JPS51130184A - Semiconductor ic resistance element process - Google Patents

Semiconductor ic resistance element process

Info

Publication number
JPS51130184A
JPS51130184A JP50054842A JP5484275A JPS51130184A JP S51130184 A JPS51130184 A JP S51130184A JP 50054842 A JP50054842 A JP 50054842A JP 5484275 A JP5484275 A JP 5484275A JP S51130184 A JPS51130184 A JP S51130184A
Authority
JP
Japan
Prior art keywords
semiconductor
resistance element
element process
precision
silicon layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50054842A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5634094B2 (it
Inventor
Haruyasu Yamada
Tsutomu Fujita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50054842A priority Critical patent/JPS51130184A/ja
Publication of JPS51130184A publication Critical patent/JPS51130184A/ja
Publication of JPS5634094B2 publication Critical patent/JPS5634094B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)
JP50054842A 1975-05-06 1975-05-06 Semiconductor ic resistance element process Granted JPS51130184A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50054842A JPS51130184A (en) 1975-05-06 1975-05-06 Semiconductor ic resistance element process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50054842A JPS51130184A (en) 1975-05-06 1975-05-06 Semiconductor ic resistance element process

Publications (2)

Publication Number Publication Date
JPS51130184A true JPS51130184A (en) 1976-11-12
JPS5634094B2 JPS5634094B2 (it) 1981-08-07

Family

ID=12981859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50054842A Granted JPS51130184A (en) 1975-05-06 1975-05-06 Semiconductor ic resistance element process

Country Status (1)

Country Link
JP (1) JPS51130184A (it)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5526570U (it) * 1978-08-11 1980-02-20
JPS5676558A (en) * 1979-11-22 1981-06-24 Burr Brown Res Corp Method of trimming value of element for integrated circuit and integrated circuit
JPS5691460A (en) * 1979-12-25 1981-07-24 Seiko Epson Corp Manufacturing of dispersion layer resistor
JPS56100427A (en) * 1980-01-16 1981-08-12 Nec Corp Manufacture of semiconductor device
JPS57180157A (en) * 1981-04-30 1982-11-06 Nec Corp Trimming resistor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63208697A (ja) * 1987-02-24 1988-08-30 Ishikawajima Harima Heavy Ind Co Ltd タ−ボ圧縮機の制御方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5526570U (it) * 1978-08-11 1980-02-20
JPS5676558A (en) * 1979-11-22 1981-06-24 Burr Brown Res Corp Method of trimming value of element for integrated circuit and integrated circuit
JPS5691460A (en) * 1979-12-25 1981-07-24 Seiko Epson Corp Manufacturing of dispersion layer resistor
JPS56100427A (en) * 1980-01-16 1981-08-12 Nec Corp Manufacture of semiconductor device
JPS57180157A (en) * 1981-04-30 1982-11-06 Nec Corp Trimming resistor

Also Published As

Publication number Publication date
JPS5634094B2 (it) 1981-08-07

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