JPS51131269A - Vapor phase propagation process and vapor phase propagation unit - Google Patents

Vapor phase propagation process and vapor phase propagation unit

Info

Publication number
JPS51131269A
JPS51131269A JP5465275A JP5465275A JPS51131269A JP S51131269 A JPS51131269 A JP S51131269A JP 5465275 A JP5465275 A JP 5465275A JP 5465275 A JP5465275 A JP 5465275A JP S51131269 A JPS51131269 A JP S51131269A
Authority
JP
Japan
Prior art keywords
vapor phase
phase propagation
unit
propagation process
propagation unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5465275A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5760772B2 (enExample
Inventor
Shoji Tsuburaya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP5465275A priority Critical patent/JPS51131269A/ja
Publication of JPS51131269A publication Critical patent/JPS51131269A/ja
Publication of JPS5760772B2 publication Critical patent/JPS5760772B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
JP5465275A 1975-05-12 1975-05-12 Vapor phase propagation process and vapor phase propagation unit Granted JPS51131269A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5465275A JPS51131269A (en) 1975-05-12 1975-05-12 Vapor phase propagation process and vapor phase propagation unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5465275A JPS51131269A (en) 1975-05-12 1975-05-12 Vapor phase propagation process and vapor phase propagation unit

Publications (2)

Publication Number Publication Date
JPS51131269A true JPS51131269A (en) 1976-11-15
JPS5760772B2 JPS5760772B2 (enExample) 1982-12-21

Family

ID=12976704

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5465275A Granted JPS51131269A (en) 1975-05-12 1975-05-12 Vapor phase propagation process and vapor phase propagation unit

Country Status (1)

Country Link
JP (1) JPS51131269A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5350428U (enExample) * 1976-10-01 1978-04-28
JPS5350429U (enExample) * 1976-10-01 1978-04-28
JPS60117736A (ja) * 1983-11-30 1985-06-25 Nec Corp ベ−パ−エッチング方法
JPS63143811A (ja) * 1986-12-08 1988-06-16 Toshiba Ceramics Co Ltd 縦型ｃｖｄ装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5350428U (enExample) * 1976-10-01 1978-04-28
JPS5350429U (enExample) * 1976-10-01 1978-04-28
JPS60117736A (ja) * 1983-11-30 1985-06-25 Nec Corp ベ−パ−エッチング方法
JPS63143811A (ja) * 1986-12-08 1988-06-16 Toshiba Ceramics Co Ltd 縦型ｃｖｄ装置

Also Published As

Publication number Publication date
JPS5760772B2 (enExample) 1982-12-21

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