Classifications

• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P32/00—Diffusion of dopants within, into or out of wafers, substrates or parts of devices
  • H10P32/10—Diffusion of dopants within, into or out of semiconductor bodies or layers
  • H10P32/14—Diffusion of dopants within, into or out of semiconductor bodies or layers within a single semiconductor body or layer in a solid phase; between different semiconductor bodies or layers, both in a solid phase
  • H10P32/1408—Diffusion of dopants within, into or out of semiconductor bodies or layers within a single semiconductor body or layer in a solid phase; between different semiconductor bodies or layers, both in a solid phase from or through or into an external applied layer, e.g. photoresist or nitride layers
  • H10P32/141—Diffusion of dopants within, into or out of semiconductor bodies or layers within a single semiconductor body or layer in a solid phase; between different semiconductor bodies or layers, both in a solid phase from or through or into an external applied layer, e.g. photoresist or nitride layers the applied layer comprising oxides only
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
  • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
  • H10D84/80—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
  • H10D84/82—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components
  • H10D84/83—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components of only insulated-gate FETs [IGFET]
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P32/00—Diffusion of dopants within, into or out of wafers, substrates or parts of devices
  • H10P32/10—Diffusion of dopants within, into or out of semiconductor bodies or layers
  • H10P32/17—Diffusion of dopants within, into or out of semiconductor bodies or layers characterised by the semiconductor material
  • H10P32/171—Diffusion of dopants within, into or out of semiconductor bodies or layers characterised by the semiconductor material being group IV material

Landscapes

• Thin Film Transistor (AREA)
• Insulated Gate Type Field-Effect Transistor (AREA)
• Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
• Local Oxidation Of Silicon (AREA)

Applications Claiming Priority (1)

Publications (1)

Family

ID=5876572

Family Applications (1)

Country Status (13)

Cited By (2)

Families Citing this family (1)

Citations (1)

Family Cites Families (2)

• 1973
  • 1973-03-30 DE DE2316096A patent/DE2316096B2/de not_active Ceased
• 1974
  • 1974-03-14 AT AT213774A patent/AT339376B/de active
  • 1974-03-21 FR FR7409675A patent/FR2223837B1/fr not_active Expired
  • 1974-03-22 CH CH402774A patent/CH570043A5/xx not_active IP Right Cessation
  • 1974-03-25 GB GB1307174A patent/GB1443479A/en not_active Expired
  • 1974-03-26 NL NL7404085A patent/NL7404085A/xx unknown
  • 1974-03-26 IT IT49645/74A patent/IT1011153B/it active
  • 1974-03-28 US US455591A patent/US3919766A/en not_active Expired - Lifetime
  • 1974-03-28 SE SE7404193A patent/SE386543B/xx unknown
  • 1974-03-28 LU LU69730A patent/LU69730A1/xx unknown
  • 1974-03-29 BE BE142637A patent/BE813050A/xx unknown
  • 1974-03-29 JP JP49035476A patent/JPS49131084A/ja active Pending
  • 1974-03-29 CA CA196,350A patent/CA1011004A/en not_active Expired

Patent Citations (1)

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