JPS5046074A - - Google Patents

Info

Publication number
JPS5046074A
JPS5046074A JP9630373A JP9630373A JPS5046074A JP S5046074 A JPS5046074 A JP S5046074A JP 9630373 A JP9630373 A JP 9630373A JP 9630373 A JP9630373 A JP 9630373A JP S5046074 A JPS5046074 A JP S5046074A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9630373A
Other languages
Japanese (ja)
Other versions
JPS5329476B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9630373A priority Critical patent/JPS5329476B2/ja
Publication of JPS5046074A publication Critical patent/JPS5046074A/ja
Publication of JPS5329476B2 publication Critical patent/JPS5329476B2/ja
Expired legal-status Critical Current

Links

JP9630373A 1973-08-28 1973-08-28 Expired JPS5329476B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9630373A JPS5329476B2 (en) 1973-08-28 1973-08-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9630373A JPS5329476B2 (en) 1973-08-28 1973-08-28

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP5390479A Division JPS553378A (en) 1979-04-27 1979-04-27 Production of silicon film
JP5390379A Division JPS5523085A (en) 1979-04-27 1979-04-27 Production of silicon film

Publications (2)

Publication Number Publication Date
JPS5046074A true JPS5046074A (en) 1975-04-24
JPS5329476B2 JPS5329476B2 (en) 1978-08-21

Family

ID=14161250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9630373A Expired JPS5329476B2 (en) 1973-08-28 1973-08-28

Country Status (1)

Country Link
JP (1) JPS5329476B2 (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51131428A (en) * 1975-05-12 1976-11-15 Fujitsu Ltd Method of growing aluminum in gassphase
JPS5673428A (en) * 1979-11-21 1981-06-18 Canon Inc Method of forming film
JPS5683033A (en) * 1980-04-18 1981-07-07 Matsushita Electronics Corp Manufacture of semiconductor device
JPS5742118A (en) * 1980-08-27 1982-03-09 Mitsubishi Electric Corp Plasma cvd device
JPS5745224A (en) * 1980-08-29 1982-03-15 Canon Inc Manufacture of deposited film
JPS5748226A (en) * 1980-09-05 1982-03-19 Matsushita Electronics Corp Plasma processing method and device for the same
JPS5780715A (en) * 1980-11-07 1982-05-20 Matsushita Electric Ind Co Ltd Dc glow discharge device
JPS57123969A (en) * 1981-01-26 1982-08-02 Semiconductor Energy Lab Co Ltd Formation of zinc oxide film by vapor phase method using plasma
JPS57184213A (en) * 1981-05-08 1982-11-12 Kokusai Electric Co Ltd Vapor growth device for semiconductor
JPS5821323A (en) * 1981-07-28 1983-02-08 Toshiba Corp Vapor phase growing unit under vacuum
JPS58206119A (en) * 1982-05-27 1983-12-01 Agency Of Ind Science & Technol Thin-film producing apparatus

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5847464B2 (en) * 1975-05-12 1983-10-22 富士通株式会社 Aluminum tree
JPS51131428A (en) * 1975-05-12 1976-11-15 Fujitsu Ltd Method of growing aluminum in gassphase
JPS5673428A (en) * 1979-11-21 1981-06-18 Canon Inc Method of forming film
JPH0127569B2 (en) * 1979-11-21 1989-05-30 Canon Kk
JPS5683033A (en) * 1980-04-18 1981-07-07 Matsushita Electronics Corp Manufacture of semiconductor device
JPS5742118A (en) * 1980-08-27 1982-03-09 Mitsubishi Electric Corp Plasma cvd device
JPS5745224A (en) * 1980-08-29 1982-03-15 Canon Inc Manufacture of deposited film
JPS5748226A (en) * 1980-09-05 1982-03-19 Matsushita Electronics Corp Plasma processing method and device for the same
JPS5780715A (en) * 1980-11-07 1982-05-20 Matsushita Electric Ind Co Ltd Dc glow discharge device
JPS57123969A (en) * 1981-01-26 1982-08-02 Semiconductor Energy Lab Co Ltd Formation of zinc oxide film by vapor phase method using plasma
JPS57184213A (en) * 1981-05-08 1982-11-12 Kokusai Electric Co Ltd Vapor growth device for semiconductor
JPS5821323A (en) * 1981-07-28 1983-02-08 Toshiba Corp Vapor phase growing unit under vacuum
JPS58206119A (en) * 1982-05-27 1983-12-01 Agency Of Ind Science & Technol Thin-film producing apparatus

Also Published As

Publication number Publication date
JPS5329476B2 (en) 1978-08-21

Similar Documents

Publication Publication Date Title
AR201758A1 (en)
AU476761B2 (en)
AU465372B2 (en)
AR201235Q (en)
AR201231Q (en)
AU474593B2 (en)
AU474511B2 (en)
AU474838B2 (en)
AU465453B2 (en)
AU465434B2 (en)
AU471343B2 (en)
AU476714B2 (en)
JPS5046074A (en)
AR201229Q (en)
AU476696B2 (en)
AU472848B2 (en)
AU466283B2 (en)
AR199451A1 (en)
AU477823B2 (en)
AU476873B1 (en)
AR195311A1 (en)
AR200885A1 (en)
AR200256A1 (en)
AR210729A1 (en)
AR195948A1 (en)