JPH11512885A5 - - Google Patents

Info

Publication number
JPH11512885A5
JPH11512885A5 JP1997514314A JP51431497A JPH11512885A5 JP H11512885 A5 JPH11512885 A5 JP H11512885A5 JP 1997514314 A JP1997514314 A JP 1997514314A JP 51431497 A JP51431497 A JP 51431497A JP H11512885 A5 JPH11512885 A5 JP H11512885A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997514314A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11512885A (ja
JP3961025B2 (ja
Filing date
Publication date
Priority claimed from US08/538,475 external-priority patent/US5638251A/en
Application filed filed Critical
Publication of JPH11512885A publication Critical patent/JPH11512885A/ja
Publication of JPH11512885A5 publication Critical patent/JPH11512885A5/ja
Application granted granted Critical
Publication of JP3961025B2 publication Critical patent/JP3961025B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP51431497A 1995-10-03 1996-09-25 ダイヤモンド状ナノコンポジット物質を使用する容量性の薄いフィルム Expired - Fee Related JP3961025B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/538,475 US5638251A (en) 1995-10-03 1995-10-03 Capacitive thin films using diamond-like nanocomposite materials
US08/538,475 1995-10-03
PCT/US1996/015368 WO1997013263A1 (en) 1995-10-03 1996-09-25 Capacitive thin films using diamond-like nanocomposite materials

Publications (3)

Publication Number Publication Date
JPH11512885A JPH11512885A (ja) 1999-11-02
JPH11512885A5 true JPH11512885A5 (enExample) 2004-09-30
JP3961025B2 JP3961025B2 (ja) 2007-08-15

Family

ID=24147084

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51431497A Expired - Fee Related JP3961025B2 (ja) 1995-10-03 1996-09-25 ダイヤモンド状ナノコンポジット物質を使用する容量性の薄いフィルム

Country Status (12)

Country Link
US (1) US5638251A (enExample)
EP (1) EP1008157B1 (enExample)
JP (1) JP3961025B2 (enExample)
KR (1) KR100449603B1 (enExample)
CN (1) CN1111882C (enExample)
AT (1) ATE293835T1 (enExample)
AU (1) AU700713B2 (enExample)
CA (1) CA2233631A1 (enExample)
DE (1) DE69634641T2 (enExample)
MX (1) MX9802581A (enExample)
TW (1) TW355803B (enExample)
WO (1) WO1997013263A1 (enExample)

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CN110407299A (zh) * 2018-04-28 2019-11-05 深圳先进技术研究院 一种多孔硼氮镍共掺杂金刚石电极及其制备方法和应用
US11639543B2 (en) 2019-05-22 2023-05-02 Thin Film Service, Inc. Tetrahedral amorphous hydrogenated carbon and amorphous siloxane diamond-like nanocomposite
KR102860619B1 (ko) * 2021-01-26 2025-09-16 삼성전자주식회사 박막 적층 구조체, 이를 포함하는 집적 소자, 및 상기 박막 적층체의 제조방법
US11961896B2 (en) * 2021-09-14 2024-04-16 Honeywell Federal Manufacturing & Technologies, Llc Diamond-like carbon coating for passive and active electronics
CN115612989B (zh) * 2022-09-27 2024-09-17 苏州辉钻纳米新材料有限公司 含硅含氧的高阶静电消散薄膜复合新材料及其制备方法
CN116162981A (zh) * 2022-12-20 2023-05-26 贵州大学 一种dlc薄膜摩擦诱导石墨化相变抑制方法

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