JPS50107877A - - Google Patents
Info
- Publication number
- JPS50107877A JPS50107877A JP1244474A JP1244474A JPS50107877A JP S50107877 A JPS50107877 A JP S50107877A JP 1244474 A JP1244474 A JP 1244474A JP 1244474 A JP1244474 A JP 1244474A JP S50107877 A JPS50107877 A JP S50107877A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Local Oxidation Of Silicon (AREA)
- Drying Of Semiconductors (AREA)
- Element Separation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1244474A JPS50107877A (enrdf_load_stackoverflow) | 1974-01-30 | 1974-01-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1244474A JPS50107877A (enrdf_load_stackoverflow) | 1974-01-30 | 1974-01-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS50107877A true JPS50107877A (enrdf_load_stackoverflow) | 1975-08-25 |
Family
ID=11805473
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1244474A Pending JPS50107877A (enrdf_load_stackoverflow) | 1974-01-30 | 1974-01-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS50107877A (enrdf_load_stackoverflow) |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5373971A (en) * | 1976-12-14 | 1978-06-30 | Matsushita Electric Ind Co Ltd | Manufacture for semiconductor device |
JPS53148988A (en) * | 1977-05-31 | 1978-12-26 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor substrate |
JPS5541715A (en) * | 1978-09-19 | 1980-03-24 | Oki Electric Ind Co Ltd | Production of semiconductor device |
JPS5562773A (en) * | 1978-11-06 | 1980-05-12 | Seiko Epson Corp | Preparation of semiconductor device |
JPS5595341A (en) * | 1979-01-11 | 1980-07-19 | Sony Corp | Preparation of semiconductor device |
JPS5618426A (en) * | 1979-07-24 | 1981-02-21 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5750436A (en) * | 1980-09-12 | 1982-03-24 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS57180123A (en) * | 1981-04-29 | 1982-11-06 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS57204150A (en) * | 1981-06-10 | 1982-12-14 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5958837A (ja) * | 1982-09-29 | 1984-04-04 | Fujitsu Ltd | 半導体装置の製造方法 |
JPS59124723A (ja) * | 1982-12-29 | 1984-07-18 | Fujitsu Ltd | 半導体装置の製造方法 |
JPS60242623A (ja) * | 1984-05-16 | 1985-12-02 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
JPH0653189A (ja) * | 1992-07-31 | 1994-02-25 | Oki Electric Ind Co Ltd | 成膜層の平坦化方法 |
-
1974
- 1974-01-30 JP JP1244474A patent/JPS50107877A/ja active Pending
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5373971A (en) * | 1976-12-14 | 1978-06-30 | Matsushita Electric Ind Co Ltd | Manufacture for semiconductor device |
JPS53148988A (en) * | 1977-05-31 | 1978-12-26 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor substrate |
JPS5541715A (en) * | 1978-09-19 | 1980-03-24 | Oki Electric Ind Co Ltd | Production of semiconductor device |
JPS5562773A (en) * | 1978-11-06 | 1980-05-12 | Seiko Epson Corp | Preparation of semiconductor device |
JPS5595341A (en) * | 1979-01-11 | 1980-07-19 | Sony Corp | Preparation of semiconductor device |
JPS5618426A (en) * | 1979-07-24 | 1981-02-21 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5750436A (en) * | 1980-09-12 | 1982-03-24 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS57180123A (en) * | 1981-04-29 | 1982-11-06 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS57204150A (en) * | 1981-06-10 | 1982-12-14 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5958837A (ja) * | 1982-09-29 | 1984-04-04 | Fujitsu Ltd | 半導体装置の製造方法 |
JPS59124723A (ja) * | 1982-12-29 | 1984-07-18 | Fujitsu Ltd | 半導体装置の製造方法 |
JPS60242623A (ja) * | 1984-05-16 | 1985-12-02 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
JPH0653189A (ja) * | 1992-07-31 | 1994-02-25 | Oki Electric Ind Co Ltd | 成膜層の平坦化方法 |