JP2009254057A - Pulse power supply - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To enable short pulsation of output while preventing heat generation from a magnetic body on the periphery of a circuit. <P>SOLUTION: A magnetic pulse compression circuit of a plurality of stages is constituted of capacitors C1 and C2, and saturable reactors T3 and T4, and the opposite sides and the upper side of the saturable reactor T4 constituting the magnetic pulse compression circuit at the final stage are covered with an anti-earth side conductor 18 (outer conductor also serving as a container) of the capacitor C2 constituting the magnetic pulse compression circuit at the final stage. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to a pulse power supply device that generates short pulses of high voltage and large current.

  In a pulse laser such as a carbon dioxide laser or an excimer laser, it is necessary to inject electric power into the discharge portion in a short time in order to obtain instability for discharge, high peak, and high output laser light. In these power supplies, a method of discharging the charge charged in the capacitor by the switching element is adopted, but a semiconductor is desirable for the switching element in terms of life and maintenance. However, there is currently no semiconductor device having a high voltage, large current, and high speed switching function, and a relatively low frequency current pulse is shortened by a magnetic pulse compression circuit using the saturation characteristic of an iron core as shown in FIG. Applied to the discharge part.

  In FIG. 6, 1 is an AC power source, and 2 is a charger. The capacitor CO is initially charged by the output of the charger 2, and this charging voltage is discharged when the semiconductor switch SW is turned on, and the saturation of the saturable reactor T1. A discharge current I0 having a short pulse width τ0 flows to the primary side of the pulse transformer T2, and this current is boosted by the pulse transformer T2 and charged to the capacitor C1 via the secondary side. This charging voltage is magnetically compressed by the saturation of the saturable reactor T3, moves to the capacitor C2, and further compressed by the magnetic pulse by the saturation of the saturable reactor T4, resulting in a charging current Ip having a pulse width τp of the peaking capacitor CP. The discharge tube 3 is discharged by the charging voltage of CP and supplied as pulse energy. The peaking capacitor CP and the discharge tube 3 constitute a load. Saturable reactors T1, T3, and T4 are formed by winding an annular toroidal core.

  FIG. 7 is a longitudinal front view showing the configuration of the pulse power supply device disclosed in Patent Document 1 and the like. The saturable reactor T4 is configured by winding two windings 5 around the toroidal core 4, and the saturable reactor T4. The outer conductor 7 is provided in parallel or outside conductor 7 which serves as a container together with a plurality of inner conductors 6. Between these, six cylindrical ceramic capacitors C2 are arranged on the left and right, respectively, and the inner conductor 6 and the outer conductor 7 are disposed on both poles. Connected to and attached. One end of each winding 5 is connected to the lower end of the inner conductor 6, and the other end of each winding 5 is a conductor 9 inserted through the hole 7 a at the lower end of the outer conductor 7 that also serves as a container through an insulating plate 8. The conductor 9 is connected to one end of the peaking capacitor CP and one end of the discharge tube 3, and the other end of the peaking capacitor CP and the other end of the discharge tube 3 are connected to the grounded outer conductor 7.

  Further, a saturable reactor T3 in which two windings 11 are wound around the toroidal core 10 is provided on the upper side of the saturable reactor T4. Similarly, an inner conductor 12 and a ceramic capacitor C1 are provided outside the saturable reactor T3. And an outer conductor 7 also serving as a container, one end of each winding 11 is connected to the upper end of the lower inner conductor 6, and the other end of each winding 11 is connected to the lower end of the upper inner conductor 12. . The upper and left ends of the inner conductor 12 are connected by the connection line 13, and then connected to the secondary side + side of the pulse transformer T 2. The upper and left ends of the outer conductor 7 are connected to each other via the connection line 14. It is connected to the negative side of the secondary side of the pulse transformer T2. Moreover, the insulating oil 15 is accommodated in the outer conductor 7 which also serves as a container, and 15a is the oil level.

