JPH1189256A - Stator of ultrasonic motor and manufacture of stator of ultrasonic motor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a stator of an ultrasonic motor excellent in insulation and durability wherein electric short-circuit is not generated. SOLUTION: The outer diameter Do2 of a piezoelectric element 10 is smaller than the outer diameter Do1 of a metal elastic body 8c and the outer diameter Do3 of a flexible substrate 11. The inner diameter Di2 of the piezoelectric element 10 is greater than the inner diameter Di1 of the metal elastic body 8c and the inner diameter Di3 of the flexible substrate 11. Adhesive agent 15 is spread on the upper surface of the piezoelectric element 10 and the lower surface of the metal elastic body 8c. Adhesive agent 16 of the same material as the adhesive agent 15 is spread on the lower surface of the piezoelectric element 10 and the upper surface of the flexible substrate 11, and compression bonding is performed. After the adhesive agents are cured, adhesive agents 17, 18 are spread on the peripheral part from the flexible substrate 11 to the elastic body 8c.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an ultrasonic motor and a method for manufacturing the same.

[0002]

2. Description of the Related Art Generally, an ultrasonic motor has a structure in which a rotor is pressed against a metal elastic body of a stator with respect to a stator composed of a piezoelectric body and a metal elastic body. The piezoelectric body is composed of a piezoelectric element and a flexible substrate on which a conductive wire electrically connected to an electrode formed on the lower surface of the piezoelectric element is formed. When a high-frequency drive voltage is applied from the flexible substrate to the electrode of the piezoelectric element, the piezoelectric element vibrates. Then, the vibration is transmitted to the metal elastic body. After the vibration is amplified and expanded by the metal elastic body, a traveling wave or a standing wave is generated on the surface of the metal elastic body. The rotor pressed against the surface of the metal elastic body (that is, the surface of the stator) is driven by friction by the traveling wave or the standing wave to rotate.

In order to efficiently transmit the vibration generated by the piezoelectric element to the metal elastic body, the piezoelectric body is bonded to the metal elastic body with an adhesive. More specifically, as shown in FIG. 7, the stator 30 has a piezoelectric element 32 bonded to the lower surface of the annular metal elastic body 31 with an adhesive, and a flexible substrate (FPC) on the lower surface of the piezoelectric element 32. 33 is adhered by an adhesive.

[0004]

Since the ultrasonic motor is driven to rotate by friction between the rotor and the stator as described above, the lining material adhered to the rotor is worn to generate abrasion powder. Since the lining material contains conductive graphite, there is a problem if the abrasion powder adheres to the piezoelectric element 32. More specifically, the abrasion powder adheres to the inner peripheral surface and the outer peripheral surface of the piezoelectric element 32, and short-circuits the conductive wires formed on the piezoelectric element 32 and the FPC 33 via the abrasion powder. In particular, the adhesive between the metal elastic body 31 and the piezoelectric element 32, and the piezoelectric element 32 and the flexible substrate (FPC) 3
If the adhesive between them is exposed, it is air-degraded and the adhesive layer becomes thin. As a result, the conductive wires of the piezoelectric element 32 and the flexible substrate (FPC) 33 were exposed and short-circuit was easily caused.
In addition, the same short-circuit problem was also caused by iron powder, aluminum powder and dew condensation generated and remaining in the motor.

Further, there has been a problem that the abrasion powder, iron powder and the like directly adhere to the flexible substrate 33 and short-circuit the conductive wires on the substrate. Therefore, Patent No. 2537
No. 947 proposes a plate-like piezoelectric element to which electrodes are attached and a surface of an adhesive portion between the piezoelectric element and a metal elastic body coated with a flexible moisture-resistant resin.
In this case, the resin can prevent short circuit.

However, in this coating structure, there is a problem that since the coating structure is simply applied to the surface, the adhesiveness is poor and the coating falls off. In addition, no insulation measures are taken for a flexible substrate having a lead wire for supplying drive power to the electrodes of the piezoelectric element.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to provide a stator for an ultrasonic motor which does not generate an electric short circuit and has excellent insulation and durability.

[0008]

In order to achieve the above object, according to the present invention, there is provided an elastic body which propagates vibration to a moving body and moves the moving body, and applies vibration to the elastic body. A piezoelectric element to be propagated, and a flexible substrate on which a lead wire for supplying drive power to electrodes formed on the piezoelectric element is provided. The piezoelectric element is laminated between the elastic body and the flexible substrate, and In the stator of the ultrasonic motor bonded with an adhesive, an adhesive layer was formed between the elastic body and the flexible substrate.

