JP2001217492A - Discharge excited gas laser device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain high output and stabilize the laser light emission by reducing a floating inductance between a magnetic switch in the final stage of a magnetic pulse compression circuit and a discharge electrode of a discharge excited gas laser device. SOLUTION: The discharge electrodes E1, E2 are formed in a slender shape. On the side face of the discharge electrode E1, peaking capacitors CP are disposed along the longitudinal direction of the discharge electrode E1. A slender loop-like core of the magnetic switch SR3 which has nearly the same length as that of the discharge electrode E1 is disposed on top of the discharge electrode E1. The core is so disposed that the longitudinal direction of the core may agree with the longitudinal direction of the discharge electrode E1. Capacitors C2 are disposed near the peaking capacitors CP and around the core of the magnetic switch SR3. The peaking capacitors CP are connected to the capacitors C2 through wire connecting section installed in the discharge electrode E1 and the magnetic switch SR3.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a discharge excitation type laser device provided with a magnetic compression device for generating a high voltage pulse, and more particularly, to discharge by applying a high voltage pulse generated by a magnetic pulse compression circuit. The present invention relates to a discharge excitation gas laser device that generates a discharge between electrodes and oscillates a laser.

[0002]

2. Description of the Related Art Excimer laser, fluorine laser, TEA
Discharge excitation type laser of -CO ₂ laser or the like oscillates a pulsed laser repeatedly in a short time discharge between the discharge electrodes.
It is necessary to supply a high voltage to the discharge electrode in a short time, and a high voltage pulse generation circuit is provided. 2. Description of the Related Art A magnetic pulse compression circuit is known as a high-voltage pulse generation circuit used in a discharge excitation type laser device. FIG. 5 shows a configuration of a general high-voltage pulse generation circuit provided in a discharge excitation type laser device. The configuration of FIG. 5 is an example including a two-stage magnetic pulse compression circuit using magnetic switches SR2 and SR3 made of a saturable reactor, and a portion surrounded by a dotted line in the figure is a two-stage magnetic pulse compression circuit. . The operation of the high voltage pulse generation circuit will be described below.

(1) Electric charge is charged from a high-voltage power supply (charger) 1 to a capacitor C0 through an inductance L1. (2) The switch SW is a semiconductor switch, for example, IG
BT is used. The switch SW is closed and turned on, a current flows through the loop of the capacitor C0, the magnetic switch SR1, the switch SW, and the capacitor C1, and the electric charge charged in the capacitor C0 transfers to the capacitor C1. (3) At that time, 20 to 3
Since a high voltage of 0 kV is applied, a similar voltage is applied to the switch SW (hereinafter, also referred to as a semiconductor switch SW) when the switch is turned on. Since the rated voltage of the semiconductor switch module is usually several kV, the semiconductor switch SW is configured by connecting a plurality of semiconductor switch modules in series in terms of withstand voltage. However, when a gate signal for turning on a plurality of semiconductor switch modules is input, not all of the semiconductor switch modules are turned on at exactly the same timing, and there are slight variations. Therefore, after the gate signal is input, a module that is turned on and a module that is not turned on exist momentarily. Therefore, out of a plurality of semiconductor switch modules connected in series, an over-voltage higher than the rated voltage is applied to a module that is not turned on, and may be damaged.

Here, a well-known snubber circuit (not shown) comprising a diode, a capacitor and the like is provided in parallel with each semiconductor switch module, and a magnetic assist SR1 comprising a saturable reactor is inserted in the circuit. The magnetic assist SR1 is designed to be saturated after all the semiconductor switch modules are turned on. When a gate signal is input, the high voltage is applied to the magnetic assist SR1. Voltage is also applied to the semiconductor switch modules that are not turned on among the semiconductor modules, but the voltage rise in the semiconductor switch modules is moderated by the snubber circuit, and the rated voltage is maintained even after the time when all the semiconductor switch modules are turned on. It does not rise until the voltage is exceeded. Therefore, after a gate signal is input, even when a plurality of semiconductor switch modules connected in series are turned on and not yet turned on instantaneously, an overvoltage is applied to the semiconductor switch modules that are not turned on. Since it is not covered, there is no risk of damage. Such a circuit in which the semiconductor switch SW is protected by the magnetic assist SR1 together with the snubber circuit is usually called a magnetic assist circuit.