In addition, there exist patent documents 2-5 as other prior art document information relevant to invention of this application.
Japanese Patent Laid-Open No. 2-46016 Japanese Patent Laid-Open No. 3-120708 JP-A-6-5426 JP 11-121239 A JP-A-11-121240

  In the pulse power supply device described above, the characteristics of the saturable reactor required for pulse generation are as follows. When the stray inductance after saturation of the saturable reactor is large during the pulse compression operation, the pulse width τ = π√ Since L of LC becomes large, pulse width τ becomes long, and shortening of output is hindered, it is desired that inductance after saturation is small. Therefore, in the conventional pulse power supply device shown in FIG. 7 as well, an attempt is made to reduce the circuit inductance by shortening the lead wire by making the component arrangement as close as possible, but to achieve a shorter pulse. It was not obtained. Also, during the pulse compression operation, the magnetic substance and metal part around the circuit are inductively heated by the leakage flux of the saturable reactors T3 and T4 (leakage flux is generated by the current flowing through the windings 11 and 5). The saturation reactors T3 and T4 are required to have a small leakage magnetic flux, but this is also not easy to realize.

  8A and 8B are a plan view and a front view showing a state of leakage magnetic flux of the saturable reactor T4 as an example, and a magnetic flux φ is generated by the current Ip flowing through the winding 5, and accompanying this, As a result, a leakage flux 16 is generated. Leakage magnetic flux 16 becomes a large stray inductance, and shortening of the output is hindered, and if there is a magnetic body or metal part 17 around the circuit, it is inductively heated by the leakage magnetic flux 16 and generates heat.

  The present invention has been made to solve the above-described problems, and by reducing the leakage magnetic flux of the saturable reactor, the inductance after the saturable reactor is saturated is reduced to shorten the output pulse. It is an object of the present invention to provide a pulse power supply device that can prevent heat generation of a magnetic body around a circuit by reducing the leakage magnetic flux of a saturable reactor.

  According to a first aspect of the present invention, there is provided a pulse power supply device comprising a plurality of stages of magnetic pulse compression circuits each comprising a capacitor and a saturable reactor, and constituting a final stage magnetic pulse compression circuit in a pulse power supply apparatus that outputs short pulses. The saturable reactor constituting the final stage magnetic pulse compression circuit is covered with the anti-ground side conductor of the capacitor to be shielded, and the generated leakage magnetic flux is electromagnetically shielded.

  According to a second aspect of the present invention, there is provided a pulse power supply device including a plurality of stages of magnetic pulse compression circuits each including a capacitor and a saturable reactor. The saturable reactor constituting the final stage magnetic pulse compression circuit is covered with a ground-side conductor, and the generated leakage magnetic flux is electromagnetically shielded.

  The pulse power supply device according to claim 3 has a multi-stage magnetic pulse compression circuit comprising a capacitor and a saturable reactor, and in the pulse power supply device that outputs a short pulse, the saturable magnetic pulse compression circuit constituting the final stage is provided. The reactor is covered with a flat electromagnetic shielding plate, and the generated leakage magnetic flux is electromagnetically shielded.

  The pulse power supply device according to claim 4 has a multi-stage magnetic pulse compression circuit comprising a capacitor and a saturable reactor, and in the pulse power supply device that outputs a short pulse, the saturable magnetic pulse compression circuit constituting the final stage is provided. The reactor is covered with an electromagnetic shielding plate, and the generated leakage magnetic flux is electromagnetically shielded.

  As described above, according to the first aspect of the present invention, the saturable reactor constituting the final magnetic pulse compression circuit is covered by the anti-ground side conductor of the capacitor constituting the final magnetic pulse compression circuit, Due to the leakage flux of the saturable reactor, an eddy current is generated in the non-grounded conductor of the capacitor, and this eddy current generates a magnetic flux in the opposite direction to the leakage flux of the saturable reactor. The leakage flux is electromagnetically shielded, and the leakage flux is Reduced. For this reason, the stray inductance after the saturable reactor is saturated is reduced, the output can be shortened, and the heat generation of the magnetic body and the like around the circuit is prevented.

