JPH11326239A5 - - Google Patents
Info
- Publication number
- JPH11326239A5 JPH11326239A5 JP1998128978A JP12897898A JPH11326239A5 JP H11326239 A5 JPH11326239 A5 JP H11326239A5 JP 1998128978 A JP1998128978 A JP 1998128978A JP 12897898 A JP12897898 A JP 12897898A JP H11326239 A5 JPH11326239 A5 JP H11326239A5
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- light
- light source
- inspection device
- optical inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12897898A JP4213252B2 (ja) | 1998-05-12 | 1998-05-12 | 光学的検査装置 |
| PCT/JP1999/006281 WO2001035084A1 (en) | 1998-05-12 | 1999-11-11 | Optical inspection apparatus |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12897898A JP4213252B2 (ja) | 1998-05-12 | 1998-05-12 | 光学的検査装置 |
| PCT/JP1999/006281 WO2001035084A1 (en) | 1998-05-12 | 1999-11-11 | Optical inspection apparatus |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH11326239A JPH11326239A (ja) | 1999-11-26 |
| JPH11326239A5 true JPH11326239A5 (enExample) | 2005-09-29 |
| JP4213252B2 JP4213252B2 (ja) | 2009-01-21 |
Family
ID=26440205
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12897898A Expired - Lifetime JP4213252B2 (ja) | 1998-05-12 | 1998-05-12 | 光学的検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4213252B2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6891612B1 (en) | 1999-11-11 | 2005-05-10 | Hamamatsu Photonics K.K. | Optical inspection device that detects holes in an object to be inspected |
| JP4813294B2 (ja) * | 2006-08-29 | 2011-11-09 | 浜松ホトニクス株式会社 | 光学式検査装置 |
| JP5021014B2 (ja) | 2009-10-30 | 2012-09-05 | 日本碍子株式会社 | 積層体の形成方法 |
| JP6032054B2 (ja) * | 2013-02-20 | 2016-11-24 | トヨタ自動車株式会社 | 把持装置の当接部材 |
| KR102346404B1 (ko) * | 2020-08-07 | 2022-01-03 | 주식회사 아이키 | 의료용 임플란트 치료기구 유지관리 시스템 |
-
1998
- 1998-05-12 JP JP12897898A patent/JP4213252B2/ja not_active Expired - Lifetime
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