JPS49107678A - - Google Patents
Info
- Publication number
- JPS49107678A JPS49107678A JP49009041A JP904174A JPS49107678A JP S49107678 A JPS49107678 A JP S49107678A JP 49009041 A JP49009041 A JP 49009041A JP 904174 A JP904174 A JP 904174A JP S49107678 A JPS49107678 A JP S49107678A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q41/00—Combinations or associations of metal-working machines not directed to a particular result according to classes B21, B23, or B24
- B23Q41/06—Features relating to organisation of working of machines
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/51—Plural diverse manufacturing apparatus including means for metal shaping or assembling
- Y10T29/5124—Plural diverse manufacturing apparatus including means for metal shaping or assembling with means to feed work intermittently from one tool station to another
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US329920A US3889355A (en) | 1973-02-05 | 1973-02-05 | Continuous processing system |
US329920 | 1981-12-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS49107678A true JPS49107678A (US20110009641A1-20110113-C00116.png) | 1974-10-12 |
JPS5931211B2 JPS5931211B2 (ja) | 1984-07-31 |
Family
ID=23287583
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP49009041A Expired JPS5931211B2 (ja) | 1973-02-05 | 1974-01-22 | 製造装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US3889355A (US20110009641A1-20110113-C00116.png) |
JP (1) | JPS5931211B2 (US20110009641A1-20110113-C00116.png) |
CA (1) | CA1006626A (US20110009641A1-20110113-C00116.png) |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5619635A (en) * | 1979-07-27 | 1981-02-24 | Hitachi Ltd | Manufacturing apparatus |
JPS5828849A (ja) * | 1981-08-13 | 1983-02-19 | Nec Corp | 半導体製造装置 |
JPS5860552A (ja) * | 1981-10-05 | 1983-04-11 | Tokyo Denshi Kagaku Kabushiki | 縦型自動プラズマ処理装置 |
JPS5918651A (ja) * | 1982-07-22 | 1984-01-31 | Toshiba Corp | 半導体ウエハ製造方法 |
JPS61123151A (ja) * | 1985-10-23 | 1986-06-11 | Hitachi Ltd | 製造装置 |
JPS61123150A (ja) * | 1985-10-23 | 1986-06-11 | Hitachi Ltd | 製造装置 |
JPS63107896A (ja) * | 1986-05-19 | 1988-05-12 | Toshiba Mach Co Ltd | 気相成長装置 |
JPH02132840A (ja) * | 1988-02-12 | 1990-05-22 | Tokyo Electron Ltd | 処理装置及びレジスト処理装置及び処理方法及びレジスト処理方法 |
JPH0334441A (ja) * | 1989-06-30 | 1991-02-14 | Fujitsu Ltd | 半導体基板の連続処理システム |
US5339128A (en) * | 1988-02-12 | 1994-08-16 | Tokyo Electron Limited | Resist processing method |
JPH08227929A (ja) * | 1988-02-12 | 1996-09-03 | Tokyo Electron Ltd | 処理装置 |
JPH08227930A (ja) * | 1988-02-12 | 1996-09-03 | Tokyo Electron Ltd | 製造装置及び製造方法 |
JPH08227927A (ja) * | 1988-02-12 | 1996-09-03 | Tokyo Electron Ltd | 処理装置 |
JPH08255823A (ja) * | 1988-02-12 | 1996-10-01 | Tokyo Electron Ltd | 処理装置 |
JPH08255824A (ja) * | 1988-02-12 | 1996-10-01 | Tokyo Electron Ltd | 処理装置 |
JP2010524209A (ja) * | 2007-03-30 | 2010-07-15 | 東京エレクトロン株式会社 | インラインリソグラフィ及びエッチングシステム |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3976330A (en) * | 1975-10-01 | 1976-08-24 | International Business Machines Corporation | Transport system for semiconductor wafer multiprocessing station system |
US4027246A (en) * | 1976-03-26 | 1977-05-31 | International Business Machines Corporation | Automated integrated circuit manufacturing system |
GB1534248A (en) * | 1976-03-31 | 1978-11-29 | Tokyo Shibaura Electric Co | Apparatus for manufacturing semiconductor devices |
JPS60190025U (ja) * | 1984-05-25 | 1985-12-16 | 愛知電機株式会社 | 巻鉄心変圧器 |
JPS6126229A (ja) * | 1984-07-16 | 1986-02-05 | Oki Electric Ind Co Ltd | 半導体装置の製造装置 |
JPS6176938U (US20110009641A1-20110113-C00116.png) * | 1984-10-25 | 1986-05-23 | ||
US4685852A (en) * | 1985-05-20 | 1987-08-11 | Machine Technology, Inc. | Process apparatus and method and elevator mechanism for use in connection therewith |
US4603567A (en) * | 1985-07-19 | 1986-08-05 | Ronald A. Smith & Associates | Programmable manufacturing system for load/support arms for magnetic disk drive data storage systems |
US4987673A (en) * | 1987-06-18 | 1991-01-29 | Mitsubishi Denki Kabushiki Kaisha | Apparatus for packaging semiconductor devices |
