JP3961025B2 - ダイヤモンド状ナノコンポジット物質を使用する容量性の薄いフィルム - Google Patents

ダイヤモンド状ナノコンポジット物質を使用する容量性の薄いフィルム Download PDF

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Publication number
JP3961025B2
JP3961025B2 JP51431497A JP51431497A JP3961025B2 JP 3961025 B2 JP3961025 B2 JP 3961025B2 JP 51431497 A JP51431497 A JP 51431497A JP 51431497 A JP51431497 A JP 51431497A JP 3961025 B2 JP3961025 B2 JP 3961025B2
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Japan
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network
diamond
carbon
dopant
silicon
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Expired - Fee Related
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JP51431497A
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English (en)
Japanese (ja)
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JPH11512885A5 (enExample
JPH11512885A (ja
Inventor
ゴール，アービンド
ブレイ，ドナルド・ジェイ
マーティン，スティーブン・シー
ブレイクリー，キース・エイ
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Bekaert NV SA
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Bekaert NV SA
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Publication of JPH11512885A5 publication Critical patent/JPH11512885A5/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • H01G4/08—Inorganic dielectrics
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S427/00—Coating processes
    • Y10S427/103—Diamond-like carbon coating, i.e. DLC
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Inorganic Insulating Materials (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Ceramic Capacitors (AREA)
  • Non-Insulated Conductors (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP51431497A 1995-10-03 1996-09-25 ダイヤモンド状ナノコンポジット物質を使用する容量性の薄いフィルム Expired - Fee Related JP3961025B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/538,475 US5638251A (en) 1995-10-03 1995-10-03 Capacitive thin films using diamond-like nanocomposite materials
US08/538,475 1995-10-03
PCT/US1996/015368 WO1997013263A1 (en) 1995-10-03 1996-09-25 Capacitive thin films using diamond-like nanocomposite materials

Publications (3)

Publication Number Publication Date
JPH11512885A JPH11512885A (ja) 1999-11-02
JPH11512885A5 JPH11512885A5 (enExample) 2004-09-30
JP3961025B2 true JP3961025B2 (ja) 2007-08-15

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP51431497A Expired - Fee Related JP3961025B2 (ja) 1995-10-03 1996-09-25 ダイヤモンド状ナノコンポジット物質を使用する容量性の薄いフィルム

Country Status (12)

Country Link
US (1) US5638251A (enExample)
EP (1) EP1008157B1 (enExample)
JP (1) JP3961025B2 (enExample)
KR (1) KR100449603B1 (enExample)
CN (1) CN1111882C (enExample)
AT (1) ATE293835T1 (enExample)
AU (1) AU700713B2 (enExample)
CA (1) CA2233631A1 (enExample)
DE (1) DE69634641T2 (enExample)
MX (1) MX9802581A (enExample)
TW (1) TW355803B (enExample)
WO (1) WO1997013263A1 (enExample)

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Also Published As

Publication number Publication date
CN1111882C (zh) 2003-06-18
WO1997013263A1 (en) 1997-04-10
ATE293835T1 (de) 2005-05-15
CA2233631A1 (en) 1997-04-10
MX9802581A (es) 1998-11-30
CN1202978A (zh) 1998-12-23
JPH11512885A (ja) 1999-11-02
DE69634641T2 (de) 2006-03-02
EP1008157A4 (en) 2001-02-07
AU700713B2 (en) 1999-01-14
KR100449603B1 (ko) 2004-11-16
EP1008157A1 (en) 2000-06-14
DE69634641D1 (de) 2005-05-25
KR19990063955A (ko) 1999-07-26
EP1008157B1 (en) 2005-04-20
TW355803B (en) 1999-04-11
AU7513296A (en) 1997-04-28
US5638251A (en) 1997-06-10

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