(4) When the time integral value of the voltage of the capacitor C1 reaches a limit value determined by the characteristics of the magnetic switch SR2,
The magnetic switch SR2 is saturated, a current flows through the loop of the capacitor C1, the capacitor C2, and the magnetic switch SR2, and the electric charge of the capacitor C1 is transferred to the capacitor C2. At this time, the pulse width of the current is compressed. This pulse compression ratio depends on the number of turns of the wiring wound around the core of the magnetic switch SR2 and the cross-sectional area of the core. Such a circuit is called a magnetic compression pulse circuit. (5) Thereafter, when the time integral value of the voltage V2 in the capacitor C2 reaches a limit value determined by the characteristics of the magnetic switch SR3, the magnetic switch SR3 saturates and the capacitor C2,
A current flows through the loop of the peaking capacitor CP and the magnetic switch SR3, and the electric charge of the capacitor C2 transfers to the peaking capacitor CP, and the peaking capacitor CP is charged. At this time, the current pulse is compressed. This pulse compression ratio depends on the number of turns of the wiring wound around the core of the magnetic switch SR3 and the cross-sectional area of the core. (6) As the charging proceeds, the voltage Vp of the peaking capacitor CP increases. When the voltage Vp reaches a certain value Vb, the laser gas between the discharge electrodes E1 and E2 is broken down, and the main discharge starts. Excites the laser medium to generate laser light. Before the main discharge occurs, the discharge electrodes E1, E2
The laser gas, which is the laser medium between them, is preionized.

(7) Thereafter, the voltage of the peaking capacitor CP drops rapidly due to the main discharge, and eventually returns to the state before the start of charging. (8) Such a discharging operation is repeatedly performed by the switching operation of the switch SW, whereby pulse laser oscillation is performed at a predetermined repetition frequency. (9) Here, the peak value of the current pulse flowing through each stage is sequentially increased by setting the inductance of the capacitance transfer circuit of each stage composed of the magnetic switch and the capacitor so as to decrease as going to the subsequent stage. In addition, a pulse compression operation is performed such that the pulse width becomes narrower sequentially, and a strong discharge of a short pulse is realized between the discharge electrodes E1 and E2. As a result, the glow discharge is stably maintained between the discharge electrodes, and the stability of laser emission is increased, and the emission efficiency of the laser is also improved.

The magnetic switch SR in the circuit shown in FIG.
The performance (compression performance) of compressing the pulse width of 2 to SR3 is
It is known that the smaller the inductance after saturation of the magnetic switch, the better. In order to reduce the inductance, the magnetic pulse compression circuit is required to reduce the parasitic inductance of the capacitor, reduce the inductance of the magnetic switch coil, and reduce the stray inductance as follows. A method is conceivable.

In order to reduce the parasitic inductance of the capacitor, the capacitors C0, C1, C2, CP
May be provided in parallel as many as possible. In order to reduce the inductance of the coil of the magnetic switch, a plurality of core windings of the magnetic switches SR2 to SR3 may be provided as many as possible in parallel. With the above configuration, the actual configuration of the magnetic pulse compression circuit is as shown in FIG. In the figure, C1 ₁ ~C1 _k, C
The parallel circuits of 2 _{1 to} C 2 _m and CP _{1 to} CP _n correspond to the capacitors C 1, C 2 and CP, respectively, and SR 2 ₁
To SR2 _m and SR3 _{1 to} SR3 _n correspond to the above-described magnetic switches SR2 and SR3, respectively. Note that the magnetic assist circuit and the like are omitted in FIG. To reduce the stray inductance, the capacitor C2 ₁ -C2 _m - short connections connecting the magnetic switch SR2- capacitor C2 ₁ -C2 _n - magnetic switch SR3- capacitor CP ₁ ~ CP _n, the capacitor C1 ₁ to C1 _k I just need. Therefore, in the magnetic pulse compression circuit, a configuration is generally adopted in which a plurality of capacitors are arranged close to the magnetic switch, and wiring from each capacitor is wound in parallel with the core of the magnetic switch.

