JPH118987A - Pulse power source - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a pulse power source which facilitate the handling of a device without lowering the electrical performance. SOLUTION: A pulse power source is constituted, being dividing into a unit 1 where a capacitor C0 , a semiconductor switch SW, and a saturable reactor SI0 are accommodated together, a unit 2 where a pulse transformer PT and a magnetic pulse compressing circuit consisting of saturable reactors SI1 and SI2 and capacitors C1 and C2 are accommodated together, and a laser oscillator 3, and here the circuit connection between the units, and the circuit connection with the laser oscillator are performed by a coaxial cable of a conductor bar. This includes the unit 2 which is divided separately for each magnetic pulse compressing circuit, in the case that the magnetic pulse compressing circuit is constituted in plural stages.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pulse power supply for generating short pulses of high voltage and large current, and more particularly to an assembly structure of a pulse power supply.

[0002]

2. Description of the Related Art As a pulse power supply for a pulse laser excitation, a pulse plasma generation, a pulse denitration apparatus, etc., there is a combination of a semiconductor switch and a saturable reactor or a saturable transformer serving as a magnetic switch.

FIG. 5 shows a circuit example of a pulse power supply in which a semiconductor switch and a saturable reactor are combined.

[0004] In the figure, the first stage energy storage capacitor C ₀ is initially charged by the charger DCHV become high-voltage DC power source constituted by an inverter and the rectifier circuit. The semiconductor switch SW indicated by GTO is a first-stage switch including one semiconductor switching element, its gate control circuit, and a snubber circuit. The saturable reactor SI ₀ is connected to the capacitor C ₀ by turning on the switch SW.
The magnetic assist means reduces the switching loss of the switch SW with a delay until the saturation of the discharge pulse current I _{0 in the} path indicated by the arrow.

The pulse transformer PT has a discharge pulse current I
₀ boosts the pulse voltage applied to the primary winding by charging the capacitor C _1. Saturable reactors SI ₁ is saturated when the charging of the capacitor C1 has reached a predetermined level, the magnetic pulse compression means for generating a discharge pulse current I ₁ from the capacitor C ₁ to capacitor C ₂ becomes low impedance .

[0006] Similarly, the saturable reactor SI ₂ will magnetic pulse compression means for generating a discharge pulse current I ₂ to peaking capacitor C _P at the charging capacitor C _2.

[0007] peaking capacitor C _P becomes a load of the pulse power source to constitute a laser oscillator with the laser head LH, is a high-pressure charged by the magnetic pulse compression pulse current, a discharge pulse current to the laser head LH in charge up to a certain voltage Supply.

The configuration of the pulse power supply is not limited to that shown in FIG. 5, but includes various modifications such as a configuration using a saturable transformer in place of the pulse transformer PT, and a configuration having a plurality of transformers.

[0009]

The conventional pulse power supply is
Except for the charger DCHV, has a integral from the first stage capacitor C ₀ to peaking capacitor C _P matches in one housing.

[0010] This is because it is necessary to minimize the inductance component when an LC oscillating current is generated in order to obtain a short pulse by magnetic pulse compression. It is.

In this integrated structure, a saturable transformer or a saturable reactor used for magnetic pulse compression has a magnetic core mainly composed of iron occupying most of the volume and is heavy.

For this reason, the pulse power source becomes a large and heavy device with the increase in the number of magnetic pulse compression stages and the current capacity, and it becomes difficult to handle such as assembling, repairing, transporting and installing the device. Become.

It is an object of the present invention to provide a pulse power supply that facilitates handling of a device without deteriorating electrical performance.

[0014]

According to the present invention, in order to solve the above-mentioned problems, a pulse power supply is unitized so that it can be divided and connected in a structure that does not affect its electrical performance, and assembly and transportation of each unit are performed. This is characterized by the following configuration.