According to a second aspect of the present invention, in the ultrasonic motor stator according to the first aspect, the piezoelectric element laminated between the elastic body and the flexible substrate has at least exposed surfaces on both sides thereof. One of the exposed surfaces was formed so as to be located inside the exposed surface of at least one of the elastic body and the flexible substrate.

According to a third aspect of the present invention, in the ultrasonic motor stator according to the second aspect, the elastic body, the piezoelectric element, and the flexible substrate are annular bodies, and the outer diameter of the piezoelectric element is the elastic body. And the length is shorter than the outer diameter of the flexible substrate.

According to a fourth aspect of the present invention, in the ultrasonic motor stator according to the second aspect, the elastic body, the piezoelectric element, and the flexible substrate are annular bodies, and the inner diameter of the piezoelectric element is the elastic body and the flexible substrate. It was formed to be longer than the inner diameter of the flexible substrate.

According to a fifth aspect of the present invention, there is provided an elastic body for transmitting vibration to a moving body and moving the moving body, a piezoelectric element for transmitting vibration to the elastic body, and an electrode formed on the piezoelectric element. A method of manufacturing a stator of an ultrasonic motor including a flexible substrate on which a conductive wire for supplying drive power is formed, a coating step of applying an adhesive to the elastic body, the piezoelectric element, and the flexible substrate; A pressure bonding step of laminating and pressing the piezoelectric element between a flexible substrate and bonding them together with an adhesive, and the elastic body, the piezoelectric element and the flexible substrate bonded to each other on a side portion from the flexible substrate to the elastic body. And a second application step of applying an adhesive.

According to a sixth aspect of the present invention, in the method for manufacturing a stator according to the fifth aspect, in the pressing step, the stator in which the piezoelectric element is laminated between the elastic body and the flexible substrate is formed into a mold. It is to be pressed and bonded together.

Therefore, according to the first aspect of the present invention,
Since the piezoelectric element is laminated between the elastic body and the flexible substrate, if an adhesive layer is formed between the elastic body and the flexible substrate, the piezoelectric element will be completely covered by the adhesive layer and be flexible. Between the substrate and the piezoelectric element,
Also, the space between the piezoelectric element and the elastic body is covered.

According to the second aspect of the present invention, in the piezoelectric element laminated between the elastic body and the flexible substrate, at least one of the exposed surfaces on both sides thereof is exposed to the elastic body and the flexible substrate. Because it is located inside at least one of the exposed surfaces, if an adhesive layer is formed between the elastic body and the flexible substrate, the piezoelectric element is completely covered by the adhesive layer, and The space formed between the flexible substrate and the exposed surface of the piezoelectric element is filled with the adhesive layer. At this time, the adhesive is
Since it is interposed in the space formed between the elastic body, the flexible substrate, and the exposed surface of the piezoelectric element, it is difficult to drop.

According to the third aspect of the present invention, the outer diameter of the piezoelectric element laminated between the elastic body and the flexible substrate is shorter than the outer diameter of the elastic body and the flexible substrate.
If an adhesive layer is formed between the elastic body and the flexible substrate, the piezoelectric element is completely covered by the adhesive layer, and the space formed between the elastic body, the flexible substrate, and the outer periphery of the piezoelectric element is also reduced. It is buried from the adhesive layer. At this time, since the adhesive is interposed in the space formed between the elastic body, the flexible substrate, and the outer periphery of the piezoelectric element, it is difficult for the adhesive to drop.

According to the present invention, the inner diameter of the piezoelectric element laminated between the elastic body and the flexible substrate is longer than the inner diameter of the elastic body and the flexible substrate.
If an adhesive layer is formed between the elastic body and the flexible substrate, the piezoelectric element is completely covered by the adhesive layer, and the space formed between the elastic body, the flexible substrate, and the inner periphery of the piezoelectric element is also reduced. It is buried from the adhesive layer. At this time, since the adhesive is interposed in the space formed between the elastic body, the flexible substrate, and the inner periphery of the piezoelectric element, it is difficult for the adhesive to drop.