[0009]

SUMMARY OF THE INVENTION Magnetic assist SR1 and magnetic switch SR used in a magnetic pulse compression circuit
2, SR3 is a coil whose core is often formed by winding a ribbon-shaped ferromagnetic material in multiple layers. Therefore, the shape is generally circular (cylindrical). For this reason, as described below, there is a problem that the area occupied by the magnetic pulse compression circuit increases and the stray inductance increases.

(1) The problem of the area occupied by the magnetic pulse compression circuit. The magnetic pulse compression circuit includes a plurality of magnetic switches as described above. The magnetic assist SR1 is a similar coil. Therefore, a plurality of coils having a circular core are provided in the laser device. When these are arranged side by side on a plane, the area occupied by the coil increases. Accordingly, the size of the laser device also increases. For example,
See FIG. 5 of U.S. Pat. No. 5,315,611. FIG. 4 shows an arrangement of a magnetic pulse compression circuit similar to that described in the background art. Fi in the above specification
g. In 4, a reference numeral 40 denotes a first stage of the magnetic pulse compression circuit, 120 denotes a second stage, and 190 denotes a third stage. The cylindrical portion of each stage is the core of the magnetic switch (FIGS. 6A, 7B, 8B in the same specification).
The detailed configuration is shown in FIG. Also, 30, 60, 13
Reference numerals 0 and 200 denote capacitors, and a plurality of capacitors are arranged around the core. As shown in the drawing, when the magnetic switches are arranged side by side on a plane, the area occupied by the magnetic pulse compression circuit is increased.

(2) The problem of stray inductance. As described above, the stray inductance in the entire magnetic pulse compression circuit should be small. However, the floating inductance of the capacitor C2-magnetic switch SR3-peaking capacitor CP, which is the final stage of the magnetic pulse compression circuit shown in FIG. That is, in order to reduce the stray inductance, it is desirable to reduce the area of the hatched portion surrounded by the capacitor C2, the magnetic switch SR3 and the peaking capacitor CP as shown in FIG. FIG. 8 shows the speed at which energy (voltage) transfers from the capacitor C2 to the peaking capacitor CP. In the figure, the horizontal axis represents time, and the vertical axis represents discharge voltage. When the transition speed is high as shown in the figure, discharge occurs at a sufficient discharge voltage VB. However, as shown in the figure, when the transition speed is low, discharge occurs at a low voltage and the light emission energy of the laser decreases. That is, in order to increase the transition speed, it is necessary to reduce the area (shaded portion in FIG. 7) formed by the C2-SR3-CP-ground shown in FIG. 7 and reduce the stray inductance.

FIG. 9 shows a capacitor C2 and a magnetic switch S
R3, peaking capacitor CP, and discharge electrode E1,
An example of the arrangement of E2 is shown as a schematic diagram. As shown in the figure,
The shape of the discharge electrodes E1, E2 is elongated, a plurality of peaking to the discharge electrode E1 capacitor CP ₁ ~ CP _n is the electrode E1
Are arranged side by side along a longitudinal direction, the one end of the peaking capacitor CP ₁ ~ CP _n is connected to the electrode E1, the other ends are grounded. Further, the magnetic switch SR3 having a circular core, the distance of the wiring is connected to the peaking capacitor CP ₁ ~ CP _n to be shorter discharge electrodes E1
Placed directly above. A plurality of capacitors C2 _1, C2 _2,
Are arranged side by side around the circular core, and each capacitor C2
_1, C2 _2, ... wires from one end of the magnetic switch S
It is wound in parallel with the core of R3 (FIG. 9 shows a case where it is wound one turn, but in reality it is wound, for example, about two turns), and is connected to the wiring connection part P attached on the discharge electrode E1. You. The capacitors C2 ₁ , C2 ₂ ,
Are grounded. Although only two capacitors C2 and three peaking capacitors CP are illustrated in FIG. 9, a large number of C2s are actually arranged around the SR core, and CPs are arranged on both sides of the electrodes. Further, the capacitors C2 and CP, and the electrodes to which CP is not connected are connected via ground.

