JPS5048512A - - Google Patents

Info

Publication number
JPS5048512A
JPS5048512A JP49034074A JP3407474A JPS5048512A JP S5048512 A JPS5048512 A JP S5048512A JP 49034074 A JP49034074 A JP 49034074A JP 3407474 A JP3407474 A JP 3407474A JP S5048512 A JPS5048512 A JP S5048512A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49034074A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5048512A publication Critical patent/JPS5048512A/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP49034074A 1973-03-30 1974-03-28 Pending JPS5048512A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7311549A FR2224009A5 (ja) 1973-03-30 1973-03-30

Publications (1)

Publication Number Publication Date
JPS5048512A true JPS5048512A (ja) 1975-04-30

Family

ID=9117156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49034074A Pending JPS5048512A (ja) 1973-03-30 1974-03-28

Country Status (9)

Country Link
US (1) US3947193A (ja)
JP (1) JPS5048512A (ja)
BE (1) BE812290A (ja)
CH (1) CH581268A5 (ja)
DE (1) DE2412624C2 (ja)
FR (1) FR2224009A5 (ja)
GB (1) GB1464901A (ja)
IT (1) IT1014559B (ja)
NL (1) NL7404350A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60116895A (ja) * 1983-11-30 1985-06-24 Hitachi Ltd 真空ポンプ
JPS6371492U (ja) * 1986-10-28 1988-05-13
JPH0227194A (ja) * 1988-07-15 1990-01-29 Daikin Ind Ltd 真空ポンプ
JPH0214496U (ja) * 1988-07-13 1990-01-30

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2507430C2 (de) * 1975-02-21 1985-04-04 Franz-Josef Dipl.-Phys. Dr. 5300 Bonn Schittko Molekularvakuumpumpe mit hohem Kompressionsverhältnis für leichte Moleküle
JPS5267810A (en) * 1975-12-03 1977-06-04 Aisin Seiki Co Ltd High vacuum pump
US4116592A (en) * 1976-08-20 1978-09-26 Viktor Yakovlevich Cherny Turbomolecular high-vacuum pulp
DE3317868A1 (de) * 1983-05-17 1984-11-22 Leybold-Heraeus GmbH, 5000 Köln Reibungspumpe
JPS6034594U (ja) * 1983-08-16 1985-03-09 セイコー精機株式会社 縦型タ−ボ分子ポンプ
NL8303927A (nl) * 1983-11-16 1985-06-17 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
DE3402549A1 (de) * 1984-01-26 1985-08-01 Leybold-Heraeus GmbH, 5000 Köln Molekularvakuumpumpe
JPS60139098U (ja) * 1984-02-24 1985-09-13 セイコ−精機株式会社 組合せ型軸流分子ポンプ
US4732529A (en) * 1984-02-29 1988-03-22 Shimadzu Corporation Turbomolecular pump
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
JPS6131695A (ja) * 1984-07-25 1986-02-14 Hitachi Ltd タ−ボ分子ポンプ
JPS6172896A (ja) * 1984-09-17 1986-04-14 Japan Atom Energy Res Inst 高速回転ポンプ
DE3627642C3 (de) * 1985-08-14 1996-03-21 Rikagaku Kenkyusho Vakuumpumpe mit Gewindekanal
DE3613344A1 (de) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck
JPS6341695A (ja) * 1986-08-07 1988-02-22 Seiko Seiki Co Ltd タ−ボ分子ポンプ
GB2232205B (en) * 1987-12-25 1991-11-13 Sholokhov Valery B Molecular vacuum pump
DE3891280T1 (de) * 1988-03-30 1990-04-05 Vladimir Pavlovic Sergeev Turbomolekular-vakuumpumpe
DE3919529C2 (de) * 1988-07-13 1994-09-29 Osaka Vacuum Ltd Vakuumpumpe
JP2928615B2 (ja) * 1990-09-28 1999-08-03 株式会社日立製作所 ターボ真空ポンプ
DE4129673A1 (de) * 1991-09-06 1993-03-11 Leybold Ag Reibungsvakuumpumpe
JPH05209589A (ja) * 1992-01-31 1993-08-20 Matsushita Electric Ind Co Ltd 流体回転装置
DE4216237A1 (de) * 1992-05-16 1993-11-18 Leybold Ag Gasreibungsvakuumpumpe
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
FR2736103B1 (fr) * 1995-06-30 1997-08-08 Cit Alcatel Pompe turbomoleculaire
DE19632874A1 (de) 1996-08-16 1998-02-19 Leybold Vakuum Gmbh Reibungsvakuumpumpe
JP3010529B1 (ja) * 1998-08-28 2000-02-21 セイコー精機株式会社 真空ポンプ、及び真空装置
DE19846188A1 (de) 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
DE19956015A1 (de) 1999-11-22 2001-05-23 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE10004271A1 (de) 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Reibungsvakuumpumpe
DE10353034A1 (de) * 2003-11-13 2005-06-09 Leybold Vakuum Gmbh Mehrstufige Reibungsvakuumpumpe
JP4920975B2 (ja) * 2006-01-18 2012-04-18 株式会社荏原製作所 ターボ型真空ポンプ
US7645116B2 (en) * 2005-04-28 2010-01-12 Ebara Corporation Turbo vacuum pump
US20070256934A1 (en) * 2006-05-08 2007-11-08 Perata Michael R Apparatus and Method for Coating Substrates With Approximate Process Isolation
GB2482861B (en) 2010-07-30 2014-12-17 Hivis Pumps As Pump/motor assembly
US20130093285A1 (en) * 2011-10-14 2013-04-18 Hamilton Sundstrand Corporation Stator core retention cylinder for electric machinery
GB2585936A (en) 2019-07-25 2021-01-27 Edwards Ltd Drag pump
CN112360770A (zh) * 2020-11-09 2021-02-12 上海裕达实业有限公司 手推式智能分子泵机组
EP4194700A1 (de) * 2023-04-18 2023-06-14 Pfeiffer Vacuum Technology AG Vakuumpumpe mit einer holweck-pumpstufe mit veränderlicher holweck-geometrie

