JPS51122379A - Treatment for defect of photo-mask - Google Patents
Treatment for defect of photo-maskInfo
- Publication number
- JPS51122379A JPS51122379A JP4631975A JP4631975A JPS51122379A JP S51122379 A JPS51122379 A JP S51122379A JP 4631975 A JP4631975 A JP 4631975A JP 4631975 A JP4631975 A JP 4631975A JP S51122379 A JPS51122379 A JP S51122379A
- Authority
- JP
- Japan
- Prior art keywords
- photo
- mask
- treatment
- defect
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: Treatment method for defective blank place in photo-mask pattern (especially pin-hole).
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4631975A JPS51122379A (en) | 1975-04-18 | 1975-04-18 | Treatment for defect of photo-mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4631975A JPS51122379A (en) | 1975-04-18 | 1975-04-18 | Treatment for defect of photo-mask |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51122379A true JPS51122379A (en) | 1976-10-26 |
JPS5750048B2 JPS5750048B2 (en) | 1982-10-25 |
Family
ID=12743829
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4631975A Granted JPS51122379A (en) | 1975-04-18 | 1975-04-18 | Treatment for defect of photo-mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51122379A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57165832A (en) * | 1981-03-16 | 1982-10-13 | Monosoraa Inc | Thin film |
JPS586128A (en) * | 1981-07-03 | 1983-01-13 | Hitachi Ltd | Method and apparatus for correcting defect of photo-mask |
JPS6114640A (en) * | 1984-06-20 | 1986-01-22 | グールド・インコーポレイテツド | Method and apparatus for correcting defect of photo mask |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5117671A (en) * | 1974-08-05 | 1976-02-12 | Hitachi Ltd | Pataanno shuseihoho |
-
1975
- 1975-04-18 JP JP4631975A patent/JPS51122379A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5117671A (en) * | 1974-08-05 | 1976-02-12 | Hitachi Ltd | Pataanno shuseihoho |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57165832A (en) * | 1981-03-16 | 1982-10-13 | Monosoraa Inc | Thin film |
JPS586128A (en) * | 1981-07-03 | 1983-01-13 | Hitachi Ltd | Method and apparatus for correcting defect of photo-mask |
JPS6220539B2 (en) * | 1981-07-03 | 1987-05-07 | Hitachi Ltd | |
JPS6114640A (en) * | 1984-06-20 | 1986-01-22 | グールド・インコーポレイテツド | Method and apparatus for correcting defect of photo mask |
Also Published As
Publication number | Publication date |
---|---|
JPS5750048B2 (en) | 1982-10-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5225575A (en) | Inspection method of the state of object | |
JPS51122379A (en) | Treatment for defect of photo-mask | |
JPS51140870A (en) | An exhaust gas treatment process | |
JPS51151390A (en) | Process for preparing long chain alpha-oxycarboxylic acids | |
JPS5226309A (en) | Continuous annealing furnace | |
JPS51123811A (en) | Concentration and isolation of oryzanol | |
JPS5228055A (en) | Method and apparatus for drying wood | |
JPS5254095A (en) | Method of producing antibiotics sf-1771 | |
JPS51126322A (en) | Process for producing copper alloy without surface defect | |
JPS5211801A (en) | Tuner manufacturing method | |
JPS51115052A (en) | Contact oxidization type waste water treating method and apparatus | |
JPS5392750A (en) | 1,2,6-trimethyltricyclo(5,3,2,02,7)dodecane derivatives and process for their preparation | |
JPS5338266A (en) | Screening method of semiconductors and device for the same | |
JPS521957A (en) | Process and apparatus for treating sewage water | |
JPS51126779A (en) | Fine pattern processing method | |
JPS5216745A (en) | Defect repair apparatus of symmetrical body | |
JPS51119164A (en) | Method for removing fluorine ions present in water | |
JPS5220098A (en) | Automatic ticket examination method | |
JPS51148684A (en) | Process for removal of oxygen | |
JPS51126736A (en) | Defective information processing method and device therefore. | |
JPS5214274A (en) | Floor components fixing process | |
JPS5228506A (en) | Process for purifying oils and fats | |
JPS527499A (en) | Method of drying tobacco leaves and apparatus for the same | |
JPS527495A (en) | Instant preparation of malted rice | |
JPS5267445A (en) | Method and apparatus for setting rollers |