FIG. 10 shows the configuration of FIG. 9 as viewed from the direction of arrow A in FIG. As shown in FIG.
Is connected to the wiring connection portion P of the discharge electrode E1 via the magnetic switch SR3. Since the shape of the SR3 core is circular, the wiring connection portion P can be provided only near the center of the core. Therefore, the distance from the wiring connection portion P to each peaking capacitor CP is different. Therefore, [Capacitor C2-magnetic switch SR3-peaking capacitor C
P distance] is also different. For example, in FIG. 9, [C2
₁ distance of -SR3-CP _1]> [C2 ₂ -SR3-CP
₂ distance]. [Capacitor C2-magnetic switch S
In the wiring route where the distance [R3—the distance of the peaking capacitor CP] is long, the stray inductance increases and the compression performance of the magnetic switch SR3 decreases. Further, since the distances between the wiring routes are different, the generated stray inductances are different, and the voltages applied to the discharge electrodes are partially different. As a result, the discharge generated in the entire electrode becomes partially non-uniform, and the laser emission becomes unstable.

The present invention has been made in view of the above circumstances, and an object of the present invention is to reduce the area occupied by a magnetic pulse compression circuit and to reduce the stray inductance between a magnetic switch and a discharge electrode in the final stage. Then, the speed at which the energy is transferred from the capacitor C2 to the peaking capacitor CP is increased, the discharge is performed at a sufficient discharge voltage, and the emission energy of the laser is increased.
By making [the distance between the capacitor C2, the magnetic switch SR3, and the peaking capacitor CP] uniform in each wiring route, uniform discharge is generated in the entire discharge electrode, and the laser emission is stabilized, so that the repetitive characteristics are obtained. And high output can be obtained.

[0015]

According to the present invention, a magnetic pulse compression circuit of a discharge excitation gas laser device is configured as follows. (1) The discharge electrode is elongated and a first capacitor (peaking capacitor CP) is arranged along the longitudinal direction of the discharge electrode on the side of the non-grounded electrode of the discharge electrode, and is not grounded. An elongated loop-shaped core of the magnetic switch having a length substantially equal to the length of the discharge electrode is provided above the discharge electrode, and is disposed so that the longitudinal direction thereof coincides with the longitudinal direction of the discharge electrode. And the second
The capacitor (capacitor C2) is disposed in the vicinity of the first capacitor along the periphery of the core of the magnetic switch, and the first capacitor is connected to the wiring connection portion attached to the discharge electrode and the magnetic capacitor. Connected to a plurality of second capacitors via switches. (2) In the above (1), the same number of second capacitors as the first capacitors are provided, and the second capacitors are arranged along the periphery of the core of the magnetic switch in one-to-one correspondence with the first capacitors. I do. (3) In the above (1) and (2), the cores of a plurality of magnetic switches of the magnetic pulse compression circuit are vertically stacked. In the present invention, since the above configuration is adopted, the generated stray inductance can be reduced, and the laser output energy can be increased. Further, since the stray inductances between the wirings can be made substantially the same, the discharge generated in the entire electrodes becomes uniform, and the laser emission is stabilized. Further, by vertically stacking the magnetic assist and each magnetic switch, the area for disposing the magnetic compression circuit can be reduced.

