JPS5418986B2 - - Google Patents
Info
- Publication number
- JPS5418986B2 JPS5418986B2 JP5656675A JP5656675A JPS5418986B2 JP S5418986 B2 JPS5418986 B2 JP S5418986B2 JP 5656675 A JP5656675 A JP 5656675A JP 5656675 A JP5656675 A JP 5656675A JP S5418986 B2 JPS5418986 B2 JP S5418986B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5656675A JPS51131481A (en) | 1975-05-12 | 1975-05-12 | A vacuum vaporizing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5656675A JPS51131481A (en) | 1975-05-12 | 1975-05-12 | A vacuum vaporizing apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51131481A JPS51131481A (en) | 1976-11-15 |
| JPS5418986B2 true JPS5418986B2 (en) | 1979-07-11 |
Family
ID=13030672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5656675A Granted JPS51131481A (en) | 1975-05-12 | 1975-05-12 | A vacuum vaporizing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51131481A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5550466A (en) * | 1978-10-11 | 1980-04-12 | Tokuda Seisakusho Ltd | Vacuum film forming method |
| JPS5949206U (en) * | 1982-09-21 | 1984-04-02 | 東京精密測器株式会社 | Position control device for workpiece inside vacuum container |
| JPS619568A (en) * | 1984-06-25 | 1986-01-17 | Fujitsu Ltd | Formation of coated film |
-
1975
- 1975-05-12 JP JP5656675A patent/JPS51131481A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51131481A (en) | 1976-11-15 |