JPS4856381A - - Google Patents

Info

Publication number
JPS4856381A
JPS4856381A JP9189271A JP9189271A JPS4856381A JP S4856381 A JPS4856381 A JP S4856381A JP 9189271 A JP9189271 A JP 9189271A JP 9189271 A JP9189271 A JP 9189271A JP S4856381 A JPS4856381 A JP S4856381A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9189271A
Other versions
JPS5528432B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9189271A priority Critical patent/JPS5528432B2/ja
Publication of JPS4856381A publication Critical patent/JPS4856381A/ja
Publication of JPS5528432B2 publication Critical patent/JPS5528432B2/ja
Expired legal-status Critical Current

Links

JP9189271A 1971-11-18 1971-11-18 Expired JPS5528432B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9189271A JPS5528432B2 (ja) 1971-11-18 1971-11-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9189271A JPS5528432B2 (ja) 1971-11-18 1971-11-18

Publications (2)

Publication Number Publication Date
JPS4856381A true JPS4856381A (ja) 1973-08-08
JPS5528432B2 JPS5528432B2 (ja) 1980-07-28

Family

ID=14039194

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9189271A Expired JPS5528432B2 (ja) 1971-11-18 1971-11-18

Country Status (1)

Country Link
JP (1) JPS5528432B2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53142881A (en) * 1977-05-19 1978-12-12 Matsushita Electric Ind Co Ltd Manufacture for semiconductor device
JPS5492071A (en) * 1977-12-29 1979-07-20 Nippon Telegr & Teleph Corp <Ntt> Semiconductor device and its manufacture
JPS5492070A (en) * 1977-12-29 1979-07-20 Nippon Telegr & Teleph Corp <Ntt> Mis field effect transistor and its manufacture

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5873305U (ja) * 1981-11-10 1983-05-18 ダイセル化学工業株式会社 管状型膜モジユ−ル

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1564438A (ja) * 1967-05-29 1969-04-18
JPS4937306A (ja) * 1972-08-21 1974-04-06

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1564438A (ja) * 1967-05-29 1969-04-18
JPS4937306A (ja) * 1972-08-21 1974-04-06

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53142881A (en) * 1977-05-19 1978-12-12 Matsushita Electric Ind Co Ltd Manufacture for semiconductor device
JPS6013313B2 (ja) * 1977-05-19 1985-04-06 松下電器産業株式会社 半導体装置の製造方法
JPS5492071A (en) * 1977-12-29 1979-07-20 Nippon Telegr & Teleph Corp <Ntt> Semiconductor device and its manufacture
JPS5492070A (en) * 1977-12-29 1979-07-20 Nippon Telegr & Teleph Corp <Ntt> Mis field effect transistor and its manufacture
JPS59137B2 (ja) * 1977-12-29 1984-01-05 日本電信電話株式会社 Ｍｉｓ電界効果型トランジスタの製法
JPS6038031B2 (ja) * 1977-12-29 1985-08-29 日本電信電話株式会社 半導体装置の製法

Also Published As

Publication number Publication date
JPS5528432B2 (ja) 1980-07-28

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