JPS4834454B1 - - Google Patents
Info
- Publication number
- JPS4834454B1 JPS4834454B1 JP45019246A JP1924670A JPS4834454B1 JP S4834454 B1 JPS4834454 B1 JP S4834454B1 JP 45019246 A JP45019246 A JP 45019246A JP 1924670 A JP1924670 A JP 1924670A JP S4834454 B1 JPS4834454 B1 JP S4834454B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
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- H10P95/00—
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
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- H10P50/644—
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- H10P54/00—
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- H10W40/10—
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H2239/00—Miscellaneous
- H01H2239/052—Strain gauge
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- H10W72/01515—
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- H10W72/075—
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- H10W72/536—
Landscapes
- Pressure Sensors (AREA)
- Weting (AREA)
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB02226/69A GB1211499A (en) | 1969-03-07 | 1969-03-07 | A method of manufacturing semiconductor devices |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4834454B1 true JPS4834454B1 (enExample) | 1973-10-22 |
Family
ID=10000667
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP45019246A Pending JPS4834454B1 (enExample) | 1969-03-07 | 1970-03-06 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS4834454B1 (enExample) |
| DE (1) | DE2010448A1 (enExample) |
| FR (1) | FR2034731B1 (enExample) |
| GB (1) | GB1211499A (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4203128A (en) | 1976-11-08 | 1980-05-13 | Wisconsin Alumni Research Foundation | Electrostatically deformable thin silicon membranes |
| US4238275A (en) * | 1978-12-29 | 1980-12-09 | International Business Machines Corporation | Pyrocatechol-amine-water solution for the determination of defects |
| IT1212404B (it) * | 1979-02-22 | 1989-11-22 | Rca Corp | Metodo comportante un singolo attacco per la formazione di un mesa presentante una parete a piu'gradini. |
| US4234361A (en) | 1979-07-05 | 1980-11-18 | Wisconsin Alumni Research Foundation | Process for producing an electrostatically deformable thin silicon membranes utilizing a two-stage diffusion step to form an etchant resistant layer |
| US4605919A (en) * | 1982-10-04 | 1986-08-12 | Becton, Dickinson And Company | Piezoresistive transducer |
| US4498229A (en) * | 1982-10-04 | 1985-02-12 | Becton, Dickinson And Company | Piezoresistive transducer |
| JPS59136977A (ja) * | 1983-01-26 | 1984-08-06 | Hitachi Ltd | 圧力感知半導体装置とその製造法 |
| GB2145875B (en) * | 1983-08-12 | 1986-11-26 | Standard Telephones Cables Ltd | Infra-red-detector |
| GB2146697B (en) * | 1983-09-17 | 1986-11-05 | Stc Plc | Flexible hinge device |
| GB2209245A (en) * | 1987-08-28 | 1989-05-04 | Gen Electric Co Plc | Method of producing a three-dimensional structure |
| JPH04342129A (ja) * | 1991-05-17 | 1992-11-27 | Sony Corp | 層間絶縁膜の平坦化方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3099591A (en) * | 1958-12-15 | 1963-07-30 | Shockley William | Semiconductive device |
| NL256986A (enExample) * | 1960-01-04 | |||
| FR1472688A (fr) * | 1965-03-31 | 1967-03-10 | Westinghouse Electric Corp | Circuits intégrés à semi-conducteurs et procédé de fabrication correspondant |
| FR1483890A (fr) * | 1965-04-26 | 1967-06-09 | Siemens Ag | Procédé de fabrication de circuits à semi-conducteurs |
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1969
- 1969-03-07 GB GB02226/69A patent/GB1211499A/en not_active Expired
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1970
- 1970-03-05 DE DE19702010448 patent/DE2010448A1/de active Pending
- 1970-03-06 JP JP45019246A patent/JPS4834454B1/ja active Pending
- 1970-03-06 FR FR7008093A patent/FR2034731B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR2034731B1 (enExample) | 1975-09-26 |
| GB1211499A (en) | 1970-11-04 |
| DE2010448A1 (enExample) | 1970-09-24 |
| FR2034731A1 (enExample) | 1970-12-11 |