JPS50126175A - - Google Patents
Info
- Publication number
- JPS50126175A JPS50126175A JP3239574A JP3239574A JPS50126175A JP S50126175 A JPS50126175 A JP S50126175A JP 3239574 A JP3239574 A JP 3239574A JP 3239574 A JP3239574 A JP 3239574A JP S50126175 A JPS50126175 A JP S50126175A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
- Attitude Control For Articles On Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3239574A JPS50126175A (ja) | 1974-03-22 | 1974-03-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3239574A JPS50126175A (ja) | 1974-03-22 | 1974-03-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS50126175A true JPS50126175A (ja) | 1975-10-03 |
Family
ID=12357753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3239574A Pending JPS50126175A (ja) | 1974-03-22 | 1974-03-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS50126175A (ja) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5464479A (en) * | 1977-10-31 | 1979-05-24 | Tokyo Seimitsu Co Ltd | Device for inspecting wafer |
| JPS5539021A (en) * | 1978-09-14 | 1980-03-18 | Hitachi Electronics Eng Co Ltd | Automatic plate tester |
| JPS5662329A (en) * | 1979-10-26 | 1981-05-28 | Toshiba Corp | Conveying direction turning device for semiconductor wafer |
| JPS5860552A (ja) * | 1981-10-05 | 1983-04-11 | Tokyo Denshi Kagaku Kabushiki | 縦型自動プラズマ処理装置 |
| JPS6097621A (ja) * | 1983-11-02 | 1985-05-31 | Hitachi Ltd | 分子線エピタキシ装置における基板搬送装置 |
| JP2008260607A (ja) * | 2007-04-11 | 2008-10-30 | Takachiho Takeda | センタリングユニット |
| WO2009119323A1 (ja) * | 2008-03-25 | 2009-10-01 | 株式会社トクヤマ | 円形部材の心出し装置及びこれを備えたコーティング装置 |
-
1974
- 1974-03-22 JP JP3239574A patent/JPS50126175A/ja active Pending
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5464479A (en) * | 1977-10-31 | 1979-05-24 | Tokyo Seimitsu Co Ltd | Device for inspecting wafer |
| JPS5824946B2 (ja) * | 1977-10-31 | 1983-05-24 | 株式会社東京精密 | ウエハ−検査装置 |
| JPS6146971B2 (ja) * | 1978-09-14 | 1986-10-16 | Hitachi Electr Eng | |
| JPS5539021A (en) * | 1978-09-14 | 1980-03-18 | Hitachi Electronics Eng Co Ltd | Automatic plate tester |
| JPS5662329A (en) * | 1979-10-26 | 1981-05-28 | Toshiba Corp | Conveying direction turning device for semiconductor wafer |
| JPS6318325B2 (ja) * | 1979-10-26 | 1988-04-18 | Tokyo Shibaura Electric Co | |
| JPS5860552A (ja) * | 1981-10-05 | 1983-04-11 | Tokyo Denshi Kagaku Kabushiki | 縦型自動プラズマ処理装置 |
| JPS6325500B2 (ja) * | 1981-10-05 | 1988-05-25 | Tokyo Ohka Kogyo Co Ltd | |
| JPS6097621A (ja) * | 1983-11-02 | 1985-05-31 | Hitachi Ltd | 分子線エピタキシ装置における基板搬送装置 |
| JPH0469413B2 (ja) * | 1983-11-02 | 1992-11-06 | Hitachi Ltd | |
| JP2008260607A (ja) * | 2007-04-11 | 2008-10-30 | Takachiho Takeda | センタリングユニット |
| WO2009119323A1 (ja) * | 2008-03-25 | 2009-10-01 | 株式会社トクヤマ | 円形部材の心出し装置及びこれを備えたコーティング装置 |
| JP5279819B2 (ja) * | 2008-03-25 | 2013-09-04 | 株式会社トクヤマ | レンズの心出し装置を備えたコーティング装置及びコーティング方法 |