US5656229A (en) * | 1990-02-20 | 1997-08-12 | Nikon Corporation | Method for removing a thin film layer |
JPH06252241A (ja) * | 1993-03-02 | 1994-09-09 | Toshiba Corp | 半導体製造装置 |
WO1995017993A1 (fr) * | 1993-12-27 | 1995-07-06 | Hitachi, Ltd. | Procede et appareil de production continue d'une multiplicite de types d'articles |
JP2974069B2 (ja) * | 1997-09-25 | 1999-11-08 | イノテック株式会社 | 半導体デバイスの製造装置 |
US6289291B1 (en) * | 1998-12-17 | 2001-09-11 | United Microelectronics Corp. | Statistical method of monitoring gate oxide layer yield |
US7225044B2 (en) * | 2002-11-11 | 2007-05-29 | Micron Technology, Inc. | Methods for supporting substrates during fabrication of one or more objects thereon by programmable material consolidation techniques |
US6990721B2 (en) * | 2003-03-21 | 2006-01-31 | Brooks Automation, Inc. | Growth model automated material handling system |
US7279267B2 (en) * | 2003-08-19 | 2007-10-09 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for manipulating the topography of a film surface |
US7684888B2 (en) * | 2007-05-08 | 2010-03-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Extendable MES for Cross-AMHS Transportation |
US20100008749A1 (en) * | 2008-07-08 | 2010-01-14 | Caterpillar Inc. | Modular paint line including an immersion station |
DE102017104246B4 (de) * | 2017-03-01 | 2022-09-15 | ARRTSM GmbH | Autonome Fertigungsstraße |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4881773A (US20110009641A1-20110113-C00116.png) * | 1972-02-04 | 1973-11-01 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3576540A (en) * | 1967-11-20 | 1971-04-27 | Sundstrand Corp | Plural machine tool and part handling control system |
US3543392A (en) * | 1967-12-15 | 1970-12-01 | Cincinnati Milacron Inc | Machine tools having conveyor means extending therebetween and carrying pallet means which are selectively connectable to the machine tools |
US3618199A (en) * | 1969-06-30 | 1971-11-09 | Texas Instruments Inc | Automated method and system for fabricating semiconductor devices |
-
1973
- 1973-02-05 US US329920A patent/US3889355A/en not_active Expired - Lifetime
-
1974
- 1974-01-10 CA CA189,832A patent/CA1006626A/en not_active Expired
- 1974-01-22 JP JP49009041A patent/JPS5931211B2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4881773A (US20110009641A1-20110113-C00116.png) * | 1972-02-04 | 1973-11-01 |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5619635A (en) * | 1979-07-27 | 1981-02-24 | Hitachi Ltd | Manufacturing apparatus |
JPS5828849A (ja) * | 1981-08-13 | 1983-02-19 | Nec Corp | 半導体製造装置 |
JPS5860552A (ja) * | 1981-10-05 | 1983-04-11 | Tokyo Denshi Kagaku Kabushiki | 縦型自動プラズマ処理装置 |
JPS6325500B2 (US20110009641A1-20110113-C00116.png) * | 1981-10-05 | 1988-05-25 | Tokyo Ohka Kogyo Co Ltd | |
JPS5918651A (ja) * | 1982-07-22 | 1984-01-31 | Toshiba Corp | 半導体ウエハ製造方法 |
JPS61123151A (ja) * | 1985-10-23 | 1986-06-11 | Hitachi Ltd | 製造装置 |
JPS61123150A (ja) * | 1985-10-23 | 1986-06-11 | Hitachi Ltd | 製造装置 |
JPS63107896A (ja) * | 1986-05-19 | 1988-05-12 | Toshiba Mach Co Ltd | 気相成長装置 |
JPH02132840A (ja) * | 1988-02-12 | 1990-05-22 | Tokyo Electron Ltd | 処理装置及びレジスト処理装置及び処理方法及びレジスト処理方法 |
US5339128A (en) * | 1988-02-12 | 1994-08-16 | Tokyo Electron Limited | Resist processing method |
JPH08227929A (ja) * | 1988-02-12 | 1996-09-03 | Tokyo Electron Ltd | 処理装置 |
JPH08227930A (ja) * | 1988-02-12 | 1996-09-03 | Tokyo Electron Ltd | 製造装置及び製造方法 |
JPH08227927A (ja) * | 1988-02-12 | 1996-09-03 | Tokyo Electron Ltd | 処理装置 |
JPH08255823A (ja) * | 1988-02-12 | 1996-10-01 | Tokyo Electron Ltd | 処理装置 |
JPH08255824A (ja) * | 1988-02-12 | 1996-10-01 | Tokyo Electron Ltd | 処理装置 |
JPH0334441A (ja) * | 1989-06-30 | 1991-02-14 | Fujitsu Ltd | 半導体基板の連続処理システム |
JP2010524209A (ja) * | 2007-03-30 | 2010-07-15 | 東京エレクトロン株式会社 | インラインリソグラフィ及びエッチングシステム |
Also Published As
Publication number | Publication date |
---|---|
JPS5931211B2 (ja) | 1984-07-31 |
CA1006626A (en) | 1977-03-08 |
US3889355A (en) | 1975-06-17 |