JP2553158B2 - Magnetic pulse generator - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a magnetic pulse generator used for a laser power supply.

(Prior Art) With a pulsed laser such as carbon dioxide (hereinafter referred to as CO ₂ ) or excimer, in order to eliminate the instability of the discharge and obtain a laser beam of high peak and high output, Need to be powered.

Therefore, for these power supplies, the method of discharging the electric charge charged in the capacitor by the switching element has been conventionally adopted, but a semiconductor is preferable for the switching element in terms of life and maintenance.

However, at present, there is no semiconductor element with high voltage, large current and high speed switching function, and a current pulse of relatively low frequency is used, for example, a magnetic pulse using the saturation characteristics of the iron core as shown in the connection diagram of FIG. The compression circuit shortens the pulse and applies it to the discharge part.

In FIG. 3, when the switching SW is turned on, the electric charge of the capacitor C ₀ becomes saturated first stage saturable reactor.
The capacitor C ₁ of the next stage is charged through SI1, but the voltage V ₁ of the capacitor C _{1 at} this time is Here, V _0: charging voltage of the capacitor C ₀ L _1: inductance at saturation inductance + connecting lead saturable reactors SI1 Similarly, the voltage V ₂ of capacitor C ₂ is here, L _2: inductance of + connecting lead of the saturable reactor SI2 Therefore, in order to apply a short pulse (omega Univ.) To the load, it is necessary to reduce the inductance or capacitance of the capacitor C _1, C ₂ of the circuit , The capacities of capacitors C ₁ and C ₂ are
Since it is inevitably determined by the input of the discharge section, the point is to reduce the inductance of the circuit connection line.

By the way, in FIG. 4 showing an example of the arrangement and connection diagram of the components of the conventional two-stage magnetic pulse generator, the both sides of the cylindrical cylindrical mix mix capacitors 3 and 4 for charging which are juxtaposed and connected in parallel are , Is connected to a pair of flat conductors 11.

On the other hand, in the saturable reactors SI1 and SI2, the windings 5 and 6 are wound around the iron cores 1 and 2 in which the amorphous strip material is annularly wound in multiple layers.

These are the third-stage saturable reactor SI2 from the bottom, the capacitor 4, the first-stage saturable reactor SI1, the capacitor 3
The capacitors 3 are stacked in this order, one side of the capacitor 3 is connected to one side of the capacitor 4 via the saturable reactor SI1, and further is connected to the positive electrode side of a discharge part (not shown) via the saturable reactor SI2. On the other hand, the other side of the capacitor 3 is
Together with the other side of the capacitor 4, it is also connected to the negative side of the discharge part.

In the magnetic pulse generator configured as described above, a wide insulating gap is required between the other side of the capacitor 4 and the saturable reactor SI1 adjacent to the other side of the capacitor 4 in terms of withstand voltage. The outer shape of the product becomes larger, and the connecting wire becomes longer accordingly.

Therefore, when the number of stages of the magnetic compression circuit increases or the number of capacitors 3 and 4 connected in series increases in terms of withstand voltage, it becomes more and more remarkable, and as a result, the inductance of the connection line increases,
Short pulses cannot be obtained.

Therefore, an object of the present invention is to obtain a magnetic pulse generator having a small outer shape and capable of easily outputting a short pulse.

(Means and Actions for Solving the Problems) The magnetic pulse generator of the present invention has a plurality of cylindrical saturable reactors arranged sequentially from the first stage to the last stage on the same axis.
A cylindrical positive electrode side conductor is loosely fitted on the outside of this saturable reactor, and a capacitor whose one terminal is connected to the positive electrode side conductor is arranged on the outer periphery of this positive electrode side conductor. The negative electrode side conductor, which is connected to the side terminal, is loosely fitted to place the negative electrode side conductor at ground potential on the outer circumference, and inside this, the capacitor and the saturable reactor are stored in the order of potential, and the adjacent The potential difference between the facing surfaces of the equipment is eliminated, insulation is not required, and the connection conductors that connect the equipment are shortened.

Embodiment An embodiment of the magnetic pulse generator according to the present invention will be described below with reference to the drawings.

FIG. 1 is a vertical cross-sectional view showing the configuration of the magnetic pulse generator of the present invention, in which a short length is provided outside a saturable reactor SI2 in which windings 6 are symmetrically wound around both sides of a lower annular core 2. The cylindrical inner conductor 9 and outer conductor 10 are coaxially inserted. Between the inner conductor 9 and the outer conductor, two pairs of capacitors 3 made of ceramics are inserted in the left and right, and both poles are connected and fixed to the inner conductor 9 and the outer conductor 10.

