FR2296504B1 (fr) 1978-05-12
CA1037519A (fr) 1978-08-29

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