JPS51148385A - Semiconductor memory cell - Google Patents
Semiconductor memory cellInfo
- Publication number
- JPS51148385A JPS51148385A JP50072591A JP7259175A JPS51148385A JP S51148385 A JPS51148385 A JP S51148385A JP 50072591 A JP50072591 A JP 50072591A JP 7259175 A JP7259175 A JP 7259175A JP S51148385 A JPS51148385 A JP S51148385A
- Authority
- JP
- Japan
- Prior art keywords
- memory cell
- semiconductor memory
- enlarging
- make
- charge capacity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/37—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50072591A JPS51148385A (en) | 1975-06-14 | 1975-06-14 | Semiconductor memory cell |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50072591A JPS51148385A (en) | 1975-06-14 | 1975-06-14 | Semiconductor memory cell |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51148385A true JPS51148385A (en) | 1976-12-20 |
JPS617752B2 JPS617752B2 (en:Method) | 1986-03-08 |
Family
ID=13493780
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50072591A Granted JPS51148385A (en) | 1975-06-14 | 1975-06-14 | Semiconductor memory cell |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51148385A (en:Method) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58213460A (ja) * | 1982-06-07 | 1983-12-12 | Nec Corp | 半導体集積回路装置 |
JPS60262461A (ja) * | 1984-06-08 | 1985-12-25 | Matsushita Electronics Corp | 電荷結合装置 |
JPS6182458A (ja) * | 1984-09-29 | 1986-04-26 | Toshiba Corp | 半導体メモリ装置 |
JPS61184886A (ja) * | 1985-02-12 | 1986-08-18 | Matsushita Electronics Corp | 半導体装置 |
JPS6251254A (ja) * | 1985-08-30 | 1987-03-05 | Fuji Photo Film Co Ltd | 固体撮像装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20230049371A (ko) | 2021-10-06 | 2023-04-13 | 삼성전기주식회사 | 적층형 커패시터의 내부 전극의 적층 방향 검출 장치 및 검출 방법 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4957779A (en:Method) * | 1972-06-02 | 1974-06-05 |
-
1975
- 1975-06-14 JP JP50072591A patent/JPS51148385A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4957779A (en:Method) * | 1972-06-02 | 1974-06-05 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58213460A (ja) * | 1982-06-07 | 1983-12-12 | Nec Corp | 半導体集積回路装置 |
JPS60262461A (ja) * | 1984-06-08 | 1985-12-25 | Matsushita Electronics Corp | 電荷結合装置 |
JPS6182458A (ja) * | 1984-09-29 | 1986-04-26 | Toshiba Corp | 半導体メモリ装置 |
JPS61184886A (ja) * | 1985-02-12 | 1986-08-18 | Matsushita Electronics Corp | 半導体装置 |
JPS6251254A (ja) * | 1985-08-30 | 1987-03-05 | Fuji Photo Film Co Ltd | 固体撮像装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS617752B2 (en:Method) | 1986-03-08 |
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