JPH11506696A - バルク支持体を有する微小加工多孔質膜 - Google Patents
バルク支持体を有する微小加工多孔質膜Info
- Publication number
- JPH11506696A JPH11506696A JP9500657A JP50065797A JPH11506696A JP H11506696 A JPH11506696 A JP H11506696A JP 9500657 A JP9500657 A JP 9500657A JP 50065797 A JP50065797 A JP 50065797A JP H11506696 A JPH11506696 A JP H11506696A
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- filter
- capsule
- region
- etched
- bulk substrate
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
- A61K9/00—Medicinal preparations characterised by special physical form
- A61K9/0087—Galenical forms not covered by A61K9/02 - A61K9/7023
- A61K9/0097—Micromachined devices; Microelectromechanical systems [MEMS]; Devices obtained by lithographic treatment of silicon; Devices comprising chips
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
- A61K9/00—Medicinal preparations characterised by special physical form
- A61K9/0012—Galenical forms characterised by the site of application
- A61K9/0019—Injectable compositions; Intramuscular, intravenous, arterial, subcutaneous administration; Compositions to be administered through the skin in an invasive manner
- A61K9/0024—Solid, semi-solid or solidifying implants, which are implanted or injected in body tissue
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D39/00—Filtering material for liquid or gaseous fluids
- B01D39/14—Other self-supporting filtering material ; Other filtering material
- B01D39/16—Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres
- B01D39/1692—Other shaped material, e.g. perforated or porous sheets
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D39/00—Filtering material for liquid or gaseous fluids
- B01D39/14—Other self-supporting filtering material ; Other filtering material
- B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0002—Organic membrane manufacture
- B01D67/0023—Organic membrane manufacture by inducing porosity into non porous precursor membranes
- B01D67/003—Organic membrane manufacture by inducing porosity into non porous precursor membranes by selective elimination of components, e.g. by leaching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0002—Organic membrane manufacture
- B01D67/0023—Organic membrane manufacture by inducing porosity into non porous precursor membranes
- B01D67/0032—Organic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
- B01D67/0034—Organic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods by micromachining techniques, e.g. using masking and etching steps, photolithography
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0039—Inorganic membrane manufacture
- B01D67/0053—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
- B01D67/0058—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by selective elimination of components, e.g. by leaching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0039—Inorganic membrane manufacture
- B01D67/0053—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
- B01D67/006—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
- B01D67/0062—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods by micromachining techniques, e.g. using masking and etching steps, photolithography
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0039—Inorganic membrane manufacture
- B01D67/0072—Inorganic membrane manufacture by deposition from the gaseous phase, e.g. sputtering, CVD, PVD
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/02—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor characterised by their properties
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/12—Composite membranes; Ultra-thin membranes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/12—Composite membranes; Ultra-thin membranes
- B01D69/1216—Three or more layers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/0213—Silicon