According to the fifth aspect of the present invention, the elastic body,
The piezoelectric element and the flexible substrate are each coated with an adhesive in an application step, and the piezoelectric elements are laminated and pressed between the elastic body and the flexible substrate in a pressing step, and are adhered to each other with an adhesive. In the elastic body, the piezoelectric element, and the flexible substrate bonded to each other in the process, an adhesive is applied to a side portion from the flexible substrate to the elastic body. Therefore, between the elastic body and the piezoelectric element, between the piezoelectric element and the flexible board, and between the elastic body and the flexible board, the adhesive layer is more uniformly coated, and the elastic body, the piezoelectric element and the flexible board are covered. Are integrally laminated and bonded with an adhesive.

According to the sixth aspect of the present invention, the stator in which the piezoelectric element is laminated between the elastic body and the flexible substrate is placed in a mold, and is integrally pressed and adhered. The piezoelectric element and the flexible substrate can be firmly and integrally adhered in a short time without displacement.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment in which the present invention is embodied in an ultrasonic motor will be described below with reference to the drawings. FIG. 1 is a sectional view of an ultrasonic motor according to the present invention.

The motor housing 1 includes a base 2 and a cover 3. A mounting portion 2a is formed at the center of the base 2 to protrude, and an insertion hole 2b is formed at the center of the mounting portion 2a. A ball bearing 4 is provided in the insertion hole 2b, and the bearing 4 rotatably supports a rotating shaft 5 inserted into the case 1 through the insertion hole 2b. A ball bearing 6 is provided in an overhanging recess 3 a formed in the upper center of the cover 3, and the bearing 6 rotatably supports the base end of the rotating shaft 5. A stator 7 is fixed to the upper surface of the mounting portion 2a of the base 2.

The stator 7 includes a stator body 8 and a piezoelectric body 9.
It has. Stator body 8 is formed of a sintered metal. The stator main body 8 includes an annular fixing portion 8a fixed to the mounting portion 2a, a vibration damping plate portion 8b extending from the outer periphery of the fixing portion 8a, and a circle around the vibration damping plate portion 8b. An annular metal elastic body 8c is provided.

A piezoelectric body 9 is bonded to the lower surface of the metal elastic body 8c with an adhesive. The piezoelectric body 9 includes a piezoelectric element 10 and a flexible substrate 11. Piezoelectric element 1
Reference numeral 0 denotes an annular shape having a rectangular shape in longitudinal section, and the outer diameter Do2 of the annular piezoelectric element 10 is smaller than the outer diameter D of the lower surface of the metal elastic body 8c.
The inner diameter Di2 of the piezoelectric element 10 is shorter than the inner diameter Di1 of the piezoelectric element 10 and longer than the inner diameter Di1 of the lower surface of the metal elastic body 8c. The piezoelectric element 10 has the metal elastic body 8 on its upper surface.
An electrode 10a that is electrically connected to c, and an electrode 10b that is electrically connected to a conductive wire formed on the flexible substrate 11 are formed on the lower surface.

The flexible substrate 11 is a thin substrate formed in an annular shape. The outer diameter Do3 of the annular substrate 11 is longer than the outer diameter Do2 of the piezoelectric element 10, and the inner diameter D of the substrate 11 is
i3 is formed so as to be shorter than the outer diameter Di2 of the piezoelectric element 10. Further, the flexible substrate 11 has a conductive wire for applying a high-frequency voltage to the electrode 10 b of the piezoelectric element 10.

FIG. 2 is an explanatory sectional view for explaining the bonding structure between the metal elastic body 8c and the piezoelectric body 9. As shown in FIG. 3, the metal elastic body 8c and the central axis L1,
The upper surface of the piezoelectric element 10 and the lower surface of the metal elastic body 8c are fixed with an epoxy or polyimide adhesive 15 in a state where L2 is matched. The lower surface of the piezoelectric element 10 and the upper surface of the flexible substrate 11 are fixed with an epoxy-based or polyimide-based adhesive 16 in a state where the center axes L2 and L3 of the piezoelectric element 10 and the flexible substrate 11 are aligned.
Insulating materials 17 and 18 as adhesive layers made of an epoxy-based or polyimide-based adhesive are also applied to the outer peripheral surface 10c and the inner peripheral surface 10d as exposed surfaces of the piezoelectric element 10.

