JPS49390A - - Google Patents

Info

Publication number
JPS49390A
JPS49390A JP47037988A JP3798872A JPS49390A JP S49390 A JPS49390 A JP S49390A JP 47037988 A JP47037988 A JP 47037988A JP 3798872 A JP3798872 A JP 3798872A JP S49390 A JPS49390 A JP S49390A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47037988A
Other languages
Japanese (ja)
Other versions
JPS5021503B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47037988A priority Critical patent/JPS5021503B2/ja
Publication of JPS49390A publication Critical patent/JPS49390A/ja
Publication of JPS5021503B2 publication Critical patent/JPS5021503B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)
JP47037988A 1972-04-15 1972-04-15 Expired JPS5021503B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47037988A JPS5021503B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-04-15 1972-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47037988A JPS5021503B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-04-15 1972-04-15

Publications (2)

Publication Number Publication Date
JPS49390A true JPS49390A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-01-05
JPS5021503B2 JPS5021503B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-07-23

Family

ID=12512934

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47037988A Expired JPS5021503B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-04-15 1972-04-15

Country Status (1)

Country Link
JP (1) JPS5021503B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5521292A (en) * 1978-07-28 1980-02-15 Jonasson Vollmar Thermal hardening resin pipe
JPS5643719A (en) * 1979-09-18 1981-04-22 Fujitsu Ltd Vapor-phase epitaxial growth
JPS5898929A (ja) * 1981-12-09 1983-06-13 Seiko Epson Corp 原子層エツチング法
JPS6066823A (ja) * 1983-09-22 1985-04-17 Semiconductor Energy Lab Co Ltd 半導体エッチング方法
JPS6242530A (ja) * 1985-08-20 1987-02-24 Fujitsu Ltd 半導体装置の製造方法
JPS6479388A (en) * 1987-09-18 1989-03-24 Tanaka Precious Metal Ind Method for removing coating metal from metal oxide base material
JPH03241830A (ja) * 1990-02-20 1991-10-29 Mitsubishi Electric Corp プラズマエッチングの方法
JPH0626206B2 (ja) * 1985-08-28 1994-04-06 エフエスアイ コ−ポレイシヨン 基板より気相法で膜除去する方法及び装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5521292A (en) * 1978-07-28 1980-02-15 Jonasson Vollmar Thermal hardening resin pipe
JPS5643719A (en) * 1979-09-18 1981-04-22 Fujitsu Ltd Vapor-phase epitaxial growth
JPS5898929A (ja) * 1981-12-09 1983-06-13 Seiko Epson Corp 原子層エツチング法
JPS6066823A (ja) * 1983-09-22 1985-04-17 Semiconductor Energy Lab Co Ltd 半導体エッチング方法
JPS6242530A (ja) * 1985-08-20 1987-02-24 Fujitsu Ltd 半導体装置の製造方法
JPH0626206B2 (ja) * 1985-08-28 1994-04-06 エフエスアイ コ−ポレイシヨン 基板より気相法で膜除去する方法及び装置
JPS6479388A (en) * 1987-09-18 1989-03-24 Tanaka Precious Metal Ind Method for removing coating metal from metal oxide base material
JPH03241830A (ja) * 1990-02-20 1991-10-29 Mitsubishi Electric Corp プラズマエッチングの方法

Also Published As

Publication number Publication date
JPS5021503B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-07-23

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