  According to the second aspect of the present invention, the saturable reactor constituting the final stage magnetic pulse compression circuit is covered with the ground-side conductor of the capacitor constituting the final stage magnetic pulse compression circuit, and the leakage flux of the saturable reactor causes the capacitor to An eddy current is generated in the ground-side conductor of this, and this eddy current generates a magnetic flux in a direction opposite to the leakage flux of the saturable reactor. The leakage flux is electromagnetically shielded and the leakage flux is reduced. For this reason, the stray inductance after the saturable reactor is saturated is reduced, the output can be shortened, and the heat generation of the magnetic body and the like around the circuit is prevented.

  According to the third aspect, the saturable reactor constituting the final stage magnetic pulse compression circuit is covered by a flat electromagnetic shielding plate, and an eddy current is generated in the electromagnetic shielding plate by the leakage magnetic flux of the saturable reactor. The eddy current generates a magnetic flux in the direction opposite to the leakage flux of the saturable reactor, the leakage flux is electromagnetically shielded, and the leakage flux is reduced. For this reason, the stray inductance after the saturable reactor is saturated is reduced, the output can be shortened, and the heat generation of the magnetic body and the like around the circuit is prevented.

  According to claim 4, the periphery of the saturable reactor constituting the final stage magnetic pulse compression circuit is covered by an electromagnetic shielding plate, and an eddy current is generated in the electromagnetic shielding plate by the leakage magnetic flux of the saturable reactor, This eddy current generates a magnetic flux in a direction opposite to the leakage flux of the saturable reactor, the leakage flux is electromagnetically shielded, and the leakage flux is reduced. For this reason, the stray inductance after the saturable reactor is saturated is reduced, the output can be shortened, and the heat generation of the magnetic body and the like around the circuit is prevented.

Best Embodiment 1
The best mode for carrying out the present invention will be described below with reference to the drawings. 1 and 2 show a longitudinal front view of a pulse power supply device according to Embodiment 1 of the present invention and a cross-sectional plan view of a final stage portion of a magnetic pulse compression circuit. In the figure, a saturable reactor T4 is connected to a toroidal core 4 by 2. One or a plurality of windings 5 are wound, and on both sides of the saturable reactor T4, an inner conductor 18 that covers both sides of the saturable reactor T4 and above (anti-grounding side) and an outer conductor 7 that also serves as a container. In the meantime, six capacitors C2 constituting the final-stage magnetic pulse compression circuit are attached with both poles connected to the inner conductor 18 and the outer conductor 7, respectively. A portion 18a of the inner conductor 18 covering the saturable reactor T4 is provided so as not to hinder the flow of the insulating oil 15 indicated by an arrow 19 in FIG. One end of each winding 5 is connected to the lower end of the inner conductor 18, and the other end of each winding 5 is a conductor 9 inserted through an insulating plate 8 through a hole 7 a at the lower end of the outer conductor 7 that also serves as a container. The conductor 9 is connected to one end of the peaking capacitor CP and one end of the discharge tube 3, the other end of the peaking capacitor CP and the other end of the discharge tube 3 are connected to the outer conductor 7, and the outer conductor 7 is grounded. .

  Further, on the upper side of the saturable reactor T4, there is provided a saturable reactor T3 which is configured by winding two or a plurality of windings 11 around the toroidal core 10 and on both sides of the saturable reactor T3, The conductor 12 and the outer conductor 7 also serving as a container are provided, and between these capacitors, six capacitors C1 are connected to the inner conductor 12 and the outer conductor 7 on both sides. One end of each winding 11 is connected to the upper end of the lower inner conductor 18, and the other end of each winding 11 is connected to the lower end of the upper inner conductor 12. The upper and left ends of the inner conductor 12 are connected via the connection line 13 and then connected to the secondary side + side of the pulse transformer T2, and the upper and left ends of the outer conductor 7 are connected to each other via the connection line 14. It is connected to the negative side of the secondary side of the pulse transformer T2. Insulating oil 15 is accommodated in the outer conductor 7 which also serves as a container, and the upper surface thereof is an oil surface 15a.

