JP2003324973A - Pulse power supply device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent the breakdown and the like of a semiconductor switch even if a charge unit and a magnetic compression unit which are separately constituted are unintentionally left unconnected with each other. <P>SOLUTION: In a pulse power supply device, electromagnetic energy is accumulated in a reactor L1 by on-control of the semiconductor switch SW2. A capacitor C0 is charged with the electromagnetic energy in the reactor by off- control of the semiconductor switch. Using this capacitor as a power source, a pulsed current which underwent magnetic pulse compression is generated, and the pulsed current is supplied to a load. The semiconductor switch SW2 is placed in the magnetic compression unit 2, and the charge unit 1 and the magnetic compression unit are line-connected with each other at points A and B. Thus, if the units are unintentionally left unconnected, electromagnetic energy is prevented from being accumulated in the reactor. Since the capacitor C0 is placed on the charge unit side, electromagnetic energy accumulated in the reactor can be also discharged to the capacitor C0. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pulse power supply device used for an excimer laser, an ozonizer, etc., and more particularly to a main circuit structure in the case of a plural unit structure.

[0002]

2. Description of the Related Art FIG. 3 shows an example of the main circuit configuration of a pulse power supply device of this type. The device configuration is composed of a charging unit 1, a magnetic compression unit 2 and a load unit 3.

In FIG. 3, when the semiconductor switches SW1 and SW2 such as GTO and IGBT are turned on at the same time, a current flows through the path indicated by I1, and the DC power supply voltage E and the inductance value of the reactor L1 are turned on and then turned on. Letting t be the time, a current of I = E / L × t flows, and at this time, electromagnetic energy of ½ × LI ² is stored in the reactor L1.

Next, the switches SW1 and SW2 are turned off at the same time.
Then, a current flows through the path indicated by I2, and the reactor L1
The electromagnetic energy stored in the capacitor C0 is transferred to the capacitor C0, and is charged to V = √L / √C × I, where C is the capacitor capacity of the capacitor C0 and V is the charging voltage.

Next, when SW3 is turned on, the capacitor C
The pulse current is transferred while the magnetic pulse is compressed in the order of 0 → C1 → C2, and the discharge pulse current can be supplied to the load such as the laser electrode of the load unit 3.

[0006]

The pulse power supply device is divided into the charging unit, the magnetic compression unit, and the load unit as described above due to size and weight restrictions, and is housed in one frame. There is. The main circuit configuration of each unit is as shown in FIG.

In FIG. 3, when the connection A, the connection B, or both the connections A and B are forgotten or the operation is performed, when the switches SW1 and SW2 are turned off at the same time, the reactor L
Electromagnetic energy stored in 1 loses its place, SW
1 and 2 may be damaged by voltage.

The connection between the units is made by the user, and the device may be replaced on a unit-by-unit basis depending on the service life or version upgrade. At this time, there is a problem that the device may be damaged by forgetting to connect the connections A and B.

Further, even when the connection is made normally, the switch SW2 and the capacitor C0 are housed in different units, so that the reactor circuit becomes large in the closed circuit between SW2 and C0. When SW2 is turned off, the larger the reactor component is, the larger surge voltage is generated in SW2, so that there is a problem that a snubber circuit is required in SW2 or switching loss of SW2 increases.

An object of the present invention is to provide a pulse power supply device that solves the above problems.

[0011]

According to the present invention, when connection between the charging unit and the magnetic compression unit is forgotten, the unit L separation structure in which electromagnetic energy is not stored in the reactor L1 or the stored energy of the reactor L1 can be released. It is a unit separation structure and is characterized by the following configurations.

(1) A charging unit for storing electromagnetic energy in a reactor by controlling ON of a semiconductor switch,
A magnetic compression unit that charges a capacitor with the electromagnetic energy of the reactor by off control of the semiconductor switch and generates a pulse current that is magnetically pulse-compressed using the capacitor as a power source, and a load unit to which the pulse current is supplied are provided. In the pulse power supply device, the semiconductor switch is arranged in the magnetic compression unit, and the charging unit and the magnetic compression unit have a unit-separated structure for line connection.