[0016]

FIG. 1 shows a capacitor C2 (corresponding to a second capacitor in the claims), a magnetic switch SR3, a peaking capacitor CP (corresponding to a first capacitor in the claims) and discharge of an embodiment of the present invention. Electrodes E1,
It is the figure which showed the example of arrangement | positioning of E2 typically. As shown in the figure, in the present embodiment, the last-stage magnetic switch SR
The core of No. 3 has an elongated loop shape (hereinafter referred to as an elliptical shape). That is, when manufacturing the core of the magnetic switch SR3 by winding a ribbon-shaped ferromagnetic material, the core is wound in an elliptical shape. Peaking capacitor CP ₁ ~ CP _n, similarly to FIG. 9, connected side by side along the longitudinal direction of the electrode E1, the magnetic switch SR3 is location directly above the electrode to which the peaking capacitor CP ₁ ~ CP _n connected I will

A plurality of capacitors C2 _{1 to} C2 _m are arranged side by side around the above-mentioned elliptical core,
The wiring from one end of _{1 to} C2 _m is connected to the magnetic switch SR3.
(FIG. 1 shows a case where one turn is wound, but in reality, for example, about two turns are wound as described above), and the wiring connection portions P1 attached to the discharge electrodes E1 respectively To P3. The other end of the capacitor C2 ₁ -C2 _m is grounded. Number of capacitors C2 _{1 to} C2 _m and peaking capacitors CP _{1 to} C
It is not always necessary to match the numbers of P _n , but by matching the numbers of both, [the distance between the capacitor C 2 -the magnetic switch SR 3 -the peaking capacitor CP] can be minimized in each wiring route, so that the stray inductance is further reduced. Can be reduced.

FIG. 2 shows the configuration of FIG. 1 as viewed from the direction of arrow A in FIG. As shown in FIG.
3 and the longitudinal direction of the discharge electrodes E1 and E2 are arranged so as to coincide with each other. The capacitors C2 are arranged along the periphery of the core of the magnetic switch SR3, and each capacitor C2
2 is arranged near each peaking capacitor CP.
For example, when matching the number of the capacitors C2 and the number of the peaking capacitors CP, each capacitor C2 is arranged at a position as close as possible to the mounting position of the corresponding peaking capacitor CP. The wiring from the capacitor C2 is connected to wiring connecting parts P1 to P3 provided on the discharge electrode E1 via the magnetic switch SR3. Further, the capacitors C2 and CP are connected via the ground as in FIG.

In this embodiment, the magnetic switch SR3
Has a shape of an ellipse, the capacitor C2 can be provided along the discharge electrode E1, and a plurality of wiring connection portions P1 to P3 can be provided at arbitrary positions of the discharge electrode E1. Can be connected to the nearby wiring connection portions P1 to P3. Therefore, as shown in FIG. 2, even if the connection position of the peaking capacitor CP is at the end of the discharge electrode E1, [the capacitor C2—the magnetic switch SR3—the discharge electrode E1—the wiring connection portions P1 to P3—to the peaking capacitor CP Distance) can be shortened. Further, the distances from the wiring connection portions P1 to P3 to the respective peaking capacitors CP can be made substantially equal. For this reason, [distance of capacitor C2-magnetic switch SR3-peaking capacitor CP]
Can be made almost the same in each wiring route.

As described above, since the length of the wiring can be reduced, the stray inductance can be reduced, and the compression performance of the magnetic switch SR3 can be improved. Further, since the stray inductances between the wirings are substantially the same, the voltage applied to the discharge electrode E1 can be made uniform as a whole. As a result, the discharge generated in the entire electrode becomes uniform, and the laser emission is stabilized. Further, the number of capacitors C2 that can be arranged around the core can be increased,
[Number of capacitors C2] = [peaking capacitor CP
Number). Therefore, [the distance between the capacitor C2, the magnetic switch SR3, and the peaking capacitor CP] can be minimized in each wiring route, and the stray inductance can be further reduced.

