JPS51141577A - Method and apparatus for epitaxial growth in the liquid phase - Google Patents

Method and apparatus for epitaxial growth in the liquid phase

Info

Publication number
JPS51141577A
JPS51141577A JP6529775A JP6529775A JPS51141577A JP S51141577 A JPS51141577 A JP S51141577A JP 6529775 A JP6529775 A JP 6529775A JP 6529775 A JP6529775 A JP 6529775A JP S51141577 A JPS51141577 A JP S51141577A
Authority
JP
Japan
Prior art keywords
liquid phase
epitaxial growth
used solution
crystal growth
contamination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6529775A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5742210B2 (enExample
Inventor
Kenzo Akita
Yorimitsu Nishitani
Takeshi Kotani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6529775A priority Critical patent/JPS51141577A/ja
Publication of JPS51141577A publication Critical patent/JPS51141577A/ja
Publication of JPS5742210B2 publication Critical patent/JPS5742210B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP6529775A 1975-06-02 1975-06-02 Method and apparatus for epitaxial growth in the liquid phase Granted JPS51141577A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6529775A JPS51141577A (en) 1975-06-02 1975-06-02 Method and apparatus for epitaxial growth in the liquid phase

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6529775A JPS51141577A (en) 1975-06-02 1975-06-02 Method and apparatus for epitaxial growth in the liquid phase

Publications (2)

Publication Number Publication Date
JPS51141577A true JPS51141577A (en) 1976-12-06
JPS5742210B2 JPS5742210B2 (enExample) 1982-09-07

Family

ID=13282834

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6529775A Granted JPS51141577A (en) 1975-06-02 1975-06-02 Method and apparatus for epitaxial growth in the liquid phase

Country Status (1)

Country Link
JP (1) JPS51141577A (enExample)

Also Published As

Publication number Publication date
JPS5742210B2 (enExample) 1982-09-07

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