JPS51126779A - Fine pattern processing method - Google Patents

Fine pattern processing method

Info

Publication number
JPS51126779A
JPS51126779A JP4971775A JP4971775A JPS51126779A JP S51126779 A JPS51126779 A JP S51126779A JP 4971775 A JP4971775 A JP 4971775A JP 4971775 A JP4971775 A JP 4971775A JP S51126779 A JPS51126779 A JP S51126779A
Authority
JP
Japan
Prior art keywords
fine pattern
processing method
pattern processing
elimination
defective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4971775A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5746655B2 (Direct
Inventor
Tadao Kachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4971775A priority Critical patent/JPS51126779A/ja
Publication of JPS51126779A publication Critical patent/JPS51126779A/ja
Publication of JPS5746655B2 publication Critical patent/JPS5746655B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP4971775A 1975-04-25 1975-04-25 Fine pattern processing method Granted JPS51126779A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4971775A JPS51126779A (en) 1975-04-25 1975-04-25 Fine pattern processing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4971775A JPS51126779A (en) 1975-04-25 1975-04-25 Fine pattern processing method

Publications (2)

Publication Number Publication Date
JPS51126779A true JPS51126779A (en) 1976-11-05
JPS5746655B2 JPS5746655B2 (Direct) 1982-10-05

Family

ID=12838929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4971775A Granted JPS51126779A (en) 1975-04-25 1975-04-25 Fine pattern processing method

Country Status (1)

Country Link
JP (1) JPS51126779A (Direct)

Also Published As

Publication number Publication date
JPS5746655B2 (Direct) 1982-10-05

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