JPS51129183A - Manufacturing method of semiconductor - Google Patents
Manufacturing method of semiconductorInfo
- Publication number
- JPS51129183A JPS51129183A JP5358175A JP5358175A JPS51129183A JP S51129183 A JPS51129183 A JP S51129183A JP 5358175 A JP5358175 A JP 5358175A JP 5358175 A JP5358175 A JP 5358175A JP S51129183 A JPS51129183 A JP S51129183A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- manufacturing
- gate electrode
- source
- drain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To make high speed working possible by means of automatically spotting the gate electrode and the source drain area by using the self matching matching method and reducing the capacity caused by overlap of the source, drain and gate electrode.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5358175A JPS51129183A (en) | 1975-05-02 | 1975-05-02 | Manufacturing method of semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5358175A JPS51129183A (en) | 1975-05-02 | 1975-05-02 | Manufacturing method of semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51129183A true JPS51129183A (en) | 1976-11-10 |
Family
ID=12946795
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5358175A Pending JPS51129183A (en) | 1975-05-02 | 1975-05-02 | Manufacturing method of semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51129183A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4831516A (en) * | 1971-08-26 | 1973-04-25 | ||
JPS4871191A (en) * | 1971-12-24 | 1973-09-26 |
-
1975
- 1975-05-02 JP JP5358175A patent/JPS51129183A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4831516A (en) * | 1971-08-26 | 1973-04-25 | ||
JPS4871191A (en) * | 1971-12-24 | 1973-09-26 |
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