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J13/00—Colloid chemistry, e.g. the production of colloidal materials or their solutions, not otherwise provided for; Making microcapsules or microballoons
- B01J13/02—Making microcapsules or microballoons
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0067—Mechanical properties
- B81B3/007—For controlling stiffness, e.g. ribs
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00087—Holes
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/4582—Porous coatings, e.g. coating containing porous fillers
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0015—Production of aperture devices, microporous systems or stamps
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/04—Characteristic thickness
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/10—Microfilters, e.g. for gas or fluids
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0128—Processes for removing material
- B81C2201/013—Etching
- B81C2201/0135—Controlling etch progression
- B81C2201/014—Controlling etch progression by depositing an etch stop layer, e.g. silicon nitride, silicon oxide, metal
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Dermatology (AREA)
- Medicinal Chemistry (AREA)
- Pharmacology & Pharmacy (AREA)
- Epidemiology (AREA)
- Mechanical Engineering (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Optics & Photonics (AREA)
- Dispersion Chemistry (AREA)
- Geology (AREA)
- General Chemical & Material Sciences (AREA)
- Neurosurgery (AREA)
- Metallurgy (AREA)
- Computer Hardware Design (AREA)
- Biomedical Technology (AREA)
- Structural Engineering (AREA)
- Analytical Chemistry (AREA)
- Micromachines (AREA)
- Medicines Containing Material From Animals Or Micro-Organisms (AREA)
- Medicinal Preparation (AREA)
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1.a.第1所定エッチング工程を使用してエッチングできるバルク基板を準備 する段階、 b.第2所定エッチング工程を使用してエッチングでき、第1所定エッチング 工程を使用してエッチングできない薄い皮膜エッチング停止部を前記バルク基板 の第1表面の第1領域に形成する段階、 c.前記第1表面の第2領域にフィルター構造体の少なくとも一部を形成する 段階、前記第2領域は、前記第2所定エッチング工程によってエッチングできな い第1領域の少なくとも一部分及び前記フィルター構造体を含み、 d.前記バルク基板の第2表面で始まる第1所定エッチング工程を使用して、 薄い皮膜エッチング停止部の下の、前記バルク基板の一部分をエッチングする段 階、 e.前記第2所定エッチング工程を使用して前記薄い皮膜エッチング停止部野 少なくとも一部分をエッチングする段階、を有するバルク支持体を有する多孔質 膜の形成方法。 2.前記フィルター構造体は、少なくとも一部が前記第1エッチング工程によっ てエッチングできる、請求の範囲1に記載の方法。 3.段階1.cは前記第2所定エッチング工程によってエッチングできる材料で 充たされた気孔を形成することを含む、請求の範囲1に記載の方法。 4.第1エッチング工程は基板を異方性的にエッチングする、請求の範囲1に記 載の方法。 5.前記基板の前記第1表面の前記第1領域はフィルター補強リブを形成するた めのトレンチを有する、請求の範囲1に記載の方法。 6.段階1.cはラップ仕上げ及び研磨を含み、前記第1表面の前記第1領域は 凹部の底を含む、請求の範囲1に記載の方法。 7.a.第1所定エッチング工程を使用してエッチングできるバルク基板を準備 する段階、 b.前記所定エッチング工程を使用してエッチングできない層を第1表面に形 成することを含み、前記バルク基板の第1表面の領域にフィルター構造体の 少なくとも一部を形成する段階、前記層の厚さは前記フィルター構造体の気孔の 長さの少なくとも一部を定め、 c.前記バルク基板の第2表面で始まる所定エッチング工程を使用して、前記 第1表面の前記領域の下の、前記バルク基板の一部分をエッチングする段階、を 有するバルク支持体を有する多孔質膜の形成方法。 8.第1エッチング工程は基板を異方性的にエッチングする、請求の範囲7に記 載の方法。 9.前記基板の前記第1表面の前記第1領域はフィルター補強リブを形成するた めのトレンチを有する、請求の範囲7に記載の方法。 10.段階7.bはラップ仕上げ及び研磨を含み、前記第1表面の前記第1領域は 凹部の底を含む、請求の範囲7に記載の方法。 11.封じ込めカプセルであって、 a.少なくとも1つのバルク基板、該少なくとも1つのバルク基板は境界を有 するキャビティを構成し、前記境界の第1部分は前記少なくとも1つのバルク基 板の1つの中実部分の内壁を構成し、 b.前記境界の第2部分に、一定な気孔を有する少なくとも1つの多孔質領域 を有し、前記封じ込めカプセルの外部と内部との間に選択的な分子バリヤーをな す膜、を有する封じ込めカプセル。 12.前記多孔質領域についたの構造支持体を与えるリブ部材を更に有する、請求 の範囲11に記載の封じ込めカプセル。 13.内部的及び外部的にさらされた材料は生物学的適合請求の範囲である、請求 の範囲11に記載の封じ込めカプセル。 14.前記多孔質領域は微小加工薄い皮膜膜フィルターからなる、請求の範囲11 に記載の封じ込めカプセル。 15.前記封じ込めカプセルは密封材によって結合された多部品を含む、請求の範 囲11に記載の封じ込めカプセル。 16.前記密封材は生物学的適合性ポリマー材料である、請求の範囲15に記載の 封じ込めカプセル。 17.気孔の孔径は、前記カプセルの内側に作られる生物学的活性分子の自由拡散 を許すが、前記カプセルの外側に位置した免疫分子の通過を阻止する、請求の範 囲11に記載の封じ込めカプセル。 18.気孔の孔径は約10オングストローム乃至約10000オングストロームで ある、請求の範囲17に記載の封じ込めカプセル。 19.気孔の孔径は約20オングストローム乃至約500オングストロームである 、請求の範囲18に記載の封じ込めカプセル。 20.前記カプセルの内部は、ドナー細胞が付着する第1有機層で処理され、前記 カプセルの外部は、ホスト細胞が付着しない第2有機層で処理されている、請求 の範囲17に記載の封じ込めカプセル。 21.ホスト有機体に生物学的活性分子を作る方法であって、 a.バルク部分及び気孔を有する生物学的適合性封じ込めカプセル、気孔は生 物学的に望ましい速度で,封じ込めカプセルの内側の細胞、組織、又は薬物組成 物によって作られる生物学的活性分子の拡散を許すが、前記封じ込めカプセルの 外側に位置した免疫分子の通過を阻止し、 b.前記生物学的活性分子を作ることのできる細胞、組織、又は薬物組成物を 前記封じ込めカプセルに充填し、 c.前記カプセル内に収容された前記細胞、組織、又は薬物組成物を前記ホス ト有機体に投与する、上記方法。 22.前記有機体は動物である、請求の範囲21に記載の方法。 23.前記動物は哺乳動物である、請求の範囲22に記載の方法。 24.前記哺乳動物は人間である、請求の範囲23に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/482,237 | 1995-06-07 | ||
