JPH11509688A5 - - Google Patents

Info

Publication number
JPH11509688A5
JPH11509688A5 JP1997506684A JP50668497A JPH11509688A5 JP H11509688 A5 JPH11509688 A5 JP H11509688A5 JP 1997506684 A JP1997506684 A JP 1997506684A JP 50668497 A JP50668497 A JP 50668497A JP H11509688 A5 JPH11509688 A5 JP H11509688A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997506684A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11509688A (ja
JP4008494B2 (ja
Filing date
Publication date
Priority claimed from US08/503,677 external-priority patent/US5674123A/en
Application filed filed Critical
Publication of JPH11509688A publication Critical patent/JPH11509688A/ja
Publication of JPH11509688A5 publication Critical patent/JPH11509688A5/ja
Application granted granted Critical
Publication of JP4008494B2 publication Critical patent/JP4008494B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP50668497A 1995-07-18 1996-06-26 集積回路ウエハ移送アセンブリ用のドッキング・環境パージ装置 Expired - Fee Related JP4008494B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/503,677 1995-07-18
US08/503,677 US5674123A (en) 1995-07-18 1995-07-18 Docking and environmental purging system for integrated circuit wafer transport assemblies
PCT/US1996/010930 WO1997004479A1 (en) 1995-07-18 1996-06-26 Docking and environmental purging system for integrated circuit wafer transport assemblies

Publications (3)

Publication Number Publication Date
JPH11509688A JPH11509688A (ja) 1999-08-24
JPH11509688A5 true JPH11509688A5 (enExample) 2004-08-12
JP4008494B2 JP4008494B2 (ja) 2007-11-14

Family

ID=24003066

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50668497A Expired - Fee Related JP4008494B2 (ja) 1995-07-18 1996-06-26 集積回路ウエハ移送アセンブリ用のドッキング・環境パージ装置

Country Status (8)

Country Link
US (3) US5674123A (enExample)
EP (1) EP0839385A1 (enExample)
JP (1) JP4008494B2 (enExample)
KR (1) KR100281942B1 (enExample)
CN (1) CN1191039A (enExample)
AU (1) AU6396296A (enExample)
TW (1) TW304902B (enExample)
WO (1) WO1997004479A1 (enExample)

