JPS51126760A - Dicing unit - Google Patents

Dicing unit

Info

Publication number
JPS51126760A
JPS51126760A JP5121875A JP5121875A JPS51126760A JP S51126760 A JPS51126760 A JP S51126760A JP 5121875 A JP5121875 A JP 5121875A JP 5121875 A JP5121875 A JP 5121875A JP S51126760 A JPS51126760 A JP S51126760A
Authority
JP
Japan
Prior art keywords
wheels
dicing unit
thusdicing
grooving
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5121875A
Other languages
Japanese (ja)
Inventor
Tatsuya Matsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP5121875A priority Critical patent/JPS51126760A/en
Publication of JPS51126760A publication Critical patent/JPS51126760A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To mount more than 2 wheels regularly on the same shaft and to turn the wheels at a high speed to scan along the scribe line of a wafer-shaped semi-conductor plate, grooving on many scribe lines with a single scanning and thusdicing with efficiency.
COPYRIGHT: (C)1976,JPO&Japio
JP5121875A 1975-04-25 1975-04-25 Dicing unit Pending JPS51126760A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5121875A JPS51126760A (en) 1975-04-25 1975-04-25 Dicing unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5121875A JPS51126760A (en) 1975-04-25 1975-04-25 Dicing unit

Publications (1)

Publication Number Publication Date
JPS51126760A true JPS51126760A (en) 1976-11-05

Family

ID=12880772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5121875A Pending JPS51126760A (en) 1975-04-25 1975-04-25 Dicing unit

Country Status (1)

Country Link
JP (1) JPS51126760A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55125636U (en) * 1979-02-28 1980-09-05
JPS5615057U (en) * 1979-07-13 1981-02-09
JPH02190310A (en) * 1989-01-19 1990-07-26 Disco Abrasive Syst Ltd Platelike object-cutting method and cutting blade
JP2016219764A (en) * 2015-05-22 2016-12-22 久元電子股▲ふん▼有限公司 Circle split method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55125636U (en) * 1979-02-28 1980-09-05
JPS5615057U (en) * 1979-07-13 1981-02-09
JPS6116102Y2 (en) * 1979-07-13 1986-05-19
JPH02190310A (en) * 1989-01-19 1990-07-26 Disco Abrasive Syst Ltd Platelike object-cutting method and cutting blade
JP2016219764A (en) * 2015-05-22 2016-12-22 久元電子股▲ふん▼有限公司 Circle split method

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