JPH0246016A - Magnetic pulse generator - Google Patents

Abstract

PURPOSE:To miniaturize the external appearance of a magnetic pulse generator, to shorten a lead wire and to easily obtain short pulses by successively and vertically arranging plural saturatable reactors with annular iron cores from their initial stage up to the final stage on the same axis, horizontally arranging two cylindrical conductors on the same axis and connecting a capacitor between both the conductors. CONSTITUTION:An annular inside conductor 9 and an outside conductor 10 are coaxially arranged on the outside of a saturatable reactor SI 2 constituted by winding two windings 6 around an annular iron core 2. Each two cylindrical ceramic capacitors 3 are connected respectively on the right and left sides between both the conductors 9, 10 so that both the poles are connected to the conductors 9, 10. On the upper side of the reactor SI 2, an inside conductor 7, a ceramic capacitor 3 and an outside conductor 8 are coaxially arranged on the outside of a saturatable reactor SI 1. Thereby, it is unnecessary to insulate capacitors C0, C1 from a fixing frame or the like and the positive pole side is turned to the inside and opposed to the winding terminals of the reactors SI 1, SI 2 having the same potential, so that insulation can be omitted, the external appearance can be reduced and the lead wire can be also shortened. Thus, short pulses can be easily obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Field of Industrial Application) The present invention relates to a magnetic pulse generator used in a laser power source.

(Prior art) Pulse lasers such as carbon dioxide gas (hereinafter referred to as CO2) and excimer lasers require power to be injected into the discharge part in a short period of time to avoid unstable discharge and to obtain high peak and high output laser light. There is a need. These power supplies employ a method of discharging the electric charge stored in a capacitor using a switching element, but semiconductors are preferable for the switching element in terms of longevity and maintenance. However, at present, there are no semiconductor devices with high voltage, large current, and high-speed switching functions, and current pulses of relatively low frequency can be generated as short pulses using a magnetic pulse compression circuit that uses the saturation characteristics of an iron core, as shown in Figure 3. is applied to the discharge section.

In Fig. 3, when the switch SW is closed, the charge of the capacitor C0 is transferred to the saturated first stage saturable reactor S1.
The voltage V of the capacitor C1 at this time is double, ■,; the charging voltage of the capacitor C0 L□: the inductance at saturation of the saturable reactor SII + the connection Similarly to the inductance of the lead wire, the voltage v2 of the capacitor C2 is: L2: Inductance of the saturable reactor SI2 + inductance of the connecting lead wire Therefore, in order to apply a short pulse (large W) to the load CIl, one circuit of inductance or capacitor is required. C1,
It is necessary to reduce the capacitance of capacitor C1, C.
, is inevitably determined by the input to the discharge section, so the key is to reduce the inductance.

By the way, in FIG. 4 showing an example of the arrangement and connection of parts of a conventional two-stage magnetic pulse generator, a cylindrical ceramic capacitor C0 for charging is arranged and connected in parallel.
Both sides of C2 and C2 are connected to a flat conductor 11. On the other hand, in the saturable reactors S11 and SI2, windings 5 and 6 are wound around iron cores 1 and 2 which are annularly wound multi-layered amorphous iron cores.

From the bottom, these are saturable reactor SI2, capacitor C4, saturable reactor SII, and capacitor C0.
The positive electrode side is connected from the negative electrode side of the capacitor C0 to one side of the capacitor C1 via a saturable reactor S11, and further connected to a discharging section (not shown) below via a saturable reactor SI2. The negative side is also connected to the discharge section via the other side of the capacitor C0° and the other side of the capacitor C□.

In the magnetic pulse generator configured in this way, a wide insulation gap is required between the negative pole side of the capacitor C1 and the load side of the saturable reactor SRI in order to withstand voltage, so the external size of the generator becomes large and the lead wires accordingly become long. . This becomes more noticeable as the number of stages of the magnetic compression circuit increases, or as the number of stages of voltage-resistant capacitors C, , C1 connected in series increases, and as a result, the inductance of the lead wire increases, making it impossible to obtain short pulses.

SUMMARY OF THE INVENTION An object of the present invention is to provide a magnetic pulse generator that has a small external shape and can easily generate short pulses.