US08/482,237 US5770076A (en) | 1994-03-07 | 1995-06-07 | Micromachined capsules having porous membranes and bulk supports |
PCT/US1996/007417 WO1996040420A1 (en) | 1995-06-07 | 1996-05-21 | Micromachined porous membranes with bulksupport |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006323954A Division JP2007091752A (ja) | 1995-06-07 | 2006-11-30 | ホスト有機体に生物学的活性分子を作る方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH11506696A true JPH11506696A (ja) | 1999-06-15 |
Family
ID=23915281
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9500657A Pending JPH11506696A (ja) | 1995-06-07 | 1996-05-21 | バルク支持体を有する微小加工多孔質膜 |
JP2006323954A Pending JP2007091752A (ja) | 1995-06-07 | 2006-11-30 | ホスト有機体に生物学的活性分子を作る方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006323954A Pending JP2007091752A (ja) | 1995-06-07 | 2006-11-30 | ホスト有機体に生物学的活性分子を作る方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US5770076A (ja) |
EP (1) | EP0831963B1 (ja) |
JP (2) | JPH11506696A (ja) |
AU (1) | AU5870796A (ja) |
WO (1) | WO1996040420A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8603076B2 (en) | 2001-09-14 | 2013-12-10 | Delpor, Inc. | Microfabricated nanopore device for sustained release of therapeutic agent |
Families Citing this family (66)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6007676A (en) * | 1992-09-29 | 1999-12-28 | Boehringer Ingelheim International Gmbh | Atomizing nozzle and filter and spray generating device |
US5985328A (en) * | 1994-03-07 | 1999-11-16 | Regents Of The University Of California | Micromachined porous membranes with bulk support |
US6107102A (en) * | 1995-06-07 | 2000-08-22 | Regents Of The University Of California | Therapeutic microdevices and methods of making and using same |
US7070590B1 (en) | 1996-07-02 | 2006-07-04 | Massachusetts Institute Of Technology | Microchip drug delivery devices |
US5797898A (en) * | 1996-07-02 | 1998-08-25 | Massachusetts Institute Of Technology | Microchip drug delivery devices |
US5938923A (en) * | 1997-04-15 | 1999-08-17 | The Regents Of The University Of California | Microfabricated filter and capsule using a substrate sandwich |
DE19742439C1 (de) * | 1997-09-26 | 1998-10-22 | Boehringer Ingelheim Int | Mikrostrukturiertes Filter |
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US9005650B2 (en) | 2001-09-14 | 2015-04-14 | Delpor, Inc. | Microfabricated nanopore device for sustained release of therapeutic agent |
US9066875B2 (en) | 2001-09-14 | 2015-06-30 | Delpor, Inc. | Microfabricated nanopore device for sustained release of therapeutic agent |
US9066876B2 (en) | 2001-09-14 | 2015-06-30 | Delpor, Inc. | Microfabricated nanopore device for sustained release of therapeutic agent |
US9271926B2 (en) | 2001-09-14 | 2016-03-01 | Delpor, Inc. | Microfabricated nanopore device for sustained release of therapeutic agent |
US9433574B2 (en) | 2001-09-14 | 2016-09-06 | Delpor, Inc. | Microfabricated nanopore device for sustained release of therapeutic agent |
US9433573B2 (en) | 2001-09-14 | 2016-09-06 | Delpor, Inc. | Microfabricated nanopore device for sustained release of therapeutic agent |
Also Published As
Publication number | Publication date |
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EP0831963B1 (en) | 2003-10-22 |
EP0831963A4 (en) | 2000-01-05 |
JP2007091752A (ja) | 2007-04-12 |
EP0831963A1 (en) | 1998-04-01 |
US5770076A (en) | 1998-06-23 |
AU5870796A (en) | 1996-12-30 |
WO1996040420A1 (en) | 1996-12-19 |
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