JPH11319849A - Mixed medicinal liquid treating apparatus for treating chemical liquid containing sulfuric acid and peroxide - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a treating apparatus capable of treating a spent sulfuric acid liquid contg. peroxide to a recyclable state. SOLUTION: This chemical liquid treating apparatus has a medicinal liquid treating vessel 1 which treats the material to be treated by the mixed chemical liquid contg. the sulfuric acid and the peroxide as essential components and a decomposing vessel 3 which is supplied with a decomposition accelerator and forcibly decomposes the peroxide included in the used waste liquid after the treatment. The chemical liquid treating vessel 1 and the decomposing vessel 3 may be separately disposed or the medicinal liquid treating vessel 1 may be utilized as the decomposing vessel. In the case of the former, the apparatus is provided with a transfer means for transferring the waste liquid of the mixed chemical liquid from the chemical liquid treating vessel 1 to the decomposing vessel without dilution. The utilization of a storage tank 4 as the decomposing vessel is possible as well. Rapid foaming does not occur any more and oxidation power degrades if the peroxide is forcibly decomposed in the decomposing vessel 3 by adding the decomposition accelerator to the waste sulfuric acid liquid contg. the peroxide. The waste sulfuric acid liquid of such a state is easy to transport and convey and may be recycled if the liquid is purified.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for treating a sulfuric acid / peroxide mixed chemical solution which makes it possible to recycle a sulfuric acid waste liquid containing peroxide.

[0002]

2. Description of the Related Art A mixture of sulfuric acid and peroxide, for example, in the form of a mixture of sulfuric acid-hydrogen peroxide or a mixture of sulfuric acid-ozone, is used in large quantities as a cleaning liquid mainly in a semiconductor substrate manufacturing process. I have.

[0003] These mixed liquids are typical cleaning liquids mainly used for removing a photoresist on a wafer and removing metals, heavy metals, and particles, and other cleaning liquids (for example, ammonia-hydrogen peroxide). Water, hydrochloric acid-hydrogen peroxide, diluted hydrofluoric acid, etc.).

[0004] Therefore, a large amount of waste liquid is generated. However, it is considered that such a mixed waste liquid in which sulfuric acid and peroxide are mixed has a special property as described below, and is difficult to treat. I have.

[0005] b. Heats violently when mixed with water (heat of hydration of sulfuric acid).

[0006] b. Peroxosulfuric acid (galloic acid) with strong oxidizing power remains.

C. Hydrogen peroxide remains, and sudden bubbling (generation of oxygen) occurs due to impact or mixing of impurities.

In particular, heat generation, rapid increase in pressure due to foaming, and oxidative deterioration of equipment are major obstacles in processing from the viewpoints of safety and maintenance. The mixed waste liquid is directly transported and transported to sulfuric acid. It is considered almost impossible to purify and reuse it.

For this reason, these mixed waste liquids are diluted and cooled with a large amount of water, then neutralized with an alkali such as slaked lime, and further purified by coagulation using an inorganic coagulant or a polymer coagulant. Is generally discharged to sewage and rivers as wastewater after the wastewater treatment.

[0010]

However, the above-mentioned dilution / cooling, neutralization treatment and purification treatment require a large amount of water and chemicals, and the amount of use is several tens to several hundred times of the mixed waste liquid. Also. Moreover, special equipment for performing these treatments is required, and the processing costs such as maintenance costs, chemical costs, sludge disposal costs, and the like become enormous.

Further, it is difficult to completely purify the mixed waste liquid even by the above treatment, which eventually pollutes rivers and the like, which is not preferable from the viewpoint of environmental conservation.

The present invention has been proposed in view of such a conventional situation, and an object of the present invention is to provide a processing apparatus capable of processing a sulfuric acid waste liquid containing peroxide to a reusable state. It is intended to eliminate various problems associated with disposal.

[0013]

In order to achieve the above-mentioned object, a sulfuric acid / peroxide mixed chemical treatment apparatus according to the present invention uses a mixed chemical containing sulfuric acid and peroxide as main components to treat an object to be treated. It is characterized by comprising a chemical solution treatment tank to be treated, and a decomposition tank supplied with a decomposition accelerator and forcibly decomposing peroxide contained in the used waste liquid after the treatment.

The chemical treatment tank and the decomposition tank may be provided separately, or the chemical treatment tank may be used as a decomposition tank.
In the former case, a transfer means for transferring the waste liquid of the mixed chemical solution from the chemical treatment tank to the decomposition tank without dilution is provided.

If a decomposition accelerator is added to the sulfuric acid waste liquid containing peroxide and the peroxide is forcibly decomposed in the decomposition tank, rapid foaming will not occur and the oxidizing power will be reduced.
The sulfuric acid waste liquid in such a state is easy to transport and transport,
For example, it can be reused by purifying it.