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL48217C (ja) *
US1906715A (en) * 1930-12-04 1933-05-02 Edward R Penick Bearing
CH222288A (de) * 1942-11-24 1942-07-15 Bbc Brown Boveri & Cie Molekularpumpe.
US2479724A (en) * 1946-07-01 1949-08-23 Frank P Bucklein Pump
US2730297A (en) * 1950-04-12 1956-01-10 Hartford Nat Bank & Trust Co High-vacuum molecular pump
FR81075E (fr) * 1962-01-23 1963-07-26 Snecma Pompe à vide turbomoléculaire perfectionnée
US3404867A (en) * 1967-04-03 1968-10-08 Power Brake Equipment Company Turbine wheel
FR2086525A5 (ja) * 1970-04-01 1971-12-31 Commissariat Energie Atomique
BE790969A (fr) * 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60116895A (ja) * 1983-11-30 1985-06-24 Hitachi Ltd 真空ポンプ
JPH0477160B2 (ja) * 1983-11-30 1992-12-07 Hitachi Ltd
JPS6371492U (ja) * 1986-10-28 1988-05-13
JPH0214496U (ja) * 1988-07-13 1990-01-30
JPH0227194A (ja) * 1988-07-15 1990-01-29 Daikin Ind Ltd 真空ポンプ

Also Published As

Publication number Publication date
IT1014559B (it) 1977-04-30
BE812290A (fr) 1974-09-16
CH581268A5 (ja) 1976-10-29
GB1464901A (en) 1977-02-16
DE2412624A1 (de) 1974-10-17
US3947193A (en) 1976-03-30
FR2224009A5 (ja) 1974-10-25
NL7404350A (ja) 1974-10-02
DE2412624C2 (de) 1984-07-05

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