  In the first embodiment described above, the final stage magnetic pulse compression circuit can be constituted by the inner conductor made of nonmagnetic metal of the capacitor C2 constituting the final stage magnetic pulse compression circuit, that is, the anti-ground side conductor 18. A part of the magnetic flux generated by the current Ip flowing through the winding 5 is a leakage flux that covers both sides and the upper side (anti-grounding side) of the saturation reactor T4. The inner conductor in a direction orthogonal to the leakage flux The portion 18a covering the 18 saturable reactors T4 generates an eddy current, and the eddy current generates a magnetic flux in a direction opposite to the leakage magnetic flux to cancel the leakage magnetic flux. As described above, since the magnetic flux leakage is reduced by electromagnetic shielding, the stray inductance after saturation of the saturable reactor T4 is reduced, the output can be shortened, and the surrounding magnetic material is induction-heated. Is prevented.

Embodiment 2
FIG. 3 is a longitudinal sectional front view of the pulse power supply device according to Embodiment 2 of the present invention. On both sides of the saturable reactor T4, there are an inner conductor 6 covering both sides of the saturable reactor T4 and an outer conductor 20 serving as a container. In the meantime, six capacitors C2 are attached to the left and right, with both poles connected to the inner conductor 6 and the outer conductor 20, respectively. Further, the outer conductor 20 is provided with a portion 20a that covers the upper side (anti-grounding side) of the saturable reactor T4, and the portion 20a is provided so as not to disturb the flow of the insulating oil 15. One end of each winding 5 is connected to the lower end of the inner conductor 6, and the other end of each winding 5 is the conductor 9 inserted through the insulating plate 8 through the hole 20 b at the lower end of the outer conductor 20 that also serves as a container. The conductor 9 is connected to one end of the peaking capacitor CP and one end of the discharge tube 3, the other end of the peaking capacitor CP and the other end of the discharge tube 3 are connected to the outer conductor 20, and the outer conductor 20 is grounded. .

  A saturable reactor T3 is provided above the saturable reactor T4, and an inner conductor 12 and an outer conductor 20 serving as a container are provided on both sides of the saturable reactor T3. The two poles are attached to the inner conductor 12 and the outer conductor 20, respectively. One end of each winding 11 is connected to a conductor 22 inserted through an insulating plate 21 into a hole 20c provided in a portion 20a covering the saturable reactor T4 of the outer conductor 20, and the other end of each winding 11 is connected. Is connected to the lower end of the upper inner conductor 12. The upper and left ends of the inner conductor 12 are connected via the connection line 13 and then connected to the secondary side + side of the pulse transformer T2, and the upper and left ends of the outer conductor 20 are connected to each other via the connection line 14. It is connected to the negative side of the secondary side of the pulse transformer T2. Further, the insulating oil 15 is accommodated in the outer conductor 20 which also serves as a container, and the upper surface thereof becomes the oil surface 15a.

  In the second preferred embodiment described above, the outer conductor 20 of the capacitor C2 constituting the final stage magnetic pulse compression circuit, that is, the ground-side conductor, above the saturable reactor T4 constituting the final stage magnetic pulse compression circuit (on the opposite side). A leakage magnetic flux is generated by the current Ip flowing through the winding 5, and a portion 20a of the outer conductor 20 covering the saturable reactor T4 in a direction orthogonal to the leakage magnetic flux generates an eddy current. However, this eddy current generates a magnetic flux in the direction opposite to the leakage magnetic flux, and the leakage magnetic flux is canceled out. As described above, since the magnetic flux leakage is reduced by electromagnetic shielding, the stray inductance after saturation of the saturable reactor T4 is reduced, the output can be shortened, and the surrounding magnetic material is induction-heated. Is prevented. Further, since the outer conductor 20 is at ground potential, insulation is facilitated.