In the present invention, since the decomposition apparatus for forcibly decomposing the peroxide is provided in the treatment apparatus using the mixed chemical solution of sulfuric acid and peroxide, there is no need to transport and transport the waste liquid in a dangerous state. , It can be immediately processed to a state in which it can be reused.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a specific structure of a sulfuric acid / peroxide mixed chemical treatment apparatus of the present invention will be described in detail with reference to the drawings.

The chemical processing apparatus of the present invention has a basic configuration as shown in FIG.

This chemical processing apparatus is a chemical processing tank 1 for processing (for example, cleaning) an object to be processed, for example, a semiconductor substrate or the like, with a mixed chemical of sulfuric acid and peroxide, and a used mixed chemical (referred to as a mixed waste liquid). ), And a decomposition tank 3 for forcibly decomposing the peroxide remaining in the mixed waste liquid, and further storing the mixed waste liquid after the decomposition treatment, if necessary. It has a storage tank 4.

The chemical treatment tank 1 is provided for the purpose of performing various treatments on an object to be treated such as a semiconductor substrate, a liquid crystal substrate, a substrate for printed wiring, or the like, using a mixed chemical solution of sulfuric acid and peroxide. For example, a semiconductor wafer cleaning tank or the like corresponds to this.

The chemical treatment tank 1 has a cascade (dip tank) type in which an object is directly immersed in a chemical, a spray type in which a chemical is sprayed from a spray nozzle onto the object, and a plate-shaped object. Such as a single wafer type rotary type that sprays a chemical solution from a spray nozzle while rotating, a rinser type that arranges an object to be processed on the inner peripheral surface of the chamber and rotates a spray nozzle disposed in the center to spray a chemical solution onto these objects to be processed, Any structure can be used, and those having a tank structure, a chamber structure, and the like are targeted.

The chemical treatment tank 1 is usually heated,
It has necessary functions such as cooling, circulation, and filtration depending on the use, and further has functions such as supply and discharge of a chemical solution and control functions for controlling each function.

In the chemical treatment tank 1, the mixed chemical used for the treatment contains sulfuric acid and peroxide. The sulfuric acid concentration is 70% by weight or more and the peroxide concentration is 10 ppm or more. In particular, the case where the concentration is 50 ppm to 10% by weight is a main object.

If the concentration of sulfuric acid is lower than this, the decomposition reaction of peroxide due to the addition of a decomposition accelerator described later is less likely to occur, and for example, a large amount of water must be evaporated to obtain concentrated sulfuric acid. As described above, the efficiency of purification into regenerated sulfuric acid is reduced, which is disadvantageous in terms of efficiency and cost.

FIG. 2 shows the presence or absence of decomposition when nitric acid is used as a decomposition accelerator. Decomposition occurs at a sulfuric acid concentration of 70% by weight or more. If the sulfuric acid concentration is less than 70%, the decomposability is low and almost no decomposition occurs.

If the peroxide concentration is 10 ppm or less, there is no particular need to forcibly decompose. Conversely, if it exceeds 10% by weight, the decomposition reaction of the peroxide becomes too vigorous, and the control at the time of forced decomposition is difficult. It becomes very difficult.

The above-mentioned mixed chemical solution may be used for any purpose, but generally includes those used as cleaning liquids for various parts and products. For example, those used as a resist stripping or cleaning liquid in a semiconductor or liquid crystal substrate manufacturing process are preferable. The sulfuric acid / peroxide mixed chemical used in the production process of these substrates usually has a sulfuric acid concentration of 70% by weight or more.

The peroxides contained in the above mixed chemicals include hydrogen peroxide, ozone, peroxosulfuric acid (caloic acid)
And the like. However, peroxosulfuric acid is
It is generally produced by injecting hydrogen peroxide or ozone into sulfuric acid.

The above-mentioned mixed chemical solution may contain one or more components other than sulfuric acid and peroxide, for example, water, an inorganic acid, a surfactant, and a decomposition stabilizer. Further, the mixed chemical solution may contain insoluble components such as ceramics, SiO ₂ , SiC, Si ₃ N ₄ , glass, various metals, oxides thereof, and salts thereof.

The take-out device 2 includes the chemical treatment tank 1
It is provided for the purpose of directly or indirectly taking out a mixed chemical solution from the liquid chemical treatment tank 1, and has a structure in which the mixed chemical solution is taken out from the lower, side, and upper portions of the chemical processing tank 1 without being diluted.

For example, as a direct removal, a shutter, a cylinder function and the like are added to a lower portion or a side portion of the chemical treatment tank 1. As the indirect removal, a pipe is connected to the chemical treatment tank 1, and the mixed chemical is removed undiluted by gravity drop, pressure feed, suction, siphon, mechanical force, or the like. At this time, a pump, an air aspirator, or the like may be used.

Further, the take-out device 2 may have a control function of controlling the take-out according to the condition of the chemical processing tank 1 (for example, the processing history).

