JPS5021503B2 - - Google Patents
Info
- Publication number
- JPS5021503B2 JPS5021503B2 JP47037988A JP3798872A JPS5021503B2 JP S5021503 B2 JPS5021503 B2 JP S5021503B2 JP 47037988 A JP47037988 A JP 47037988A JP 3798872 A JP3798872 A JP 3798872A JP S5021503 B2 JPS5021503 B2 JP S5021503B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Laminated Bodies (AREA)
- Lining Or Joining Of Plastics Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47037988A JPS5021503B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-04-15 | 1972-04-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47037988A JPS5021503B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-04-15 | 1972-04-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS49390A JPS49390A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-01-05 |
| JPS5021503B2 true JPS5021503B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1975-07-23 |
Family
ID=12512934
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47037988A Expired JPS5021503B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-04-15 | 1972-04-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5021503B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE426369B (sv) * | 1978-07-28 | 1983-01-17 | Herbert Vollmar Jonasson | Forfarande och anordning for framstellning av ett armerat ror av herdplast |
| JPS5643719A (en) * | 1979-09-18 | 1981-04-22 | Fujitsu Ltd | Vapor-phase epitaxial growth |
| JPS5898929A (ja) * | 1981-12-09 | 1983-06-13 | Seiko Epson Corp | 原子層エツチング法 |
| JPS6066823A (ja) * | 1983-09-22 | 1985-04-17 | Semiconductor Energy Lab Co Ltd | 半導体エッチング方法 |
| JPH0821560B2 (ja) * | 1985-08-20 | 1996-03-04 | 富士通株式会社 | 半導体装置の製造方法 |
| ATE113757T1 (de) * | 1985-08-28 | 1994-11-15 | Fsi Int Inc | Verfahren und vorrichtung zum entfernen von schichten von substraten. |
| JPS6479388A (en) * | 1987-09-18 | 1989-03-24 | Tanaka Precious Metal Ind | Method for removing coating metal from metal oxide base material |
| JP2673380B2 (ja) * | 1990-02-20 | 1997-11-05 | 三菱電機株式会社 | プラズマエッチングの方法 |
-
1972
- 1972-04-15 JP JP47037988A patent/JPS5021503B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS49390A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-01-05 |