Embodiment 3
FIG. 4 is a longitudinal front view of the pulse power supply device according to the third embodiment. On both sides of the saturable reactor T4, an inner conductor 6 that covers both sides of the saturable reactor T4 and an outer conductor 7 that also serves as a container are provided. In the meantime, six capacitors C2 constituting the final stage magnetic pulse compression circuit are attached with both poles connected to the inner conductor 6 and the outer conductor 7, respectively. A flat metal electromagnetic shielding plate 23 is provided above the saturable reactor T4 (on the anti-grounding side) to cover the upper side. The electromagnetic shielding plate 23 is provided so as not to obstruct the flow of the insulating oil 15 indicated by an arrow 19 in FIG. One end of each winding 5 is connected to the lower end of the inner conductor 6, and the other end of each winding 5 is connected to the conductor 9 inserted through the insulating plate 8 through the hole 7 a at the lower end of the outer conductor 7 that also serves as a container. The conductor 9 is connected to one end of the peaking capacitor CP and one end of the discharge tube 3, the other end of the peaking capacitor CP and the other end of the discharge tube 3 are connected to the outer conductor 7, and the outer conductor 7 is grounded.

  A saturable reactor T3 is provided above the saturable reactor T4, and an inner conductor 12 and an outer conductor 7 serving as a container are provided on both sides of the saturable reactor T3. The two poles are attached to the inner conductor 12 and the outer conductor 7, respectively. One end of each winding 11 is connected to the upper end of the lower inner conductor 6, and the other end of each winding 11 is connected to the lower end of the upper inner conductor 12. The upper and left ends of the inner conductor 12 are connected via the connection line 13 and then connected to the secondary side + side of the pulse transformer T2, and the upper and left ends of the outer conductor 7 are connected to each other via the connection line 14. It is connected to the negative side of the secondary side of the pulse transformer T2. Insulating oil 15 is accommodated in the outer conductor 7 which also serves as a container, and the upper surface thereof is an oil surface 15a.

  In the third embodiment described above, the upper part (anti-grounding side) of the saturable reactor T4 constituting the final stage magnetic pulse compression circuit is covered by the independent electromagnetic shielding plate 23, and the current Ip flows through the winding 5. Part of the generated magnetic flux becomes leakage magnetic flux, but the electromagnetic shielding plate 23 orthogonal to the leakage magnetic flux generates eddy current, and this eddy current generates magnetic flux in the opposite direction to the leakage magnetic flux, Offset. As described above, since the magnetic flux leakage is reduced by electromagnetic shielding, the stray inductance after saturation of the saturable reactor T4 is reduced, the output can be shortened, and the surrounding magnetic material is induction-heated. Is prevented. Further, since only the electromagnetic shielding plate 23 is newly provided, the electromagnetic shielding plate 23 is in a floating state without affecting the configuration of the magnetic pulse compression circuit, and the installation becomes easy.

Embodiment 4
FIG. 5 is a longitudinal front view of the pulse power supply device according to the fourth embodiment. On both sides of the saturable reactor T4, an inner conductor 6 and an outer conductor 7 also serving as a container are provided. The capacitor C2 constituting the pulse compression circuit is attached by connecting six poles on the left and right sides to the inner conductor 6 and the outer conductor 7 respectively. And the metal electromagnetic shielding board 24 which covers the circumference | surroundings of the saturable reactor T4, ie, upper direction (anti-grounding side), both sides, and the lower side (grounding side) is provided. The electromagnetic shielding plate 24 is provided so as not to obstruct the flow of the insulating oil 15 indicated by the arrow 19 in FIG. One end of each winding 5 is connected to the lower end of the inner conductor 6, and the other end of each winding 5 is connected to the conductor 9 inserted through the insulating plate 8 through the hole 7 a at the lower end of the outer conductor 7 that also serves as a container. The conductor 9 is connected to one end of the peaking capacitor CP and one end of the discharge tube 3, the other end of the peaking capacitor CP and the other end of the discharge tube 3 are connected to the outer conductor 7, and the outer conductor 7 is grounded.

  A saturable reactor T3 is provided above the saturable reactor T4, and an inner conductor 12 and an outer conductor 7 serving as a container are provided on both sides of the saturable reactor T3. The two poles are attached to the inner conductor 12 and the outer conductor 7, respectively. One end of each winding 11 is connected to the upper end of the lower inner conductor 6, and the other end of each winding 11 is connected to the lower end of the upper inner conductor 12. The upper and left ends of the inner conductor 12 are connected via the connection line 13 and then connected to the secondary side + side of the pulse transformer T2, and the upper and left ends of the outer conductor 7 are connected to each other via the connection line 14. It is connected to the negative side of the secondary side of the pulse transformer T2. Insulating oil 15 is accommodated in the outer conductor 7 which also serves as a container, and the upper surface thereof is an oil surface 15a.

