JPS51131481A - A vacuum vaporizing apparatus - Google Patents

A vacuum vaporizing apparatus

Info

Publication number
JPS51131481A
JPS51131481A JP5656675A JP5656675A JPS51131481A JP S51131481 A JPS51131481 A JP S51131481A JP 5656675 A JP5656675 A JP 5656675A JP 5656675 A JP5656675 A JP 5656675A JP S51131481 A JPS51131481 A JP S51131481A
Authority
JP
Japan
Prior art keywords
vaporizing apparatus
vacuum
vacuum vaporizing
vaporizing
vaporized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5656675A
Other languages
Japanese (ja)
Other versions
JPS5418986B2 (en
Inventor
Isao Matsuzawa
Yasushi Kawashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Seiki Co Ltd
Original Assignee
Shinko Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Seiki Co Ltd filed Critical Shinko Seiki Co Ltd
Priority to JP5656675A priority Critical patent/JPS51131481A/en
Publication of JPS51131481A publication Critical patent/JPS51131481A/en
Publication of JPS5418986B2 publication Critical patent/JPS5418986B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:In a vacuum vaporizing apparatus, parts to be vaporized are so supported as to make oscillating motion while they are rotating to permit formation of uniform vaporizing film even on an uneven surface.
JP5656675A 1975-05-12 1975-05-12 A vacuum vaporizing apparatus Granted JPS51131481A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5656675A JPS51131481A (en) 1975-05-12 1975-05-12 A vacuum vaporizing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5656675A JPS51131481A (en) 1975-05-12 1975-05-12 A vacuum vaporizing apparatus

Publications (2)

Publication Number Publication Date
JPS51131481A true JPS51131481A (en) 1976-11-15
JPS5418986B2 JPS5418986B2 (en) 1979-07-11

Family

ID=13030672

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5656675A Granted JPS51131481A (en) 1975-05-12 1975-05-12 A vacuum vaporizing apparatus

Country Status (1)

Country Link
JP (1) JPS51131481A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5550466A (en) * 1978-10-11 1980-04-12 Tokuda Seisakusho Ltd Vacuum film forming method
JPS5949206U (en) * 1982-09-21 1984-04-02 東京精密測器株式会社 Position control device for workpiece inside vacuum container
JPS619568A (en) * 1984-06-25 1986-01-17 Fujitsu Ltd Formation of coated film

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5550466A (en) * 1978-10-11 1980-04-12 Tokuda Seisakusho Ltd Vacuum film forming method
JPS5649992B2 (en) * 1978-10-11 1981-11-26
JPS5949206U (en) * 1982-09-21 1984-04-02 東京精密測器株式会社 Position control device for workpiece inside vacuum container
JPH0348648Y2 (en) * 1982-09-21 1991-10-17
JPS619568A (en) * 1984-06-25 1986-01-17 Fujitsu Ltd Formation of coated film

Also Published As

Publication number Publication date
JPS5418986B2 (en) 1979-07-11

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