JPH11512877A - 化学機械研磨のためのキャップされた中間層誘電体 - Google Patents

化学機械研磨のためのキャップされた中間層誘電体

Info

Publication number
JPH11512877A
JPH11512877A JP9513527A JP51352797A JPH11512877A JP H11512877 A JPH11512877 A JP H11512877A JP 9513527 A JP9513527 A JP 9513527A JP 51352797 A JP51352797 A JP 51352797A JP H11512877 A JPH11512877 A JP H11512877A
Authority
JP
Japan
Prior art keywords
layer
oxide layer
forming
insulating layer
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9513527A
Other languages
English (en)
Japanese (ja)
Inventor
バイ，ペン
カディアン，ケネス・シイ
チェン，リー−イェ
プリンス，マシュー・ジェイ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Intel Corp
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Publication of JPH11512877A publication Critical patent/JPH11512877A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
    • H01L21/44—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/38 - H01L21/428
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H01L21/76822—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc.
    • H01L21/76828—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc. thermal treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP9513527A 1995-09-29 1996-09-23 化学機械研磨のためのキャップされた中間層誘電体 Pending JPH11512877A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US53600795A 1995-09-29 1995-09-29
US08/536,007 1995-09-29
PCT/US1996/015201 WO1997012393A1 (en) 1995-09-29 1996-09-23 Capped interlayer dielectric for chemical mechanical polishing

Publications (1)

Publication Number Publication Date
JPH11512877A true JPH11512877A (ja) 1999-11-02

Family

ID=24136721

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9513527A Pending JPH11512877A (ja) 1995-09-29 1996-09-23 化学機械研磨のためのキャップされた中間層誘電体

Country Status (8)

Country Link
EP (1) EP1008175A4 (ko)
JP (1) JPH11512877A (ko)
KR (1) KR19990063743A (ko)
CN (1) CN1203697A (ko)
AU (1) AU7164596A (ko)
IL (1) IL123749A0 (ko)
TW (1) TW304297B (ko)
WO (1) WO1997012393A1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7316972B2 (en) 2002-08-30 2008-01-08 Matsushita Electric Industrial Co., Ltd. Contact hole formation method

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6153935A (en) * 1999-09-30 2000-11-28 International Business Machines Corporation Dual etch stop/diffusion barrier for damascene interconnects
US7521364B2 (en) * 2005-12-02 2009-04-21 Macronix Internation Co., Ltd. Surface topology improvement method for plug surface areas
US8067762B2 (en) 2006-11-16 2011-11-29 Macronix International Co., Ltd. Resistance random access memory structure for enhanced retention
DE102007063271B4 (de) 2007-12-31 2009-11-26 Advanced Micro Devices, Inc., Sunnyvale Verfahren zur Herstellung eines dielektrischen Zwischenschichtmaterials mit unterschiedlichen Abtragsraten während eines CMP-Prozesses

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01293632A (ja) * 1988-05-23 1989-11-27 Nec Corp 半導体装置
JPH0680638B2 (ja) * 1990-07-05 1994-10-12 株式会社東芝 半導体装置の製造方法
EP0469214A1 (en) * 1990-07-31 1992-02-05 International Business Machines Corporation Method of forming stacked conductive and/or resistive polysilicon lands in multilevel semiconductor chips and structures resulting therefrom
US5164340A (en) * 1991-06-24 1992-11-17 Sgs-Thomson Microelectronics, Inc Structure and method for contacts in cmos devices
KR940009599B1 (ko) * 1991-10-30 1994-10-15 삼성전자 주식회사 반도체 장치의 층간 절연막 형성방법
US5244837A (en) * 1993-03-19 1993-09-14 Micron Semiconductor, Inc. Semiconductor electrical interconnection methods
US5409858A (en) * 1993-08-06 1995-04-25 Micron Semiconductor, Inc. Method for optimizing thermal budgets in fabricating semiconductors
US5340370A (en) * 1993-11-03 1994-08-23 Intel Corporation Slurries for chemical mechanical polishing

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7316972B2 (en) 2002-08-30 2008-01-08 Matsushita Electric Industrial Co., Ltd. Contact hole formation method

Also Published As

Publication number Publication date
WO1997012393A1 (en) 1997-04-03
EP1008175A4 (en) 2000-10-18
CN1203697A (zh) 1998-12-30
EP1008175A1 (en) 2000-06-14
KR19990063743A (ko) 1999-07-26
AU7164596A (en) 1997-04-17
IL123749A0 (en) 1998-10-30
TW304297B (ko) 1997-05-01

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