JPS5117671A - Pataanno shuseihoho - Google Patents

Pataanno shuseihoho

Info

Publication number
JPS5117671A
JPS5117671A JP8904674A JP8904674A JPS5117671A JP S5117671 A JPS5117671 A JP S5117671A JP 8904674 A JP8904674 A JP 8904674A JP 8904674 A JP8904674 A JP 8904674A JP S5117671 A JPS5117671 A JP S5117671A
Authority
JP
Japan
Prior art keywords
shuseihoho
pataanno
pataanno shuseihoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8904674A
Other languages
Japanese (ja)
Inventor
Kazuo Koga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8904674A priority Critical patent/JPS5117671A/en
Publication of JPS5117671A publication Critical patent/JPS5117671A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP8904674A 1974-08-05 1974-08-05 Pataanno shuseihoho Pending JPS5117671A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8904674A JPS5117671A (en) 1974-08-05 1974-08-05 Pataanno shuseihoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8904674A JPS5117671A (en) 1974-08-05 1974-08-05 Pataanno shuseihoho

Publications (1)

Publication Number Publication Date
JPS5117671A true JPS5117671A (en) 1976-02-12

Family

ID=13959934

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8904674A Pending JPS5117671A (en) 1974-08-05 1974-08-05 Pataanno shuseihoho

Country Status (1)

Country Link
JP (1) JPS5117671A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51122379A (en) * 1975-04-18 1976-10-26 Fujitsu Ltd Treatment for defect of photo-mask
JPS57165832A (en) * 1981-03-16 1982-10-13 Monosoraa Inc Thin film
JPS57187193A (en) * 1981-05-12 1982-11-17 Mitsubishi Heavy Ind Ltd Welding combination method for double tube

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51122379A (en) * 1975-04-18 1976-10-26 Fujitsu Ltd Treatment for defect of photo-mask
JPS5750048B2 (en) * 1975-04-18 1982-10-25
JPS57165832A (en) * 1981-03-16 1982-10-13 Monosoraa Inc Thin film
JPS57187193A (en) * 1981-05-12 1982-11-17 Mitsubishi Heavy Ind Ltd Welding combination method for double tube

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