JPS51148385A - Semiconductor memory cell - Google Patents

Semiconductor memory cell

Info

Publication number
JPS51148385A
JPS51148385A JP50072591A JP7259175A JPS51148385A JP S51148385 A JPS51148385 A JP S51148385A JP 50072591 A JP50072591 A JP 50072591A JP 7259175 A JP7259175 A JP 7259175A JP S51148385 A JPS51148385 A JP S51148385A
Authority
JP
Japan
Prior art keywords
memory cell
semiconductor memory
enlarging
make
charge capacity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50072591A
Other languages
English (en)
Japanese (ja)
Other versions
JPS617752B2 (en:Method
Inventor
Junichi Mogi
Kiyoshi Miyasaka
Eiji Noguchi
Seiji Emoto
Fumio Baba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50072591A priority Critical patent/JPS51148385A/ja
Publication of JPS51148385A publication Critical patent/JPS51148385A/ja
Publication of JPS617752B2 publication Critical patent/JPS617752B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B12/00Dynamic random access memory [DRAM] devices
    • H10B12/30DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/37DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
JP50072591A 1975-06-14 1975-06-14 Semiconductor memory cell Granted JPS51148385A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50072591A JPS51148385A (en) 1975-06-14 1975-06-14 Semiconductor memory cell

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50072591A JPS51148385A (en) 1975-06-14 1975-06-14 Semiconductor memory cell

Publications (2)

Publication Number Publication Date
JPS51148385A true JPS51148385A (en) 1976-12-20
JPS617752B2 JPS617752B2 (en:Method) 1986-03-08

Family

ID=13493780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50072591A Granted JPS51148385A (en) 1975-06-14 1975-06-14 Semiconductor memory cell

Country Status (1)

Country Link
JP (1) JPS51148385A (en:Method)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58213460A (ja) * 1982-06-07 1983-12-12 Nec Corp 半導体集積回路装置
JPS60262461A (ja) * 1984-06-08 1985-12-25 Matsushita Electronics Corp 電荷結合装置
JPS6182458A (ja) * 1984-09-29 1986-04-26 Toshiba Corp 半導体メモリ装置
JPS61184886A (ja) * 1985-02-12 1986-08-18 Matsushita Electronics Corp 半導体装置
JPS6251254A (ja) * 1985-08-30 1987-03-05 Fuji Photo Film Co Ltd 固体撮像装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230049371A (ko) 2021-10-06 2023-04-13 삼성전기주식회사 적층형 커패시터의 내부 전극의 적층 방향 검출 장치 및 검출 방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4957779A (en:Method) * 1972-06-02 1974-06-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4957779A (en:Method) * 1972-06-02 1974-06-05

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58213460A (ja) * 1982-06-07 1983-12-12 Nec Corp 半導体集積回路装置
JPS60262461A (ja) * 1984-06-08 1985-12-25 Matsushita Electronics Corp 電荷結合装置
JPS6182458A (ja) * 1984-09-29 1986-04-26 Toshiba Corp 半導体メモリ装置
JPS61184886A (ja) * 1985-02-12 1986-08-18 Matsushita Electronics Corp 半導体装置
JPS6251254A (ja) * 1985-08-30 1987-03-05 Fuji Photo Film Co Ltd 固体撮像装置

Also Published As

Publication number Publication date
JPS617752B2 (en:Method) 1986-03-08

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