JPH1140654A5 - - Google Patents

Info

Publication number
JPH1140654A5
JPH1140654A5 JP1997192753A JP19275397A JPH1140654A5 JP H1140654 A5 JPH1140654 A5 JP H1140654A5 JP 1997192753 A JP1997192753 A JP 1997192753A JP 19275397 A JP19275397 A JP 19275397A JP H1140654 A5 JPH1140654 A5 JP H1140654A5
Authority
JP
Japan
Prior art keywords
substrate
film formation
film
holding
formation chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997192753A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1140654A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP19275397A priority Critical patent/JPH1140654A/ja
Priority claimed from JP19275397A external-priority patent/JPH1140654A/ja
Publication of JPH1140654A publication Critical patent/JPH1140654A/ja
Publication of JPH1140654A5 publication Critical patent/JPH1140654A5/ja
Pending legal-status Critical Current

Links

JP19275397A 1997-07-17 1997-07-17 基板保持構造 Pending JPH1140654A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19275397A JPH1140654A (ja) 1997-07-17 1997-07-17 基板保持構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19275397A JPH1140654A (ja) 1997-07-17 1997-07-17 基板保持構造

Publications (2)

Publication Number Publication Date
JPH1140654A JPH1140654A (ja) 1999-02-12
JPH1140654A5 true JPH1140654A5 (cg-RX-API-DMAC7.html) 2005-04-28

Family

ID=16296485

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19275397A Pending JPH1140654A (ja) 1997-07-17 1997-07-17 基板保持構造

Country Status (1)

Country Link
JP (1) JPH1140654A (cg-RX-API-DMAC7.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100384060B1 (ko) * 2000-12-04 2003-05-14 삼성전자주식회사 반도체장치 애싱설비의 척 플레이트 및 이를 이용한 척조립체
US7993460B2 (en) * 2003-06-30 2011-08-09 Lam Research Corporation Substrate support having dynamic temperature control
JP2008198739A (ja) 2007-02-09 2008-08-28 Tokyo Electron Ltd 載置台構造、これを用いた処理装置及びこの装置の使用方法
JP7547147B2 (ja) * 2020-10-02 2024-09-09 株式会社カネカ 成膜用トレイ及び太陽電池製造方法

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