JPH1144810A5 - - Google Patents

Info

Publication number
JPH1144810A5
JPH1144810A5 JP1997217103A JP21710397A JPH1144810A5 JP H1144810 A5 JPH1144810 A5 JP H1144810A5 JP 1997217103 A JP1997217103 A JP 1997217103A JP 21710397 A JP21710397 A JP 21710397A JP H1144810 A5 JPH1144810 A5 JP H1144810A5
Authority
JP
Japan
Prior art keywords
layer
grating
diffraction grating
diffraction
optical element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997217103A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1144810A (ja
JP3495884B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP21710397A priority Critical patent/JP3495884B2/ja
Priority claimed from JP21710397A external-priority patent/JP3495884B2/ja
Priority to US09/121,685 priority patent/US6480332B1/en
Priority to DE69818581T priority patent/DE69818581T2/de
Priority to EP98114002A priority patent/EP0895099B1/en
Publication of JPH1144810A publication Critical patent/JPH1144810A/ja
Application granted granted Critical
Publication of JP3495884B2 publication Critical patent/JP3495884B2/ja
Publication of JPH1144810A5 publication Critical patent/JPH1144810A5/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP21710397A 1997-07-28 1997-07-28 回折光学素子及びそれを用いた光学系 Expired - Fee Related JP3495884B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP21710397A JP3495884B2 (ja) 1997-07-28 1997-07-28 回折光学素子及びそれを用いた光学系
US09/121,685 US6480332B1 (en) 1997-07-28 1998-07-24 Diffractive optical element and optical system having the same
DE69818581T DE69818581T2 (de) 1997-07-28 1998-07-27 Beugungselement und damit ausgestattetes optisches System
EP98114002A EP0895099B1 (en) 1997-07-28 1998-07-27 Diffractive optical element and optical system having the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21710397A JP3495884B2 (ja) 1997-07-28 1997-07-28 回折光学素子及びそれを用いた光学系

Publications (3)

Publication Number Publication Date
JPH1144810A JPH1144810A (ja) 1999-02-16
JP3495884B2 JP3495884B2 (ja) 2004-02-09
JPH1144810A5 true JPH1144810A5 (enExample) 2004-08-19

Family

ID=16698906

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21710397A Expired - Fee Related JP3495884B2 (ja) 1997-07-28 1997-07-28 回折光学素子及びそれを用いた光学系

Country Status (4)

Country Link
US (1) US6480332B1 (enExample)
EP (1) EP0895099B1 (enExample)
JP (1) JP3495884B2 (enExample)
DE (1) DE69818581T2 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3290631B2 (ja) 1998-10-02 2002-06-10 キヤノン株式会社 光学ユニット、光学ユニットの製造方法、光学ユニットを用いた光学系、光学ユニットを用いた露光装置及びこの露光装置を用いたデバイスの製造方法
EP1075150A3 (en) * 1999-07-31 2005-04-27 Lg Electronics Inc. Projection lens system
JP2002062417A (ja) 2000-06-07 2002-02-28 Canon Inc 回折光学素子、該回折光学素子を有する光学系及び光学機器、回折光学素子の製造方法、回折光学素子製造用の金型
JP3619145B2 (ja) * 2000-11-17 2005-02-09 キヤノン株式会社 光学系及びそれを用いた光学機器
US7027226B2 (en) * 2001-09-17 2006-04-11 Euv Llc Diffractive optical element for extreme ultraviolet wavefront control
US20030180563A1 (en) * 2002-02-27 2003-09-25 Canon Kabushiki Kaisha Optical element and method of manufacturing the same, or laminated optical element and method of manufacturing the same
JP4227442B2 (ja) 2002-04-18 2009-02-18 キヤノン株式会社 光学材料、光学素子、回折光学素子、積層型回折光学素子、光学系及び光学素子の成形方法
JP4266732B2 (ja) 2002-08-30 2009-05-20 キヤノン株式会社 積層型回折光学素子
JP4411026B2 (ja) 2002-08-30 2010-02-10 キヤノン株式会社 光学材料及び、光学素子、回折光学素子、積層型回折光学素子、光学系
US6813080B2 (en) 2003-01-31 2004-11-02 Corning Incorporated Metal-free gratings for wavelength-multiplexed optical communications
JP2005107298A (ja) * 2003-09-30 2005-04-21 Nikon Corp 回折光学素子及び回折光学素子の製造方法
JP4673120B2 (ja) * 2004-04-28 2011-04-20 キヤノン株式会社 回折光学素子及びこれを有する光学系
KR100782813B1 (ko) * 2005-07-15 2007-12-06 삼성전자주식회사 능동형 보정소자 및 이를 채용한 호환형 광픽업 및 광 기록및/또는 재생기기
JP4142734B2 (ja) 2005-09-16 2008-09-03 松下電器産業株式会社 回折光学素子
JP2007188553A (ja) * 2006-01-11 2007-07-26 Konica Minolta Opto Inc 光学素子及び光ピックアップ装置並びに光学素子製造方法
DE102006011098A1 (de) * 2006-03-08 2007-09-27 Carl Zeiss Smt Ag Projektionsobjektiv einer mikrolithographischen Projektionsbelichtungsanlage
CN101523489B (zh) 2006-10-10 2011-05-18 旭硝子株式会社 衍射元件和装有该衍射元件的光学头装置
JP4847351B2 (ja) 2007-01-11 2011-12-28 キヤノン株式会社 回折光学素子及びそれを用いた回折格子
US9329325B2 (en) * 2009-04-20 2016-05-03 Bae Systems Plc Optical waveguides
WO2011093764A1 (en) 2010-01-26 2011-08-04 Husqvarna Ab A laying machine
EP2944919B1 (de) * 2014-05-13 2020-01-22 Leica Geosystems AG Geodätisches gerät mit diffraktiven optischen elementen

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5044706A (en) 1990-02-06 1991-09-03 Hughes Aircraft Company Optical element employing aspherical and binary grating optical surfaces
US5260828A (en) 1992-03-27 1993-11-09 Polaroid Corporation Methods and means for reducing temperature-induced variations in lenses and lens devices
JPH06324262A (ja) 1993-05-11 1994-11-25 Olympus Optical Co Ltd 撮像光学系
US5847877A (en) * 1994-09-12 1998-12-08 Olympus Optical Co., Ltd. Diffractive optical element
US5737113A (en) 1995-08-04 1998-04-07 Canon Kabushiki Kaisha Optical modulators and color image display device employing the same
JP3618464B2 (ja) * 1995-08-29 2005-02-09 オリンパス株式会社 回折光学素子、およびそれを用いる光学装置

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