JPH1163361A - 排気配管装置 - Google Patents
排気配管装置Info
- Publication number
- JPH1163361A JPH1163361A JP9238850A JP23885097A JPH1163361A JP H1163361 A JPH1163361 A JP H1163361A JP 9238850 A JP9238850 A JP 9238850A JP 23885097 A JP23885097 A JP 23885097A JP H1163361 A JPH1163361 A JP H1163361A
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- exhaust pipe
- reaction
- heater
- branch pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011144 upstream manufacturing Methods 0.000 claims abstract description 8
- 238000010438 heat treatment Methods 0.000 claims abstract description 3
- 238000005259 measurement Methods 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 17
- 239000012495 reaction gas Substances 0.000 description 9
- 235000012431 wafers Nutrition 0.000 description 9
- 239000006227 byproduct Substances 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 229910001873 dinitrogen Inorganic materials 0.000 description 5
- 238000007711 solidification Methods 0.000 description 5
- 230000008023 solidification Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L53/00—Heating of pipes or pipe systems; Cooling of pipes or pipe systems
- F16L53/30—Heating of pipes or pipe systems
- F16L53/35—Ohmic-resistance heating
- F16L53/38—Ohmic-resistance heating using elongate electric heating elements, e.g. wires or ribbons
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Pipe Accessories (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9238850A JPH1163361A (ja) | 1997-08-20 | 1997-08-20 | 排気配管装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9238850A JPH1163361A (ja) | 1997-08-20 | 1997-08-20 | 排気配管装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1163361A true JPH1163361A (ja) | 1999-03-05 |
| JPH1163361A5 JPH1163361A5 (enExample) | 2005-06-02 |
Family
ID=17036199
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9238850A Pending JPH1163361A (ja) | 1997-08-20 | 1997-08-20 | 排気配管装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1163361A (enExample) |
-
1997
- 1997-08-20 JP JP9238850A patent/JPH1163361A/ja active Pending
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20040806 |
|
| A621 | Written request for application examination |
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|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20070227 |
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| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20070313 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070509 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20080408 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080521 |
|
| A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20080609 |
|
| A912 | Re-examination (zenchi) completed and case transferred to appeal board |
Free format text: JAPANESE INTERMEDIATE CODE: A912 Effective date: 20080725 |