JPS51137391A - Semiconductor pressure sensitive element and its manufacturing method - Google Patents

Semiconductor pressure sensitive element and its manufacturing method

Info

Publication number
JPS51137391A
JPS51137391A JP6102275A JP6102275A JPS51137391A JP S51137391 A JPS51137391 A JP S51137391A JP 6102275 A JP6102275 A JP 6102275A JP 6102275 A JP6102275 A JP 6102275A JP S51137391 A JPS51137391 A JP S51137391A
Authority
JP
Japan
Prior art keywords
manufacturing
pressure sensitive
semiconductor pressure
sensitive element
elemnt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6102275A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5441396B2 (cs
Inventor
Michitaka Shimazoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6102275A priority Critical patent/JPS51137391A/ja
Publication of JPS51137391A publication Critical patent/JPS51137391A/ja
Publication of JPS5441396B2 publication Critical patent/JPS5441396B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
JP6102275A 1975-05-23 1975-05-23 Semiconductor pressure sensitive element and its manufacturing method Granted JPS51137391A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6102275A JPS51137391A (en) 1975-05-23 1975-05-23 Semiconductor pressure sensitive element and its manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6102275A JPS51137391A (en) 1975-05-23 1975-05-23 Semiconductor pressure sensitive element and its manufacturing method

Publications (2)

Publication Number Publication Date
JPS51137391A true JPS51137391A (en) 1976-11-27
JPS5441396B2 JPS5441396B2 (cs) 1979-12-07

Family

ID=13159258

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6102275A Granted JPS51137391A (en) 1975-05-23 1975-05-23 Semiconductor pressure sensitive element and its manufacturing method

Country Status (1)

Country Link
JP (1) JPS51137391A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5257238U (cs) * 1976-10-13 1977-04-25

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5257238U (cs) * 1976-10-13 1977-04-25

Also Published As

Publication number Publication date
JPS5441396B2 (cs) 1979-12-07

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