JPS51122379A - Treatment for defect of photo-mask - Google Patents

Treatment for defect of photo-mask

Info

Publication number
JPS51122379A
JPS51122379A JP4631975A JP4631975A JPS51122379A JP S51122379 A JPS51122379 A JP S51122379A JP 4631975 A JP4631975 A JP 4631975A JP 4631975 A JP4631975 A JP 4631975A JP S51122379 A JPS51122379 A JP S51122379A
Authority
JP
Japan
Prior art keywords
photo
mask
treatment
defect
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4631975A
Other languages
Japanese (ja)
Other versions
JPS5750048B2 (en
Inventor
Takenori Okubo
Kenichi Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4631975A priority Critical patent/JPS51122379A/en
Publication of JPS51122379A publication Critical patent/JPS51122379A/en
Publication of JPS5750048B2 publication Critical patent/JPS5750048B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: Treatment method for defective blank place in photo-mask pattern (especially pin-hole).
COPYRIGHT: (C)1976,JPO&Japio
JP4631975A 1975-04-18 1975-04-18 Treatment for defect of photo-mask Granted JPS51122379A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4631975A JPS51122379A (en) 1975-04-18 1975-04-18 Treatment for defect of photo-mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4631975A JPS51122379A (en) 1975-04-18 1975-04-18 Treatment for defect of photo-mask

Publications (2)

Publication Number Publication Date
JPS51122379A true JPS51122379A (en) 1976-10-26
JPS5750048B2 JPS5750048B2 (en) 1982-10-25

Family

ID=12743829

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4631975A Granted JPS51122379A (en) 1975-04-18 1975-04-18 Treatment for defect of photo-mask

Country Status (1)

Country Link
JP (1) JPS51122379A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57165832A (en) * 1981-03-16 1982-10-13 Monosoraa Inc Thin film
JPS586128A (en) * 1981-07-03 1983-01-13 Hitachi Ltd Method and apparatus for correcting defect of photo-mask
JPS6114640A (en) * 1984-06-20 1986-01-22 グールド・インコーポレイテツド Method and apparatus for correcting defect of photo mask

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5117671A (en) * 1974-08-05 1976-02-12 Hitachi Ltd Pataanno shuseihoho

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5117671A (en) * 1974-08-05 1976-02-12 Hitachi Ltd Pataanno shuseihoho

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57165832A (en) * 1981-03-16 1982-10-13 Monosoraa Inc Thin film
JPS586128A (en) * 1981-07-03 1983-01-13 Hitachi Ltd Method and apparatus for correcting defect of photo-mask
JPS6220539B2 (en) * 1981-07-03 1987-05-07 Hitachi Ltd
JPS6114640A (en) * 1984-06-20 1986-01-22 グールド・インコーポレイテツド Method and apparatus for correcting defect of photo mask

Also Published As

Publication number Publication date
JPS5750048B2 (en) 1982-10-25

Similar Documents

Publication Publication Date Title
JPS5225575A (en) Inspection method of the state of object
JPS51122379A (en) Treatment for defect of photo-mask
JPS51140870A (en) An exhaust gas treatment process
JPS51151390A (en) Process for preparing long chain alpha-oxycarboxylic acids
JPS5226309A (en) Continuous annealing furnace
JPS51123811A (en) Concentration and isolation of oryzanol
JPS5228055A (en) Method and apparatus for drying wood
JPS5254095A (en) Method of producing antibiotics sf-1771
JPS51126322A (en) Process for producing copper alloy without surface defect
JPS5211801A (en) Tuner manufacturing method
JPS51115052A (en) Contact oxidization type waste water treating method and apparatus
JPS5392750A (en) 1,2,6-trimethyltricyclo(5,3,2,02,7)dodecane derivatives and process for their preparation
JPS5338266A (en) Screening method of semiconductors and device for the same
JPS521957A (en) Process and apparatus for treating sewage water
JPS51126779A (en) Fine pattern processing method
JPS5216745A (en) Defect repair apparatus of symmetrical body
JPS51119164A (en) Method for removing fluorine ions present in water
JPS5220098A (en) Automatic ticket examination method
JPS51148684A (en) Process for removal of oxygen
JPS51126736A (en) Defective information processing method and device therefore.
JPS5214274A (en) Floor components fixing process
JPS5228506A (en) Process for purifying oils and fats
JPS527499A (en) Method of drying tobacco leaves and apparatus for the same
JPS527495A (en) Instant preparation of malted rice
JPS5267445A (en) Method and apparatus for setting rollers