In this embodiment, the outer diameter Do of the piezoelectric element 10 is
2 is the outer diameter D of the metal elastic body 8c and the flexible substrate 11
o1, Do3, the metal elastic body 8c
An insulating material 17 is applied so as to fill a space formed between the substrate and the flexible substrate 11. Similarly, since the inner diameter Di2 of the piezoelectric element 10 is longer than the inner diameters Di1 and Di3 of the metal elastic body 8c and the flexible substrate 11, the space formed between the metal elastic body 8c and the flexible substrate 11 is filled. An insulating material 18 is applied.

This bonding method is performed as follows. First, an adhesive 15 for bonding the metal elastic body 8c and the piezoelectric element 10 is applied to at least one of the upper surface of the piezoelectric element 10 and the lower surface of the metal elastic body 8c. Similarly, an adhesive 16 of the same material as the adhesive 15 for bonding the piezoelectric element 10 and the flexible substrate 11 is applied to at least one of the lower surface of the piezoelectric element 10 and the upper surface of the flexible substrate 11.

When the application of the adhesives 15 and 16 is completed,
A molded product (stator 7) is placed in a mold formed by the lower mold 21 and the side mold 22 shown in FIG. The process proceeds to the pressure bonding step with the molded product (stator 7) placed in the mold. In the crimping step, the molded product is pressed from above using the upper mold 23. After the adhesives 15 and 16 have hardened, the mold is removed, and the outer peripheral surface 10c and the inner peripheral surface 10d of the piezoelectric element 10 are covered with insulating materials 17 and 18 made of an epoxy-based or polyimide-based adhesive.
Then, the process is completed.

The adhesives 15, 16 are formed between the metal elastic body 8c and the flexible substrate 11 when the amount of the adhesives 15, 16 to be applied is adjusted and pressed by a mold. Adhesive 1 that protrudes into the space
At 5 and 16, the outer peripheral surface 10c and the inner peripheral surface 1 of the piezoelectric element 10
The insulating materials 17 and 18 formed in 0d may be used. By doing so, the outer peripheral surface 10c and the inner peripheral surface 1 of the piezoelectric element 10 are formed.
The operation of applying the insulating materials 17 and 18 to 0d can be omitted.

The stator 7 thus configured is mounted on the mounting portion 2a of the base 2 and fixed with screws 25. A rotor 27 as a moving body made of a circular aluminum is disposed above the stator 7. Rotor 27
Is an annular contact portion 27 whose outer peripheral portion projects vertically.
a is formed. A lining material 28 is formed on the lower surface of the contact portion 27a. The rotary shaft 5 penetrates the rotor 27 and is supported by the key 5a so as to be non-rotatable with respect to the rotary shaft 5 and movable in the axial direction. Further, the rotor 27 is pressed by the pressing member 29 provided on the upper side.
The contact portion 27a (the lining material 28) formed on the stator 7 constantly presses the upper surface of the metal elastic body 8c of the stator 7.

The ultrasonic motor thus configured causes the rotor 27 to rotate by a known mechanism by vibrating the piezoelectric element 10, and the rotation is output from the rotating shaft 5.

