JPS51129183A - Manufacturing method of semiconductor - Google Patents

Manufacturing method of semiconductor

Info

Publication number
JPS51129183A
JPS51129183A JP5358175A JP5358175A JPS51129183A JP S51129183 A JPS51129183 A JP S51129183A JP 5358175 A JP5358175 A JP 5358175A JP 5358175 A JP5358175 A JP 5358175A JP S51129183 A JPS51129183 A JP S51129183A
Authority
JP
Japan
Prior art keywords
semiconductor
manufacturing
gate electrode
source
drain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5358175A
Other languages
Japanese (ja)
Inventor
Satoru Kawazu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP5358175A priority Critical patent/JPS51129183A/en
Publication of JPS51129183A publication Critical patent/JPS51129183A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To make high speed working possible by means of automatically spotting the gate electrode and the source drain area by using the self matching matching method and reducing the capacity caused by overlap of the source, drain and gate electrode.
COPYRIGHT: (C)1976,JPO&Japio
JP5358175A 1975-05-02 1975-05-02 Manufacturing method of semiconductor Pending JPS51129183A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5358175A JPS51129183A (en) 1975-05-02 1975-05-02 Manufacturing method of semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5358175A JPS51129183A (en) 1975-05-02 1975-05-02 Manufacturing method of semiconductor

Publications (1)

Publication Number Publication Date
JPS51129183A true JPS51129183A (en) 1976-11-10

Family

ID=12946795

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5358175A Pending JPS51129183A (en) 1975-05-02 1975-05-02 Manufacturing method of semiconductor

Country Status (1)

Country Link
JP (1) JPS51129183A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4831516A (en) * 1971-08-26 1973-04-25
JPS4871191A (en) * 1971-12-24 1973-09-26

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4831516A (en) * 1971-08-26 1973-04-25
JPS4871191A (en) * 1971-12-24 1973-09-26

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