JPS5048512A - - Google Patents
Info
- Publication number
- JPS5048512A JPS5048512A JP49034074A JP3407474A JPS5048512A JP S5048512 A JPS5048512 A JP S5048512A JP 49034074 A JP49034074 A JP 49034074A JP 3407474 A JP3407474 A JP 3407474A JP S5048512 A JPS5048512 A JP S5048512A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7311549A FR2224009A5 (US07696358-20100413-C00002.png) | 1973-03-30 | 1973-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5048512A true JPS5048512A (US07696358-20100413-C00002.png) | 1975-04-30 |
Family
ID=9117156
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49034074A Pending JPS5048512A (US07696358-20100413-C00002.png) | 1973-03-30 | 1974-03-28 |
Country Status (9)
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60116895A (ja) * | 1983-11-30 | 1985-06-24 | Hitachi Ltd | 真空ポンプ |
| JPS6371492U (US07696358-20100413-C00002.png) * | 1986-10-28 | 1988-05-13 | ||
| JPH0227194A (ja) * | 1988-07-15 | 1990-01-29 | Daikin Ind Ltd | 真空ポンプ |
| JPH0214496U (US07696358-20100413-C00002.png) * | 1988-07-13 | 1990-01-30 |
Families Citing this family (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2507430C2 (de) * | 1975-02-21 | 1985-04-04 | Franz-Josef Dipl.-Phys. Dr. 5300 Bonn Schittko | Molekularvakuumpumpe mit hohem Kompressionsverhältnis für leichte Moleküle |
| JPS5267810A (en) * | 1975-12-03 | 1977-06-04 | Aisin Seiki Co Ltd | High vacuum pump |
| US4116592A (en) * | 1976-08-20 | 1978-09-26 | Viktor Yakovlevich Cherny | Turbomolecular high-vacuum pulp |
| DE3317868A1 (de) * | 1983-05-17 | 1984-11-22 | Leybold-Heraeus GmbH, 5000 Köln | Reibungspumpe |
| JPS6034594U (ja) * | 1983-08-16 | 1985-03-09 | セイコー精機株式会社 | 縦型タ−ボ分子ポンプ |
| NL8303927A (nl) * | 1983-11-16 | 1985-06-17 | Ultra Centrifuge Nederland Nv | Hoog-vacuum moleculair pomp. |
| DE3402549A1 (de) * | 1984-01-26 | 1985-08-01 | Leybold-Heraeus GmbH, 5000 Köln | Molekularvakuumpumpe |
| JPS60139098U (ja) * | 1984-02-24 | 1985-09-13 | セイコ−精機株式会社 | 組合せ型軸流分子ポンプ |
| US4732529A (en) * | 1984-02-29 | 1988-03-22 | Shimadzu Corporation | Turbomolecular pump |
| DE3410905A1 (de) * | 1984-03-24 | 1985-10-03 | Leybold-Heraeus GmbH, 5000 Köln | Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken |
| JPS6131695A (ja) * | 1984-07-25 | 1986-02-14 | Hitachi Ltd | タ−ボ分子ポンプ |
| JPS6172896A (ja) * | 1984-09-17 | 1986-04-14 | Japan Atom Energy Res Inst | 高速回転ポンプ |
| DE3627642C3 (de) * | 1985-08-14 | 1996-03-21 | Rikagaku Kenkyusho | Vakuumpumpe mit Gewindekanal |
| DE3613344A1 (de) * | 1986-04-19 | 1987-10-22 | Pfeiffer Vakuumtechnik | Turbomolekular-vakuumpumpe fuer hoeheren druck |
| JPS6341695A (ja) * | 1986-08-07 | 1988-02-22 | Seiko Seiki Co Ltd | タ−ボ分子ポンプ |
| GB2232205B (en) * | 1987-12-25 | 1991-11-13 | Sholokhov Valery B | Molecular vacuum pump |
| DE3891280T1 (de) * | 1988-03-30 | 1990-04-05 | Vladimir Pavlovic Sergeev | Turbomolekular-vakuumpumpe |
| DE3919529C2 (de) * | 1988-07-13 | 1994-09-29 | Osaka Vacuum Ltd | Vakuumpumpe |
| JP2928615B2 (ja) * | 1990-09-28 | 1999-08-03 | 株式会社日立製作所 | ターボ真空ポンプ |
| DE4129673A1 (de) * | 1991-09-06 | 1993-03-11 | Leybold Ag | Reibungsvakuumpumpe |
| JPH05209589A (ja) * | 1992-01-31 | 1993-08-20 | Matsushita Electric Ind Co Ltd | 流体回転装置 |
| DE4216237A1 (de) * | 1992-05-16 | 1993-11-18 | Leybold Ag | Gasreibungsvakuumpumpe |
| US5733104A (en) * | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
| FR2736103B1 (fr) * | 1995-06-30 | 1997-08-08 | Cit Alcatel | Pompe turbomoleculaire |
| DE19632874A1 (de) | 1996-08-16 | 1998-02-19 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe |
| JP3010529B1 (ja) * | 1998-08-28 | 2000-02-21 | セイコー精機株式会社 | 真空ポンプ、及び真空装置 |