A capacitor which is initially charged by a charger, a semiconductor switch which is turned on to supply a pulse current from the capacitor to the transformer, and a saturable reactor or a saturable transformer as a magnetic switch means for pulse compression of the output of the transformer. A magnetic pulse compression circuit, a pulse power supply for supplying a pulse current output from the magnetic pulse compression circuit to a load such as a pulse oscillator, and a first unit configured as a housing housing the capacitor and the semiconductor switch collectively; A transformer and a second unit configured as a housing that collectively houses a magnetic pulse compression circuit are divided and configured, and a circuit connection between the units and a circuit connection with the load are connected by a coaxial cable or a conductor bar. I do.

Further, according to the present invention, the second unit includes:
When the magnetic pulse compression circuit is composed of a plurality of stages, the magnetic pulse compression circuit is unitized for each magnetic pulse compression circuit, and the units are connected by a coaxial cable or a conductor bar.

Further, according to the present invention, the first unit includes:
The configuration includes a saturable reactor for magnetic assist.

[0018]

FIG. 1 is a unit configuration showing an embodiment of the present invention. Unit 1 is configured as a single housing which collectively houses the first stage capacitor C ₀ and the semiconductor switch SW.

The unit 2 accommodates a saturable reactor SI _{0 serving} as magnetic assist means, a pulse transformer PT, capacitors C ₁ and C _2, and saturable reactors SI ₁ and SI _{2 serving} as magnetic pulse compression means. It is configured as one housing.

The laser oscillator 3 constitutes a peaking capacitor C _P and the laser head LH as one enclosure.

The connection between each of the units 1 and 2 and the laser oscillator 3 is made by using a coaxial cable having excellent responsiveness to a pulse current or a conductor bar having extremely low self-inductance.

In the case of the coaxial cable shown in FIG.
The core wire A is on the high voltage side and the external conductor B is on the ground potential side, and is detachable using a coaxial connector. In the case of the conductor bar shown in FIG. 2B, a pair of conductor bars C and D have a structure sandwiching an insulator E, one conductor bar is on the high voltage side, and the other conductor bar is on the ground potential side. The connection between the conductor bars can be separated using a bolt F. The outside of the conductor bars C and D is covered with a shielding duct G for noise prevention.

The connection between the charger DCHV and the unit 1 can also be connected by a coaxial cable or a conductor bar.
A normal power cable may be used.

In the present embodiment, the division arrangement between the charger DCHV the unit 1, no effect on the electrical performance initial charging of the capacitor C ₀ is slowed or charging by the DC power source.

Next, in the split configuration between unit 1 and the unit 2, the discharge current from the capacitor C ₀ flows through the saturable reactor SI ₀ side through the coaxial cable or conductor bars, but this current before magnetic pulse compression The pulse current changes relatively slowly, and has no effect on the electrical performance of the pulse current waveform.

At this point, a fast rising pulse current compressed by magnetic pulse flows between the capacitor C ₁ and the saturable reactor SI ₁ in the unit 2. Similarly,
It flows fast rise of the pulse current between the capacitor C ₂ and the saturable reactors SI _2.

For these pulse currents, the capacitor C
_{Since both 1} and C ₂ and the saturable reactors SI ₁ and SI ₂ can be arranged within a short distance from each other in the unit 2, there is no delay in rising the pulse current waveform.

The unit 2 and the laser oscillator 3 to be the last stage
A pulse current with the highest rise flows between the two, and a coaxial cable with excellent responsiveness to the pulse current or a conductor bar with a very low self-inductance is used to connect the cable between them. There is no reduction in electrical performance.

Therefore, according to the present embodiment, since the circuit elements constituting the pulse power supply are divided into a plurality of units, assembly, repair, transportation, installation, etc. can be performed for each unit, and handling is easy. It becomes a simple task. Moreover, the electric performance is not reduced.

FIG. 3 is a unit configuration showing another embodiment of the present invention. Portions figure differs from that of Figure 1 is that transferred the saturable reactor SI ₀ to unit 1 side.

The unit 1A constitutes the capacitor C ₀ and the semiconductor switch SW and saturable reactors SI ₀ One housing that collectively accommodated.