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US5674123A (en) * 1995-07-18 1997-10-07 Semifab Docking and environmental purging system for integrated circuit wafer transport assemblies
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DE19805624A1 (de) * 1998-02-12 1999-09-23 Acr Automation In Cleanroom Schleuse zum Öffnen und Schließen von Reinraumtransport-Boxen
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NL1009327C2 (nl) * 1998-06-05 1999-12-10 Asm Int Werkwijze en inrichting voor het overbrengen van wafers.
US6261044B1 (en) * 1998-08-06 2001-07-17 Asyst Technologies, Inc. Pod to port door retention and evacuation system
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US6660055B2 (en) * 2001-10-25 2003-12-09 Asm Technology Singapore Pte Ltd. Compartment for maintaining a clean production environment
US6976340B2 (en) * 2002-12-05 2005-12-20 Venturedyne Ltd. Universal access port
US7578647B2 (en) 2003-01-27 2009-08-25 Applied Materials, Inc. Load port configurations for small lot size substrate carriers
US7611318B2 (en) 2003-01-27 2009-11-03 Applied Materials, Inc. Overhead transfer flange and support for suspending a substrate carrier
US7203563B2 (en) * 2004-04-08 2007-04-10 Taiwan Semiconductor Manufacturing Company, Ltd. Automatic N2 purge system for 300 mm full automation fab
FR2874744B1 (fr) * 2004-08-30 2006-11-24 Cit Alcatel Interface sous vide entre une boite de mini-environnement et un equipement
JP2008546191A (ja) * 2005-06-03 2008-12-18 シーエスジー ソーラー アクチェンゲゼルシャフト 薄膜シリコン・オン・グラスの水素化装置およびその方法
US11024527B2 (en) 2005-06-18 2021-06-01 Frederick A. Flitsch Methods and apparatus for novel fabricators with Cleanspace
US10627809B2 (en) 2005-06-18 2020-04-21 Frederick A. Flitsch Multilevel fabricators
US9339900B2 (en) 2005-08-18 2016-05-17 Futrfab, Inc. Apparatus to support a cleanspace fabricator
US9457442B2 (en) * 2005-06-18 2016-10-04 Futrfab, Inc. Method and apparatus to support process tool modules in a cleanspace fabricator
US9059227B2 (en) 2005-06-18 2015-06-16 Futrfab, Inc. Methods and apparatus for vertically orienting substrate processing tools in a clean space
US9159592B2 (en) 2005-06-18 2015-10-13 Futrfab, Inc. Method and apparatus for an automated tool handling system for a multilevel cleanspace fabricator
US7513822B2 (en) 2005-06-18 2009-04-07 Flitsch Frederick A Method and apparatus for a cleanspace fabricator
US10651063B2 (en) 2005-06-18 2020-05-12 Frederick A. Flitsch Methods of prototyping and manufacturing with cleanspace fabricators
WO2007025199A2 (en) * 2005-08-26 2007-03-01 Flitsch Frederick A Multi-level cleanspace fabricator elevator system
US20070140822A1 (en) * 2005-12-16 2007-06-21 Applied Materials, Inc. Methods and apparatus for opening and closing substrate carriers
WO2007078406A2 (en) * 2005-12-16 2007-07-12 Applied Materials, Inc. Methods and apparatus for opening and closing substrate carriers
US8668146B1 (en) 2006-05-25 2014-03-11 Sean I. Mcghie Rewards program with payment artifact permitting conversion/transfer of non-negotiable credits to entity independent funds
US8201734B1 (en) 2006-05-25 2012-06-19 Mcghie Sean I Conversion of non-negotiable credits associated with an entity into entity independent negotiable funds
US8267315B1 (en) 2006-05-25 2012-09-18 Mcghie Sean I Exchange of non-negotiable credits for entity independent funds
US8376224B2 (en) 2006-05-25 2013-02-19 Sean I. Mcghie Self-service stations for utilizing non-negotiable credits earned from a game of chance
US8342399B1 (en) 2006-05-25 2013-01-01 Mcghie Sean I Conversion of credits to funds
US8162209B2 (en) 2006-05-25 2012-04-24 Buchheit Brian K Storefront purchases utilizing non-negotiable credits earned from a game of chance
US7703673B2 (en) 2006-05-25 2010-04-27 Buchheit Brian K Web based conversion of non-negotiable credits associated with an entity to entity independent negotiable funds
IL180875A0 (en) * 2007-01-22 2007-07-04 Ricor Ltd Gas purge method and apparatus
CN101510498B (zh) * 2008-02-15 2010-09-01 北京北方微电子基地设备工艺研究中心有限责任公司 减少半导体基片颗粒污染的方法及系统
JP5564271B2 (ja) * 2010-01-20 2014-07-30 株式会社日立ハイテクノロジーズ 真空処理装置
US20130265720A1 (en) * 2012-04-09 2013-10-10 Tyco Electronics Raychem Bvba Heat dissipation device for telecommunications equipment
US20140096483A1 (en) * 2012-10-04 2014-04-10 Brookhaven Science Associates, Llc Transfer Chamber for Air-Sensitive Sample Processing
CN103943533B (zh) * 2013-01-23 2017-12-29 上海微电子装备（集团）股份有限公司 密封对接装置
US10446428B2 (en) * 2017-03-14 2019-10-15 Applied Materials, Inc. Load port operation in electronic device manufacturing apparatus, systems, and methods
US10854490B2 (en) * 2018-08-14 2020-12-01 Taiwan Semiconductor Manufacturing Co., Ltd. Wafer carrier handling apparatus and method thereof
WO2025097058A1 (en) * 2023-11-03 2025-05-08 Entegris, Inc. Methods and apparatus for purifying substrate containers

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US4863561A (en) * 1986-12-09 1989-09-05 Texas Instruments Incorporated Method and apparatus for cleaning integrated circuit wafers
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US5354198A (en) * 1988-12-05 1994-10-11 Cyrco Twenty-Two, Inc. Movable cantilevered purge system
US5219464A (en) * 1990-10-09 1993-06-15 Tokyo Electron Limited Clean air apparatus
US5032545A (en) * 1990-10-30 1991-07-16 Micron Technology, Inc. Process for preventing a native oxide from forming on the surface of a semiconductor material and integrated circuit capacitors produced thereby
US5145303A (en) * 1991-02-28 1992-09-08 Mcnc Method and apparatus for reducing particulate contamination in processing chambers
JPH05299312A (ja) * 1992-04-21 1993-11-12 Sumitomo Electric Ind Ltd 半導体製造設備
KR970006728B1 (ko) * 1992-08-31 1997-04-29 마쯔시다 덴기 산교 가부시끼가이샤 환경제어장치
JP3275390B2 (ja) * 1992-10-06 2002-04-15 神鋼電機株式会社 可搬式密閉コンテナ流通式の自動搬送システム
US5674123A (en) * 1995-07-18 1997-10-07 Semifab Docking and environmental purging system for integrated circuit wafer transport assemblies

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