JPS5760772B2 - - Google Patents
Info
- Publication number
- JPS5760772B2 JPS5760772B2 JP5465275A JP5465275A JPS5760772B2 JP S5760772 B2 JPS5760772 B2 JP S5760772B2 JP 5465275 A JP5465275 A JP 5465275A JP 5465275 A JP5465275 A JP 5465275A JP S5760772 B2 JPS5760772 B2 JP S5760772B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5465275A JPS51131269A (en) | 1975-05-12 | 1975-05-12 | Vapor phase propagation process and vapor phase propagation unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5465275A JPS51131269A (en) | 1975-05-12 | 1975-05-12 | Vapor phase propagation process and vapor phase propagation unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51131269A JPS51131269A (en) | 1976-11-15 |
| JPS5760772B2 true JPS5760772B2 (enExample) | 1982-12-21 |
Family
ID=12976704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5465275A Granted JPS51131269A (en) | 1975-05-12 | 1975-05-12 | Vapor phase propagation process and vapor phase propagation unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51131269A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5634560Y2 (enExample) * | 1976-10-01 | 1981-08-14 | ||
| JPS5350428U (enExample) * | 1976-10-01 | 1978-04-28 | ||
| JPS60117736A (ja) * | 1983-11-30 | 1985-06-25 | Nec Corp | ベ−パ−エッチング方法 |
| JPS63143811A (ja) * | 1986-12-08 | 1988-06-16 | Toshiba Ceramics Co Ltd | 縦型ｃｖｄ装置 |
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1975
- 1975-05-12 JP JP5465275A patent/JPS51131269A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51131269A (en) | 1976-11-15 |