FIG. 3 shows the magnetic switch SR3 shown in FIG.
FIG. 3 is a diagram schematically illustrating a configuration example of a magnetic pulse compression circuit combining a magnetic assist SR1 and a magnetic switch SR2. As shown in the figure, a circular (cylindrical) magnetic assist SR1 and a magnetic switch SR2 which forms a two-stage magnetic pulse compression circuit together with a magnetic switch SR3 are vertically stacked above the magnetic switch SR3. Although only a part of the capacitors C0, C1, C2, and CP are shown in FIG. 1, a large number of capacitors are actually provided around the core. The circuit configuration is the same as that shown in FIGS. 5 and 6. The wiring from the switch SW shown in FIGS. 5 and 6 is connected to one end of the capacitor C1 via the capacitor Co and the core of the magnetic assist SR1. , And a magnetic switch SR
2 is connected to one end of the capacitor C2 via the second core. The wiring from one end of the capacitor C2 is further connected via a magnetic switch SR3 to the above-described wiring connection portion disposed on the discharge electrode E1. Also the capacitor C
1 and C2 are grounded. The magnetic assist S
Since the former stage circuit including the R1 and the magnetic switch SR2 does not have a problem with the stray inductance as much as the last stage circuit including the magnetic switch SR3, the core of the magnetic assist SR1 and the magnetic switch SR2 may have a circular shape.

Magnetic assist SR1, magnetic switch SR2
Is constituted by, for example, a core wound on a hobbin, and the cores are fixed with a gap through which wiring passes,
Wirings from the capacitors C0, C1, and C2 are wound around the core by a predetermined number of turns. Capacitors C0, C1, C2 are:
Magnetic assist SR1 or magnetic switches SR2, SR3
It is provided along the outer periphery of the core so that the length of the winding to the coil is as short as possible. The base plate BP is at the ground potential, and the ground terminals of the capacitors C1, C2, and CP are connected to the base plate BP. Although not shown, the wiring connection portion provided on the discharge electrode E1 is the same as in FIGS. Magnetic assist SR as described above
By arranging the magnetic compression circuits 1 and the magnetic switches SR2 in a stacked manner, the area in which the magnetic compression circuit is arranged can be reduced. However, the height of the coil of the magnetic assist SR1 and the magnetic switch SR2 must be smaller than the diameter of the coil. When the height of the coil is larger than the diameter of the coil, the wiring becomes longer and the stray inductance becomes larger than when the core is arranged in a plane.

FIG. 4 is a diagram showing a specific configuration example of a magnetic pulse compression circuit including the magnetic switch SR3, the magnetic assist SR1, and the magnetic switch SR2. FIG. 4 is a sectional view taken along the line AA in FIG. . As shown in the figure, one end of the capacitor C0 is connected to the switch SW shown in FIG. 5, and the wiring from the other end is connected to one end of the capacitor C1 via the core of the magnetic assist SR1. .
The other end of capacitor C1 is connected to base plate BP at the ground potential via conductive member L1. The wiring from one end of the capacitor C1 is connected to one end of the capacitor C2 via the core of the magnetic switch SR2, and the other end of the capacitor C2 is connected to the base plate BP via the conductive member L2. The wiring from one end of the capacitor C2 is connected to the discharge electrode E via the core of the magnetic switch SR3.
1 is connected to the wiring connection part P attached to the wiring connection part 1. The wiring connection portion P extends downward through the insulating plate IS1 and the insulating plate IS2, and a discharge electrode E to which a negative high voltage is applied at its tip.
1 is attached. Further, a peaking capacitor CP is connected between the wiring connection portion P and the conductive member L3 connected to the base plate BP. The conductive member L4 attached to the conductive member L3 extends downward through the insulating plate IS2, and a discharge electrode E2 that is at a ground potential is attached to the tip of the conductive member L4.

[0024]

