JP4213252B2 - 光学的検査装置 - Google Patents

光学的検査装置 Download PDF

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Publication number
JP4213252B2
JP4213252B2 JP12897898A JP12897898A JP4213252B2 JP 4213252 B2 JP4213252 B2 JP 4213252B2 JP 12897898 A JP12897898 A JP 12897898A JP 12897898 A JP12897898 A JP 12897898A JP 4213252 B2 JP4213252 B2 JP 4213252B2
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JP
Japan
Prior art keywords
light
inspection object
light source
fluorescent
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP12897898A
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English (en)
Japanese (ja)
Other versions
JPH11326239A (ja
JPH11326239A5 (enExample
Inventor
隆 小池
豊志 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to JP12897898A priority Critical patent/JP4213252B2/ja
Priority to PCT/JP1999/006281 priority patent/WO2001035084A1/ja
Priority claimed from PCT/JP1999/006281 external-priority patent/WO2001035084A1/ja
Publication of JPH11326239A publication Critical patent/JPH11326239A/ja
Publication of JPH11326239A5 publication Critical patent/JPH11326239A5/ja
Application granted granted Critical
Publication of JP4213252B2 publication Critical patent/JP4213252B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP12897898A 1998-05-12 1998-05-12 光学的検査装置 Expired - Lifetime JP4213252B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP12897898A JP4213252B2 (ja) 1998-05-12 1998-05-12 光学的検査装置
PCT/JP1999/006281 WO2001035084A1 (en) 1998-05-12 1999-11-11 Optical inspection apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP12897898A JP4213252B2 (ja) 1998-05-12 1998-05-12 光学的検査装置
PCT/JP1999/006281 WO2001035084A1 (en) 1998-05-12 1999-11-11 Optical inspection apparatus

Publications (3)

Publication Number Publication Date
JPH11326239A JPH11326239A (ja) 1999-11-26
JPH11326239A5 JPH11326239A5 (enExample) 2005-09-29
JP4213252B2 true JP4213252B2 (ja) 2009-01-21

Family

ID=26440205

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12897898A Expired - Lifetime JP4213252B2 (ja) 1998-05-12 1998-05-12 光学的検査装置

Country Status (1)

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JP (1) JP4213252B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6891612B1 (en) 1999-11-11 2005-05-10 Hamamatsu Photonics K.K. Optical inspection device that detects holes in an object to be inspected
JP4813294B2 (ja) * 2006-08-29 2011-11-09 浜松ホトニクス株式会社 光学式検査装置
JP5021014B2 (ja) 2009-10-30 2012-09-05 日本碍子株式会社 積層体の形成方法
JP6032054B2 (ja) * 2013-02-20 2016-11-24 トヨタ自動車株式会社 把持装置の当接部材
KR102346404B1 (ko) * 2020-08-07 2022-01-03 주식회사 아이키 의료용 임플란트 치료기구 유지관리 시스템

Also Published As

Publication number Publication date
JPH11326239A (ja) 1999-11-26

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