Next, the features of the ultrasonic motor configured as described above will be described. (1) In the present embodiment, the outer diameter Do2 of the piezoelectric element 10 is equal to the outer diameter Do1, of the metal elastic body 8c and the flexible substrate 11.
Since it is shorter than Do3, the insulating material 17 is applied so as to fill a space formed between the metal elastic body 8c and the flexible substrate 11. Similarly, the piezoelectric element 10
Of the metal elastic body 8c and the flexible substrate 1
Since the inner diameter is longer than the inner diameters Di1 and Di3, the insulating material 18 is applied so as to fill a space formed between the metal elastic body 8c and the flexible substrate 11. Therefore, the insulating materials 17 and 18 applied to the outer and inner peripheral surfaces 10 c and 10 d of the piezoelectric element 10 are interposed in the space formed between the metal elastic body 8 c and the flexible substrate 11. It becomes difficult to fall off from the inner peripheral surfaces 10c and 10d. As a result, conductive substances such as graphite, iron powder, aluminum powder, and dew condensation in a high-humidity atmosphere are generated inside and outside the piezoelectric element 10 due to vibration friction generated during the operation of the ultrasonic motor. It becomes impossible to adhere to the peripheral surfaces 10c and 10d. That is, the insulation of the ultrasonic motor can be improved. (2) In the present embodiment, the metal elastic body 8c and the piezoelectric element 10
Is applied to at least one of the upper surface of the piezoelectric element 10 and the lower surface of the metal elastic body 8c. Similarly, the adhesive 15 for adhering the piezoelectric element 10 and the flexible substrate 11 is used. Adhesive 1 of the same material
6 is applied to at least one of the lower surface of the piezoelectric element 10 and the upper surface of the flexible substrate 11, and then the lower metal mold 21 and the side metal mold 22 are stacked so that the metal elastic body 8c, the piezoelectric element 10 and the flexible substrate 11 are laminated. After being pressed into the mold formed by the steps (1) and (2), the mold is removed, and insulating materials 17 and 18 made of an epoxy-based or polyimide-based adhesive are applied to the outer peripheral surface 10c and the inner peripheral surface 10d of the piezoelectric element 10. . Therefore, between the metal elastic body 8c and the piezoelectric element 10, the piezoelectric element 1
0 and the flexible substrate 11, and the metal elastic body 8
The space between c and the flexible substrate 11 is evenly covered with an adhesive layer, and the metal elastic body 8c, the piezoelectric element 10 and the flexible substrate 11 can be integrally laminated and bonded with an adhesive. (3) In this embodiment, the amounts of the adhesives 15 and 16 applied to the lower surface of the metal elastic body 8c, the upper surface of the flexible substrate 11, and the upper and lower surfaces of the piezoelectric element 10 are adjusted.
The adhesives 15 and 16 can be made to protrude into a space formed between the metal elastic body 8c and the flexible substrate 11 when pressed by a mold. Therefore, the insulating material 1 is provided on the outer peripheral surface 10c and the inner peripheral surface 10d of the piezoelectric element 10.
The operation of applying 7, 18 can be omitted. (4) In this embodiment, the metal elastic body 8c to which the adhesives 15 and 16 are applied, the piezoelectric element 10 and the flexible substrate 11
Are placed in a mold so as to be laminated, and integrally pressed. Accordingly, the metal elastic body 8c, the piezoelectric element 10 and the flexible substrate 11 can be firmly and integrally bonded in a short time without any displacement.

The embodiment of the present invention is not limited to the above-described embodiment, and may be made as follows without departing from the spirit of the present invention. ○ Insulating material 1 as shown by a two-dot chain line in FIGS.
7 and 18 are the metal elastic body 8c and the flexible substrate 1
1 may be applied to the peripheral surface.

In the above embodiment, the flexible substrate 1
1, the inner diameter Di1 of the metal elastic body 8c, the outer diameter Do3 of the flexible substrate 11, and the outer diameter D of the metal elastic body 8c.
o1 and the outer diameter Do2 of the piezoelectric element 10
Is the outer diameter Do of the metal elastic body 8c and the flexible substrate 11.
1, Do3, and the inner diameter Di2 of the piezoelectric element 10 is smaller than the inner diameters Di1, D of the metal elastic body 8c and the flexible substrate 11.
As shown in FIG. 5, the inner diameter Di2 of the piezoelectric element 10 and the inner diameter Di of the metal elastic body 8c were increased.
1. The outer diameter Do2 of the piezoelectric element 10 and the outer diameter Do1 of the metal elastic body 8c are the same, and the outer diameter Do3 of the flexible substrate 11 is the outer diameter D of the metal elastic body 8c and the piezoelectric element 10.
o1, Do2, longer than the inner diameter D of the flexible substrate 11
i3 is the inner diameter Di1, of the metal elastic body 8c and the piezoelectric element 10
It may be implemented shorter than Di2. In this case, substantially the same effects as in the above embodiment can be obtained.

As shown in FIG. 6, the inner diameter Di2 of the piezoelectric element 10 and the inner diameter Di3 of the flexible substrate 11, the outer diameter Do2 of the piezoelectric element 10 and the outer diameter
o3 and the outer diameter Do of the metal elastic body 8c.
1 is the outer diameter Do of the flexible substrate 11 and the piezoelectric element 10
3, the inner diameter Di1 of the metal elastic body 8c is longer than the inner diameters Di3, D3 of the flexible substrate 11 and the piezoelectric element 10.
It may be implemented shorter than i2. In this case, the same effect as in the above embodiment can be obtained.

In the above embodiment, the ultrasonic motor to be embodied is not particularly limited, but may be applied to, for example, an ultrasonic motor which is a drive source of an actuator for pressing a caliper pad of a disk brake device for a vehicle. . In this case, the same effect as in the above embodiment can be obtained.