| DE19846188A1 (de) * | 1998-10-07 | 2000-04-13 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit Stator und Rotor |
| DE19956015A1 (de) * | 1999-11-22 | 2001-05-23 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpe |
| DE10004271A1 (de) | 2000-02-01 | 2001-08-02 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe |
| DE10353034A1 (de) * | 2003-11-13 | 2005-06-09 | Leybold Vakuum Gmbh | Mehrstufige Reibungsvakuumpumpe |
| JP4920975B2 (ja) * | 2006-01-18 | 2012-04-18 | 株式会社荏原製作所 | ターボ型真空ポンプ |
| US7645116B2 (en) * | 2005-04-28 | 2010-01-12 | Ebara Corporation | Turbo vacuum pump |
| US20070256934A1 (en) * | 2006-05-08 | 2007-11-08 | Perata Michael R | Apparatus and Method for Coating Substrates With Approximate Process Isolation |
| GB2482861B (en) | 2010-07-30 | 2014-12-17 | Hivis Pumps As | Pump/motor assembly |
| US20130093285A1 (en) * | 2011-10-14 | 2013-04-18 | Hamilton Sundstrand Corporation | Stator core retention cylinder for electric machinery |
| GB2585936A (en) * | 2019-07-25 | 2021-01-27 | Edwards Ltd | Drag pump |
| CN112360770A (zh) * | 2020-11-09 | 2021-02-12 | 上海裕达实业有限公司 | 手推式智能分子泵机组 |
| EP4194700A1 (de) * | 2023-04-18 | 2023-06-14 | Pfeiffer Vacuum Technology AG | Vakuumpumpe mit einer holweck-pumpstufe mit veränderlicher holweck-geometrie |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL48217C (US07696358-20100413-C00002.png) * | ||||
| US1906715A (en) * | 1930-12-04 | 1933-05-02 | Edward R Penick | Bearing |
| CH222288A (de) * | 1942-11-24 | 1942-07-15 | Bbc Brown Boveri & Cie | Molekularpumpe. |
| US2479724A (en) * | 1946-07-01 | 1949-08-23 | Frank P Bucklein | Pump |
| US2730297A (en) * | 1950-04-12 | 1956-01-10 | Hartford Nat Bank & Trust Co | High-vacuum molecular pump |
| FR81075E (fr) * | 1962-01-23 | 1963-07-26 | Snecma | Pompe à vide turbomoléculaire perfectionnée |
| US3404867A (en) * | 1967-04-03 | 1968-10-08 | Power Brake Equipment Company | Turbine wheel |
| FR2086525A5 (US07696358-20100413-C00002.png) * | 1970-04-01 | 1971-12-31 | Commissariat Energie Atomique | |
| BE790969A (fr) * | 1971-11-16 | 1973-05-07 | Cit Alcatel | Pivot pour pompes moleculaires rotatives |
-
1973
- 1973-03-30 FR FR7311549A patent/FR2224009A5/fr not_active Expired
-
1974
- 1974-03-12 CH CH347074A patent/CH581268A5/xx not_active IP Right Cessation
- 1974-03-14 BE BE141992A patent/BE812290A/xx unknown
- 1974-03-15 DE DE2412624A patent/DE2412624C2/de not_active Expired
- 1974-03-25 GB GB1316574A patent/GB1464901A/en not_active Expired
- 1974-03-28 JP JP49034074A patent/JPS5048512A/ja active Pending
- 1974-03-28 US US05/455,657 patent/US3947193A/en not_active Expired - Lifetime
- 1974-03-29 NL NL7404350A patent/NL7404350A/xx unknown
- 1974-04-08 IT IT20951/74A patent/IT1014559B/it active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60116895A (ja) * | 1983-11-30 | 1985-06-24 | Hitachi Ltd | 真空ポンプ |
| JPH0477160B2 (US07696358-20100413-C00002.png) * | 1983-11-30 | 1992-12-07 | Hitachi Ltd | |
| JPS6371492U (US07696358-20100413-C00002.png) * | 1986-10-28 | 1988-05-13 | ||
| JPH0214496U (US07696358-20100413-C00002.png) * | 1988-07-13 | 1990-01-30 | ||
| JPH0227194A (ja) * | 1988-07-15 | 1990-01-29 | Daikin Ind Ltd | 真空ポンプ |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2224009A5 (US07696358-20100413-C00002.png) | 1974-10-25 |
| IT1014559B (it) | 1977-04-30 |
| NL7404350A (US07696358-20100413-C00002.png) | 1974-10-02 |
| CH581268A5 (US07696358-20100413-C00002.png) | 1976-10-29 |
| BE812290A (fr) | 1974-09-16 |
| DE2412624A1 (de) | 1974-10-17 |
| US3947193A (en) | 1976-03-30 |
| DE2412624C2 (de) | 1984-07-05 |
| GB1464901A (en) | 1977-02-16 |