[Structure of the invention]

(Means and Effects for Solving the Problems) The present invention provides multiple stages of one-stage magnetic compression circuits configured with a saturable reactor on the positive side and a capacitor connected between the saturable reactor and the negative side. In this magnetic pulse generator, a saturable reactor with a ring-shaped iron core is arranged vertically on the same axis from the first stage to the last stage, and a double cylindrical conductor is provided horizontally on the same axis as this saturable reactor. By installing the capacitor between heavy conductors, this magnetic pulse generator has a small external shape and a short lead wire, making it possible to easily obtain short pulses.

(Embodiment) An embodiment of the magnetic pulse generator of the present invention will be described below with reference to the drawings.

FIG. 1 is a longitudinal cross-sectional view showing the configuration of the magnetic pulse generator of the present invention, in which a coaxial annular inner conductor 9 is provided on the outside of a saturable reactor SI2 in which two windings 6 are wound around an annular core 2. and an outer conductor 10 are provided between which two cylindrical ceramic capacitors 3 are mounted on the left and right sides with both poles connected to the inner conductor 9 and the outer conductor 10. One end of the winding 6 is connected to the inner conductor 9, and the other ends are connected to each other and to a lower discharge section whose details are omitted.

Further, on the upper side of the saturable reactor SI2, an inner conductor 7, a ceramic capacitor 3. An outer conductor 8 is coaxially attached, and one end of the winding 5 is connected to the lower inner conductor 9, and the other end is connected to the lower end of the upper inner conductor 7.

After the upper left and right ends of the inner conductor 7 are connected, they are connected to a power source (not shown), the outer conductors 8 and 9 are connected at the left and right opposing parts, and the lower left and right ends of the outer conductor 10 are connected to the lower side. The upper left and right sides of the upper outer conductor 8 are connected and grounded.

According to the magnetic pulse generator configured in this way, the negative pole sides of the capacitors C0 and C1 are on the outside, so there is no need for insulation from the mounting frame (not shown) on the surface, and the positive pole sides are on the inside and have the same potential. Since it is placed opposite to the ends of the windings of the saturable reactors SII and SI2 that have the same potential, insulation is not required, the external size is small, and the lead wires are also short.

Furthermore, the lead wire can be taken out from any position of the conductors 7 to 1O if necessary, and can be connected to the capacitor 3゜4, the winding 5,
6 in parallel can be easily increased, the lead wires to them are uniform, and the current is not only uniform, but also symmetrically divided, so the inductance is reduced.

FIG. 2 shows another embodiment in which the outer conductor 12 also serves as a container for housing the components of the magnetic pulse compression circuit.

It contains insulating oil inside.

In this case, winding 5 of saturable reactors SII and SI2
, 6 and between the first windings 5, 6 and the iron cores 1, 2.

Although the inner conductor 9 and the outer conductor 10 are cylindrical in the above embodiment, they may also be rectangular cylinders with a square cross section, for example.

〔Effect of the invention〕

As described above, according to the magnetic pulse generator of the present invention, the magnetic pulse generator has multiple stages of one-stage magnetic compression circuits each including a saturable reactor on the positive pole side and a capacitor connected between the saturable reactor and the negative pole side. In the generator, a saturable reactor with an annular iron core is arranged vertically on the same axis from the first stage to the last stage, and a double cylindrical conductor is provided horizontally on the same axis as the saturable reactor, and between the conductors By attaching a capacitor to narrow the required insulation gap and shorten the connecting wire, it is possible to obtain a magnetic pulse generator that has a small external size and can easily obtain short pulses.

[Brief explanation of the drawing]

FIG. 1 is a longitudinal sectional view showing one embodiment of the magnetic pulse generator of the present invention, FIG. 2 is a longitudinal sectional view showing another embodiment, and FIG. 3 is a circuit showing an example of this kind of magnetic pulse generator. 4 are schematic configuration diagrams showing an example of a conventional magnetic pulse generator. 1.2...Saturable reactor iron core 4...Capacitor 6...Saturable reactor winding 9...Inner conductor 10...Outer conductor SI2...Saturable reactor

Claims (1)

[Claims] A magnetic pulse generator comprising a plurality of stages of saturable reactors provided on the positive electrode side and a capacitor provided between each power supply side of the saturable reactor and the negative electrode, wherein the saturable reactor is one stage. They are arranged vertically on the same axis from the first stage to the final stage, and a double ring-shaped conductor is provided coaxially on the outside of each saturable reactor, and the above-mentioned A magnetic pulse generator characterized by having a capacitor interposed therebetween.