The unit 2A includes a pulse transformer PT,
Capacitors C ₁ and C ₂ and saturable reactors SI ₁ and SI ₂
Are collectively stored as one housing.

In this embodiment, the units 1A and 2
The connection with a coaxial cable or a conductor bar in the divisional configuration with A and the divisional configuration with the unit 2A and the laser oscillator 3 facilitates handling without deteriorating electrical performance.

FIG. 4 is a unit configuration showing another embodiment of the present invention. This figure differs from FIG. 3 in that the unit 2A is divided into units 2B and 2C.

The unit 2B is constituted as one housing in which the pulse transformer PT, the capacitor C ₁ and the saturable reactor SI ₁ are housed collectively.

The unit 2C constitutes a capacitor C ₂ and the saturable reactors SI ₂ as a single housing that collectively accommodated.

In this embodiment, the units 2B and 2C
The connection between them uses a coaxial cable or a conductor bar so as to eliminate the influence on the fast rising pulse current, similarly to the connection between the unit 2 and the laser oscillator 3 in FIG.

According to the present embodiment, attention is paid to the fact that the magnetic pulse compression circuit has a plurality of stages, and the magnetic pulse compression circuit of the first stage and that of the second stage are divided. As a result, the number of connection points increases due to an increase in the number of units as compared with FIG. 1 and FIG.
The handling is further facilitated, and a repair method can be adopted for each unit.

In the configuration of FIG. 4, the unit 2C
And the laser oscillator 3 may be integrated. Further, FIGS. 1 and 3, in the configuration of FIG. 4, such as a pulse power source is omitted saturable reactors SI _0, the even pulse power supply comprising other circuit configuration, it is possible to obtain the same effect by the unitization .

[0040]

As described above, according to the present invention, the pulse power supply is unitized so that it can be divided and connected in a structure that does not affect its electrical performance, and the unit can be assembled and transported. The weight of each unit is reduced, and its assembly, repair, transportation, installation, and the like can be performed for each unit, so that its handling and work are simplified.

Moreover, connection of circuit elements between units is as follows.
Since the operation is performed using a coaxial cable or a conductor bar, the electric performance is not reduced.

[Brief description of the drawings]

FIG. 1 is a unit configuration of a pulse power supply showing an embodiment of the present invention.

FIG. 2 shows a structure of a coaxial cable and a conductor bar according to the embodiment.

FIG. 3 is a unit configuration showing another embodiment of the present invention.

FIG. 4 is a unit configuration showing another embodiment of the present invention.

FIG. 5 is a circuit example of a pulse power supply.

[Explanation of symbols]

1, 2 units 3 ... laser oscillator DCHV ... charger _{C 0, C 1, C 2} , C P ... capacitor _{SI 0, SI 1, SI 2} ... saturable reactors SW ... semiconductor switch PT ... pulse transformer LH ... laser head

Claims (3)

[Claims] A capacitor initially charged by a charger;
A semiconductor switch that is turned on to supply a pulse current from the capacitor to the transformer, a magnetic pulse compression circuit that compresses the output of the transformer using a saturable reactor or a saturable transformer as a magnetic switch, and a magnetic pulse compression circuit. A pulse power supply for supplying a pulse current output to a load such as a pulse oscillator, comprising: a first unit configured as a housing housing the capacitor and the semiconductor switch collectively; and a housing housing the transformer and a magnetic pulse compression circuit collectively. A pulse power supply, wherein a circuit connection between the units and a circuit connection with the load are connected by a coaxial cable or a conductor bar. 2. The second unit according to claim 1, wherein when the magnetic pulse compression circuit is configured in a plurality of stages, the second unit is unitized for each magnetic pulse compression circuit, and the units are connected by a coaxial cable or a conductor bar. The pulse power supply according to claim 1. 3. The pulse power supply according to claim 1, wherein the first unit includes a saturable reactor for magnetic assist.