  In the fourth embodiment, the periphery of the saturable reactor T4 constituting the final stage magnetic pulse compression circuit, that is, the upper side (anti-grounding side), both sides, and the lower side are covered by independent electromagnetic shielding plates 24, A part of the magnetic flux generated by the current Ip flowing through the winding 5 becomes a leakage magnetic flux, but the electromagnetic shielding plate 24 orthogonal to the leakage magnetic flux generates an eddy current, and the eddy current causes the opposite direction of the leakage magnetic flux. Magnetic flux is generated and the leakage flux is canceled out. As described above, since the magnetic flux leakage is reduced by electromagnetic shielding, the stray inductance after saturation of the saturable reactor T4 is reduced, the output can be shortened, and the surrounding magnetic material is induction-heated. Is prevented. Moreover, since the electromagnetic shielding plate 24 covers not only the periphery of the saturable reactor T4, that is, the upper side but also the side and lower side, the leakage flux is effectively electromagnetically shielded. Furthermore, since only the electromagnetic shielding plate 24 is newly provided, the configuration of the magnetic pulse compression circuit is not affected, and the electromagnetic shielding plate 24 is in a floating state, so that installation is easy.

1 is a longitudinal front view of a pulse power supply device according to Embodiment 1 of the present invention. FIG. 3 is a cross-sectional plan view of the final stage portion of the magnetic pulse compression circuit of the pulse power supply device according to the first embodiment. It is a vertical front view of the pulse power supply device by Embodiment 2. It is a vertical front view of the pulse power supply device by Embodiment 3. It is a vertical front view of the pulse power supply device by Embodiment 4. It is a circuit diagram of the conventional pulse power supply device. It is a vertical front view of the conventional pulse power supply device shown by patent document 1 grade | etc.,. It is the top view and front view which show the state of the leakage magnetic flux of the conventional saturable reactor.

Explanation of symbols

4, 10 ... Toroidal core 5, 11 ... Winding 6, 12, 18 ... Inner conductor 7, 20 ... Outer conductor also serving as a container 16 ... Leakage magnetic flux 18a, 20a ... Parts covering the upper side of the saturable reactor 23, 24 ... Electromagnetic Shielding plate T3, T4 ... Saturable reactor C1, C2 ... Capacitor

Claims (4)

  In a pulse power supply device that has a multi-stage magnetic pulse compression circuit consisting of a capacitor and a saturable reactor, and outputs a short pulse, the final-stage magnetic pulse is applied by the anti-ground side conductor of the capacitor constituting the final-stage magnetic pulse compression circuit. A pulse power supply device characterized by covering a saturable reactor constituting a compression circuit and electromagnetically shielding the generated leakage magnetic flux.   In a pulse power supply device that has a multi-stage magnetic pulse compression circuit consisting of a capacitor and a saturable reactor, and outputs a short pulse, the final-stage magnetic pulse compression is performed by the grounding conductor of the capacitor that forms the final-stage magnetic pulse compression circuit. A pulse power supply device characterized by covering a saturable reactor constituting a circuit and electromagnetically shielding the generated leakage magnetic flux.   In a pulse power supply device that has a multi-stage magnetic pulse compression circuit consisting of a capacitor and a saturable reactor and outputs a short pulse, the saturable reactor constituting the final stage magnetic pulse compression circuit is covered with a flat electromagnetic shielding plate A pulse power supply device characterized by electromagnetically shielding the generated leakage magnetic flux.   In a pulse power supply device that has a multi-stage magnetic pulse compression circuit composed of a capacitor and a saturable reactor, and outputs a short pulse, the periphery of the saturable reactor constituting the final stage magnetic pulse compression circuit is covered with an electromagnetic shielding plate, A pulse power supply device characterized by electromagnetically shielding the generated leakage magnetic flux.

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