As described above, in the present invention,
The following effects can be obtained. (1) The core of the final stage magnetic switch is formed into an elliptical shape, and the final stage magnetic switch is arranged so that the longitudinal direction of the core substantially matches the longitudinal direction of the discharge electrode. A plurality of wiring connection portions to be connected can be provided at arbitrary positions of the electrode. Therefore, irrespective of the position of the peaking capacitor CP connected to the discharge electrode, the distance from C2 to CP can be made as short as possible and substantially equal between the wirings. Further, the number of capacitors C2 that can be arranged around the core can be increased,
[Number of peaking capacitors CP] = [Capacitor C2
The number of capacitors C2-magnetic switch SR3-
Distance of peaking capacitor CP] can be minimized in each wiring route. Therefore, the generated stray inductance can be reduced, and the transfer time of the charge from the capacitor C2 to the peaking capacitor CP can be shortened. Therefore, the discharge starting voltage of the laser can be increased, and the laser output energy can be increased. Further, since the stray inductances between the wirings are substantially the same, the voltage applied to the discharge electrodes can be made uniform as a whole, and the discharge generated in the entire electrodes becomes uniform, and the laser emission is stabilized. By shortening the transfer time of the electric charge from the capacitor C2 to the peaking capacitor CP and making the discharge generated over the entire electrode uniform, laser output at a high repetition frequency becomes possible. (2) The area in which the magnetic compression circuit is arranged can be reduced by vertically stacking the magnetic assist and each magnetic switch. Further, if the height of the coil of the magnetic assist and the magnetic switch is smaller than the diameter of the coil of the magnetic assist and each magnetic switch, the wiring becomes shorter, so that the stray inductance can be reduced.

[Brief description of the drawings]

FIG. 1 is a diagram showing an arrangement of capacitors C2 and CP, a magnetic switch SR3, and a discharge electrode according to an embodiment of the present invention.

FIG. 2 is a view of the configuration of FIG. 1 viewed from the direction of arrow A in FIG.

FIG. 3 is a diagram illustrating a configuration example of a magnetic pulse compression circuit in which a magnetic switch SR3 is combined with a magnetic assist SR1 and a magnetic switch SR2.

FIG. 4 is a diagram showing a specific configuration example of a magnetic pulse compression circuit including a magnetic switch SR3, a magnetic assist SR1, and a magnetic switch SR2.

FIG. 5 is a diagram showing a configuration of a general high voltage pulse generation circuit provided in a discharge excitation type laser device.

FIG. 6 is a diagram showing a configuration of an actual magnetic pulse compression circuit provided with a plurality of capacitors and magnetic switches in parallel.

FIG. 7 is a diagram illustrating a portion where a floating inductance is particularly problematic in the magnetic pulse compression circuit.

FIG. 8 is a diagram showing a relationship between a speed at which energy transfers from the capacitor C2 to the capacitor CP and a discharge voltage.

FIG. 9 is a diagram showing a conventional arrangement example of a capacitor C2, a magnetic switch SR3, a capacitor CP, and discharge electrodes E1 and E2.

10 is a view of the configuration of FIG. 9 as viewed from the direction of arrow A in FIG.

[Explanation of symbols]

 C0, C1, C2 Capacitor CP Peaking capacitor SR1 Magnetic assist SR2, SR3 Magnetic switch E1, E2 Discharge electrode

Claims (3)

[Claims] 1. A discharge-excited gas laser device comprising a magnetic pulse compression circuit having a magnetic switch, applying a high-voltage pulse generated by the magnetic pulse compression circuit to generate a discharge between discharge electrodes, and performing laser oscillation. The discharge electrode has an elongated shape, and a plurality of first capacitors are arranged along a longitudinal direction of the discharge electrode on a side surface of the non-grounded electrode of the discharge electrode. On the upper part of the discharge electrode that is not provided, a core of the magnetic switch in the form of an elongated loop having a length substantially equal to the length of the discharge electrode is provided, and the longitudinal direction thereof matches the longitudinal direction of the discharge electrode. A plurality of second capacitors are arranged near the first capacitor along the periphery of the core of the magnetic switch; and the first capacitor is connected to the discharge electrode. A plurality of wiring connection portion attached and via the magnetic switch discharge excitation gas laser device, characterized in that connected to the plurality of second capacitors. 2. A method according to claim 1, wherein the second capacitor is provided in the same number as the first capacitor.
2. The discharge-excited gas laser device according to claim 1, wherein the laser device is disposed along the periphery of the core of the magnetic switch in a one-to-one correspondence. 3. The discharge-excited gas laser device according to claim 1, wherein the magnetic pulse compression circuit includes a plurality of magnetic switches, and the cores of the magnetic switches are vertically stacked.