On the other hand, the outside of the winding 6 is attached to the lower end of the inner conductor 9 by the winding 6
Are connected to each other, and are connected to the positive electrode side of the discharge part, which is not shown in detail.

Further, on the upper side of the saturable reactor SI2, the inner conductor 7, the ceramic capacitor 3, and the outer conductor 8 are coaxially arranged in this order with respect to the outer side of the saturable reactor SI1 in which the pair of windings 5 are wound around the annular iron core 1. The lower terminal of the winding 5 is connected to the upper end of the lower inner conductor 9, and the outer terminal is connected to the lower end of the upper inner conductor 7.

After the upper and left ends of the inner conductor 7 are connected to each other, they are connected to a switch on the power supply side (not shown), the outer conductor 8 and the outer conductor 10 are connected at the left and right facing portions, and the lower left and right of the outer conductor 10 are , Are connected to each other, are connected to the load side of the lower discharge unit, and are further grounded.

According to the magnetic pulse generator configured in this manner, the outer conductors 8 and 10 connecting the other sides of the capacitors 3 and 4 are on the outer side, and therefore insulation between the outer side and a mounting frame or the like (not shown) is unnecessary. Since one side is on the inside and it is placed opposite the winding ends of the saturable reactors SI1 and SI2 of the same potential, which have the same potential, no insulation is required, the external size is reduced, and the connection line is shortened.

Furthermore, the connection line can be taken out from any position of the inner conductors 7, 9 and the outer conductors 8, 10 depending on the required current-carrying capacity, and the number of parallel capacitors 3, 4 and windings 5, 6 can be easily set. Can be increased, the lengths of these connecting lines can be made uniform, the current can be made uniform, and the current is symmetrically shunted, so that the inductance becomes small.

FIG. 2 shows another embodiment in which the outer conductor 12 also serves as a container for housing the components of the magnetic pulse compression circuit, and insulating oil is injected into the inside.

In this case, not only the insulation between the windings 5 and 6 of the saturable reactors SI1 and SI2 and between the windings 5 and 6 and the iron cores 1 and 2 is strengthened, but also the outer conductor 12 serves as an outer container. Since the structure is simple, the outer shape can be further reduced.

In the above embodiment, the inner conductors 7, 9 and the outer conductors 8, 10,
Although 12 is formed into a cylindrical shape, it may be formed into a square tube shape having a square cross section, for example.

〔The invention's effect〕

As described above, according to the present invention, a plurality of cylindrical saturable reactors are sequentially arranged from the first stage to the final stage on the same axis, and the cylindrical positive electrode side conductor is loosely fitted to the outside of the saturable reactor. By arranging capacitors whose one side terminals are connected to the positive side conductors on the outer periphery of the positive side conductors, and by loosely fitting the cylindrical negative side conductors to which the other side terminals are connected outside these capacitors. , The negative-side conductor that is at ground potential is placed on the outer circumference, and the capacitor and saturable reactor are housed inside this in order of potential, eliminating the need for insulation between the facing surfaces of adjacent equipment, and between each equipment. Since the connecting conductor to be connected is shortened, it is possible to obtain a magnetic pulse generator having a small outer shape and capable of easily outputting a short pulse.

[Brief description of drawings]

FIG. 1 is a vertical sectional view showing an embodiment of a magnetic pulse generator of the present invention. FIG. 2 is a vertical sectional view showing another embodiment of the magnetic pulse generator of the present invention. FIG. 3 is a circuit diagram showing an example of this kind of magnetic pulse generator. FIG. 4 is a schematic configuration diagram showing an example of a conventional magnetic pulse generator. 1,2 …… Saturable reactor iron core 3,4 …… Capacitor 5,6 …… Saturable reactor winding 7,9 …… Inner conductor 8,10 …… Outer conductor SI1, SI2 …… Saturable reactor

Claims (1)

(57) [Claims] 1. A plurality of cylindrical saturable reactors sequentially arranged from the first stage to the final stage on the same axis, a cylindrical positive electrode side conductor loosely fitted to the outside of the saturable reactor, and the positive electrode. Magnetic pulse generation including capacitors arranged on the outer periphery of the side conductors, one side of which is connected to the positive side conductors, and a cylindrical negative side conductor, which is loosely fitted to the outsides of these capacitors and the other side of which is connected vessel.