JPS51139773A - Method of cutting a semiconductor material - Google Patents

Method of cutting a semiconductor material

Info

Publication number
JPS51139773A
JPS51139773A JP6390475A JP6390475A JPS51139773A JP S51139773 A JPS51139773 A JP S51139773A JP 6390475 A JP6390475 A JP 6390475A JP 6390475 A JP6390475 A JP 6390475A JP S51139773 A JPS51139773 A JP S51139773A
Authority
JP
Japan
Prior art keywords
cutting
semiconductor material
wafer surface
wafer
omit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6390475A
Other languages
English (en)
Inventor
Shinzaburo Iwabuchi
Shinichi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6390475A priority Critical patent/JPS51139773A/ja
Publication of JPS51139773A publication Critical patent/JPS51139773A/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP6390475A 1975-05-28 1975-05-28 Method of cutting a semiconductor material Pending JPS51139773A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6390475A JPS51139773A (en) 1975-05-28 1975-05-28 Method of cutting a semiconductor material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6390475A JPS51139773A (en) 1975-05-28 1975-05-28 Method of cutting a semiconductor material

Publications (1)

Publication Number Publication Date
JPS51139773A true JPS51139773A (en) 1976-12-02

Family

ID=13242764

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6390475A Pending JPS51139773A (en) 1975-05-28 1975-05-28 Method of cutting a semiconductor material

Country Status (1)

Country Link
JP (1) JPS51139773A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5590253A (en) * 1978-12-27 1980-07-08 Muratani Kikai Seisakusho:Kk Method and device for cutting off hard brittle material by vibration

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5590253A (en) * 1978-12-27 1980-07-08 Muratani Kikai Seisakusho:Kk Method and device for cutting off hard brittle material by vibration

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