The stator of the present invention may be applied to an annular ultrasonic motor or a linear ultrasonic motor.

[0038]

As described in detail above, claims 1, 2, 3
According to the inventions described in (4) and (4), no electric short circuit occurs,
It is possible to provide an ultrasonic motor stator having high insulation properties and high durability.

According to the fifth and sixth aspects of the present invention, it is possible to provide a simple and inexpensive manufacturing method for manufacturing a stator of an ultrasonic motor having no electrical short circuit, high insulation and high durability. .

[Brief description of the drawings]

FIG. 1 is a sectional view of an ultrasonic motor according to the present invention.

FIG. 2 is a sectional view of a main part of a stator of the ultrasonic motor.

FIG. 3 is an exploded perspective view of a stator of the ultrasonic motor.

FIG. 4 is a sectional view of a crimping step for forming a stator of the ultrasonic motor.

FIG. 5 is a sectional view of a main part of a stator of another example of an ultrasonic motor.

FIG. 6 is a sectional view of a main part of a stator of another example of an ultrasonic motor.

FIG. 7 is a sectional view of a main part of a stator of a conventional ultrasonic motor.

[Explanation of symbols]

7 ... stator, 8c ... metal elastic body, 10 ... piezoelectric element, 1
DESCRIPTION OF SYMBOLS 1 ... Flexible board, 15, 16, 17, 18 ... Adhesive, 21, 22 ... Die, 27 ... Rotor.

Claims (6)

[Claims] An elastic body (8c) for propagating vibration to a moving body (27) and moving the moving body (27);
(8c) a piezoelectric element (10) for propagating vibration, and a flexible substrate (11) on which a lead wire for supplying drive power to electrodes (10b) formed on the piezoelectric element (10) is provided. A stator for an ultrasonic motor in which the piezoelectric element (10) is laminated between the elastic body (8c) and the flexible substrate (11) and bonded to each other with an adhesive (15, 16); 8c) A stator for an ultrasonic motor, wherein an adhesive layer (17, 18) is formed between the flexible substrate (11) and the flexible substrate (11). 2. The ultrasonic motor stator according to claim 1, wherein the piezoelectric element (10) laminated between the elastic body (8c) and the flexible substrate (11) comprises:
At least one of the exposed surfaces (10c, 10d) on both sides of the elastic body (10c, 10d) is the elastic body (8).
c) a stator of the ultrasonic motor formed so as to be located inside an exposed surface of at least one of the flexible substrate and the flexible substrate; 3. The ultrasonic motor stator according to claim 2, wherein the elastic body (8c), the piezoelectric element (10) and the flexible substrate (11) are annular bodies, and the outside of the piezoelectric element (10). The diameter (Do2) is the outer diameter (Do1, Do3) of the elastic body (8c) and the flexible substrate (11).
Ultrasonic motor stator formed to be shorter. 4. The ultrasonic motor stator according to claim 2, wherein the elastic body (8c), the piezoelectric element (10), and the flexible substrate (11) are annular bodies, and an inner diameter of the piezoelectric element (10). (Di2) is the inner diameter (Di1, Di3) of the elastic body (8c) and the flexible substrate (11).
Ultrasonic motor stator formed to be longer. 5. An elastic body (8c) for propagating vibration to a moving body (27) and moving the moving body (27), and the elastic body
(8c) A flexible substrate (1) on which a piezoelectric element (10) for transmitting vibration and a conductive wire for supplying drive power to electrodes formed on the piezoelectric element (10) are formed.
(1) a method of manufacturing a stator for an ultrasonic motor, comprising: applying an adhesive to the elastic body (8c), the piezoelectric element (10) and the flexible substrate (11); A pressure-bonding step of laminating and pressing the piezoelectric element (10) between the flexible substrate (11) and bonding them with adhesives (15, 16); and the elastic body (8c) and the piezoelectric element bonded to each other. (1
0) and a second application step of applying an adhesive (17, 18) to a side portion from the flexible substrate (11) to the elastic body (8c) in the flexible substrate (11). 6. The stator manufacturing method according to claim 5, wherein, in the pressing step, the piezoelectric element (10) is laminated between the elastic body (8c) and the flexible substrate (11). ) Is placed in a mold and pressed together to bond.