ATE293835T1 - Dünnschichtkondensator mit diamantähnlichen nanoverbundstoffmaterialen - Google Patents

Dünnschichtkondensator mit diamantähnlichen nanoverbundstoffmaterialen

Info

Publication number
ATE293835T1
ATE293835T1 AT96937640T AT96937640T ATE293835T1 AT E293835 T1 ATE293835 T1 AT E293835T1 AT 96937640 T AT96937640 T AT 96937640T AT 96937640 T AT96937640 T AT 96937640T AT E293835 T1 ATE293835 T1 AT E293835T1
Authority
AT
Austria
Prior art keywords
diamond
thin film
film capacitor
nanocomposite materials
carbon
Prior art date
Application number
AT96937640T
Other languages
English (en)
Inventor
Arvind Goel
Donald J Bray
Steven C Martin
Keith A Blakely
Original Assignee
Bekaert Sa Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bekaert Sa Nv filed Critical Bekaert Sa Nv
Application granted granted Critical
Publication of ATE293835T1 publication Critical patent/ATE293835T1/de

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/002Details
    • H01G4/018Dielectrics
    • H01G4/06Solid dielectrics
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/002Details
    • H01G4/018Dielectrics
    • H01G4/06Solid dielectrics
    • H01G4/08Inorganic dielectrics
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S427/00Coating processes
    • Y10S427/103Diamond-like carbon coating, i.e. DLC
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/43Electric condenser making
    • Y10T29/435Solid dielectric type

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Inorganic Insulating Materials (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Ceramic Capacitors (AREA)
  • Non-Insulated Conductors (AREA)
  • Semiconductor Integrated Circuits (AREA)
AT96937640T 1995-10-03 1996-09-25 Dünnschichtkondensator mit diamantähnlichen nanoverbundstoffmaterialen ATE293835T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/538,475 US5638251A (en) 1995-10-03 1995-10-03 Capacitive thin films using diamond-like nanocomposite materials
PCT/US1996/015368 WO1997013263A1 (en) 1995-10-03 1996-09-25 Capacitive thin films using diamond-like nanocomposite materials

Publications (1)

Publication Number Publication Date
ATE293835T1 true ATE293835T1 (de) 2005-05-15

Family

ID=24147084

Family Applications (1)

Application Number Title Priority Date Filing Date
AT96937640T ATE293835T1 (de) 1995-10-03 1996-09-25 Dünnschichtkondensator mit diamantähnlichen nanoverbundstoffmaterialen

Country Status (12)

Country Link
US (1) US5638251A (de)
EP (1) EP1008157B1 (de)
JP (1) JP3961025B2 (de)
KR (1) KR100449603B1 (de)
CN (1) CN1111882C (de)
AT (1) ATE293835T1 (de)
AU (1) AU700713B2 (de)
CA (1) CA2233631A1 (de)
DE (1) DE69634641T2 (de)
MX (1) MX9802581A (de)
TW (1) TW355803B (de)
WO (1) WO1997013263A1 (de)

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Also Published As

Publication number Publication date
CN1111882C (zh) 2003-06-18
WO1997013263A1 (en) 1997-04-10
CA2233631A1 (en) 1997-04-10
MX9802581A (es) 1998-11-30
CN1202978A (zh) 1998-12-23
JPH11512885A (ja) 1999-11-02
DE69634641T2 (de) 2006-03-02
EP1008157A4 (de) 2001-02-07
AU700713B2 (en) 1999-01-14
KR100449603B1 (ko) 2004-11-16
EP1008157A1 (de) 2000-06-14
DE69634641D1 (de) 2005-05-25
KR19990063955A (ko) 1999-07-26
EP1008157B1 (de) 2005-04-20
TW355803B (en) 1999-04-11
AU7513296A (en) 1997-04-28
JP3961025B2 (ja) 2007-08-15
US5638251A (en) 1997-06-10

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