JPS51126760A - Dicing unit - Google Patents
Dicing unitInfo
- Publication number
- JPS51126760A JPS51126760A JP5121875A JP5121875A JPS51126760A JP S51126760 A JPS51126760 A JP S51126760A JP 5121875 A JP5121875 A JP 5121875A JP 5121875 A JP5121875 A JP 5121875A JP S51126760 A JPS51126760 A JP S51126760A
- Authority
- JP
- Japan
- Prior art keywords
- wheels
- dicing unit
- thusdicing
- grooving
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To mount more than 2 wheels regularly on the same shaft and to turn the wheels at a high speed to scan along the scribe line of a wafer-shaped semi-conductor plate, grooving on many scribe lines with a single scanning and thusdicing with efficiency.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5121875A JPS51126760A (en) | 1975-04-25 | 1975-04-25 | Dicing unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5121875A JPS51126760A (en) | 1975-04-25 | 1975-04-25 | Dicing unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51126760A true JPS51126760A (en) | 1976-11-05 |
Family
ID=12880772
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5121875A Pending JPS51126760A (en) | 1975-04-25 | 1975-04-25 | Dicing unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51126760A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55125636U (en) * | 1979-02-28 | 1980-09-05 | ||
JPS5615057U (en) * | 1979-07-13 | 1981-02-09 | ||
JPH02190310A (en) * | 1989-01-19 | 1990-07-26 | Disco Abrasive Syst Ltd | Platelike object-cutting method and cutting blade |
JP2016219764A (en) * | 2015-05-22 | 2016-12-22 | 久元電子股▲ふん▼有限公司 | Circle split method |
-
1975
- 1975-04-25 JP JP5121875A patent/JPS51126760A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55125636U (en) * | 1979-02-28 | 1980-09-05 | ||
JPS5615057U (en) * | 1979-07-13 | 1981-02-09 | ||
JPS6116102Y2 (en) * | 1979-07-13 | 1986-05-19 | ||
JPH02190310A (en) * | 1989-01-19 | 1990-07-26 | Disco Abrasive Syst Ltd | Platelike object-cutting method and cutting blade |
JP2016219764A (en) * | 2015-05-22 | 2016-12-22 | 久元電子股▲ふん▼有限公司 | Circle split method |
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