(2) A charging unit for storing electromagnetic energy in the reactor by controlling ON of a semiconductor switch,
A magnetic compression unit that charges a capacitor with the electromagnetic energy of the reactor by off control of the semiconductor switch and generates a pulse current that is magnetically pulse-compressed using the capacitor as a power source, and a load unit to which the pulse current is supplied are provided. In the pulse power supply device, the semiconductor switch and the capacitor are arranged in the charging unit, and a unit separation structure is provided in which the charging unit and the magnetic compression unit are line-connected.

[0014]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a unit configuration diagram showing a first embodiment of the present invention. 3 is different from FIG.
The charging unit 1 and the magnetic compression unit 2 are separated by a connection line between the reactor L1 and the semiconductor switch SW2.

That is, the switch SW2 and the diode D2, which are conventionally constructed in the charging unit 1, are arranged in the magnetic compression unit 2.

According to the above configuration, the main circuit configuration of the entire pulse power supply device does not change, but if the connections A and B are forgotten, even if the switches SW1 and SW2 are turned on,
Since the current I1 does not flow, the accumulation of magnetic energy in the reactor L1 does not occur, and the O of the switches SW1 and SW2 is reduced.
It is possible to prevent the switches SW1 and SW2 from being damaged without generating a high surge voltage in the FF.

FIG. 2 is a unit configuration diagram showing a second embodiment of the present invention. In the figure, between the charging unit 1 and the magnetic compression unit 2, the capacitor C0 is connected to the charging unit 1.
It is arranged on the side and is separated by the connection line between the capacitor C0 and the switch SW3.

That is, the capacitor C0, which was conventionally constructed in the magnetic compression unit 2, is arranged in the charging unit 2.

According to this configuration, the main circuit configuration does not change when viewed as a whole of the pulse power supply device, but if the connection of the connections A and B is forgotten, the discharge pulse is applied to the load unit 3 even if the switch SW3 is turned on. Although the current cannot be supplied, when the switches SW1 and SW2 are turned off, the current flows in the path of I2, so that the capacitor C0 is charged, and overvoltage is not generated in the switches SW1 and SW2, and the damage is caused. Can be prevented.

[0020]

As described above, according to the present invention, the switches SW1 and SW2 can be prevented from being damaged even if the main circuit connection between the charging unit and the magnetic compression unit is forgotten.

Further, since the switch SW2 and the C0 capacitor are formed in the same unit, it is possible to form a closed circuit in which the reactor component is reduced between SW2 and C0, and the snubber circuit of SW2 becomes unnecessary, The switching loss of SW2 can be reduced.

[Brief description of drawings]

FIG. 1 is a unit configuration diagram showing a first embodiment of the present invention.

FIG. 2 is a unit configuration diagram showing a second embodiment of the present invention.

FIG. 3 is a unit circuit configuration diagram of a conventional pulse power supply device.

[Explanation of symbols]

1 ... Charging unit 2 ... Magnetic compression unit 3 ... Load unit L1 ... Reactor SW1, SW2, SW3 ... Semiconductor switch C0 ... Capacitor

Claims (2)

[Claims] 1. A charging unit for storing electromagnetic energy in a reactor by turning on a semiconductor switch, and a pulse obtained by magnetically compressing a capacitor by charging the capacitor with the electromagnetic energy of the reactor by turning off the semiconductor switch. In a pulse power supply device comprising a magnetic compression unit that generates a current and a load unit to which the pulse current is supplied, the semiconductor switch is arranged in the magnetic compression unit,
A pulse power supply device having an inter-unit separation structure in which the charging unit and the magnetic compression unit are line-connected. 2. A charging unit for storing electromagnetic energy in a reactor by controlling ON of a semiconductor switch, and a pulse obtained by charging a capacitor with electromagnetic energy of the reactor by controlling OFF of the semiconductor switch and compressing a magnetic pulse using the capacitor as a power source. In a pulse power supply device including a magnetic compression unit that generates a current and a load unit to which the pulse current is supplied, the semiconductor switch and the capacitor are arranged in the charging unit, and a line is provided between the charging unit and the magnetic compression unit. A pulse power supply device having a separated structure between units to be connected.