JPH11350130A5 - - Google Patents

Info

Publication number
JPH11350130A5
JPH11350130A5 JP1998153011A JP15301198A JPH11350130A5 JP H11350130 A5 JPH11350130 A5 JP H11350130A5 JP 1998153011 A JP1998153011 A JP 1998153011A JP 15301198 A JP15301198 A JP 15301198A JP H11350130 A5 JPH11350130 A5 JP H11350130A5
Authority
JP
Japan
Prior art keywords
mask member
locus
target
circuit unit
axis direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998153011A
Other languages
English (en)
Japanese (ja)
Other versions
JP4071861B2 (ja
JPH11350130A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP15301198A priority Critical patent/JP4071861B2/ja
Priority claimed from JP15301198A external-priority patent/JP4071861B2/ja
Publication of JPH11350130A publication Critical patent/JPH11350130A/ja
Publication of JPH11350130A5 publication Critical patent/JPH11350130A5/ja
Application granted granted Critical
Publication of JP4071861B2 publication Critical patent/JP4071861B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP15301198A 1998-06-02 1998-06-02 薄膜形成装置 Expired - Fee Related JP4071861B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15301198A JP4071861B2 (ja) 1998-06-02 1998-06-02 薄膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15301198A JP4071861B2 (ja) 1998-06-02 1998-06-02 薄膜形成装置

Publications (3)

Publication Number Publication Date
JPH11350130A JPH11350130A (ja) 1999-12-21
JPH11350130A5 true JPH11350130A5 (enExample) 2005-08-11
JP4071861B2 JP4071861B2 (ja) 2008-04-02

Family

ID=15553015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15301198A Expired - Fee Related JP4071861B2 (ja) 1998-06-02 1998-06-02 薄膜形成装置

Country Status (1)

Country Link
JP (1) JP4071861B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6955726B2 (en) * 2002-06-03 2005-10-18 Samsung Sdi Co., Ltd. Mask and mask frame assembly for evaporation
KR20160042316A (ko) 2014-10-08 2016-04-19 삼성디스플레이 주식회사 마그넷 플레이트 조립체, 이를 포함하는 증착 장치 및 이를 이용한 유기 발광 표시 장치 제조 방법
CN109037120B (zh) * 2018-09-20 2023-11-28 长江存储科技有限责任公司 膜层沉积装置
KR20220126847A (ko) 2021-03-09 2022-09-19 삼성디스플레이 주식회사 마그넷 조립체 및 이를 포함하는 증착 장치

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