On the other hand, the decomposition tank 3 is provided for the purpose of forcibly decomposing the residual peroxide in the mixed chemical solution taken out (especially, used mixed waste liquid). It has a structure for supplying an accelerator.

The decomposition tank 3 may be a batch type or a continuous type, and has a stirring function for uniformly adding a decomposition accelerator, a cooling function for suppressing decomposition heat, and a pressure rise due to foaming gas. It is preferable to provide a function for performing the operation, a function for detecting the end point of decomposition, a function for controlling decomposition, and the like.

Here, examples of the stirring function include a stirring function using mechanical, liquid flow, bubbling, gravity, ultrasonic waves, and the like. When the mixed waste liquid is sufficiently stirred when adding the decomposition accelerator, the diffusion of the decomposition accelerator is facilitated, so that the decomposition rate can be improved and the amount of the decomposition accelerator added can be reduced.

The cooling function includes a direct cooling function using water, gas (including air), a refrigerant, and the like, and an indirect cooling function. Specifically, a jacket is provided around the decomposition tank, and a jacket-type cooler that cools the coolant through the jacket, a line cooler that allows the drug solution to flow through a spiral pipe arranged in the coolant jacket, and a bellows-like shape A bellows-type cooler that passes through the heat radiating section, a gas-cooled cooler that provides micro holes in the gas pipes arranged in the decomposition tank to bubbling and cools the cooling gas, a stirring air-cooled cooler that stirs and cools the chemical liquid, and circulates the chemical In this case, there may be mentioned circulation type cooling for cooling, vaporization heat type cooling for introducing dry ice or the like into the chemical, and cogeneration type cooling for heat exchange with a new chemical by a heat exchanger for cooling.

The function corresponding to the pressure rise due to the foaming gas is, for example, by introducing a pressure-resistant structure such as a vent, a pressure relief valve, a pressure equalizing pipe, or a pressure relief line.
Provides functions such as degassing, decompression, equalization, and pressure resistance.

The function of detecting the end point of decomposition refers to a function of detecting bubbles, peroxide concentration, temperature, and the like, and a sampling function for detecting the same. With these functions, the progress of the decomposition reaction is constantly or intermittently detected. Is used to determine the end of the decomposition reaction.

The decomposition control function controls the decomposition acceleration conditions (addition amount and rate of decomposition accelerator, cooling temperature, stirring efficiency, etc.) in response to the information from the end point detection function.

The detection items for judging the termination of the decomposition reaction include items such as temperature for monitoring heat generation during decomposition, emitted infrared rays, liquid level (due to thermal expansion), and pressure for monitoring foaming during decomposition. Items such as bubbles, liquid conductivity, and liquid level can be given.

For example, the presence or absence of gas generation can be detected by measuring the pressure in the system, the granular particles, the conductivity, and the like by the light scattering method. The presence or absence of heat generation can be detected by measuring the temperature with a thermometer or measuring the amount of emitted infrared rays. Further, the hydrogen peroxide content can be confirmed by measuring the refractive index, absorption characteristics of the near infrared spectrum, and the like.

Since the values of the above-mentioned items change before and after the decomposition reaction, the end of the decomposition reaction can be determined, for example, by returning to the value before the decomposition.

By introducing such a function for determining the end of the decomposition reaction, it is possible to judge the end of the decomposition accelerating process (for example, the addition of a decomposition accelerator or heating), to judge the start of the next process and the quality of the decomposition product. Guarantee can be made.

FIG. 3 shows an example of a flowchart for controlling the disassembly.

At the time of the decomposition treatment, the end of the chemical treatment is determined based on the processing history (cumulative processing amount, time, etc.) of the mixed chemical solution, the elapse of the designated time, and the addition of the decomposition accelerator is started. At this time, heat generation and foaming occur.

Therefore, as a countermeasure against heat generation and foaming during the decomposition, cooling of the mixed waste liquid and opening of generated gas (opening of vents, etc.) are performed.

The decomposition temperature and the decomposition gas are detected and confirmed, or the completion of the decomposition reaction is confirmed after a lapse of a predetermined time, and the addition of the decomposition accelerator is completed.

Thereafter, measures against heat generation and foaming are completed, the mixed waste liquid after the decomposition treatment is discharged, and the decomposition tank is washed or filled with a new mixed waste liquid.

The decomposition tank 3 is provided with a decomposition accelerator supply device for feeding the decomposition accelerator using gravity, a pump, a pressure feed, a siphon phenomenon, or the like. Or a supply line 5B.

The decomposition accelerator supplied from the decomposition accelerator supply device includes nitric acid, fuming nitric acid, nitrogen dioxide, nitrate (eg, metal salt, ammonium salt, amine salt) compound, ammonium sulfate, copper or iron or a compound thereof, hydrochloric acid Oxalic acid, manganic acid, alkali metal sulfite, and the like, and these can be used alone or in combination of two or more.

These may be new chemicals, but from the viewpoint of effective use of resources, it is desirable to use used products that have been used once for some purpose. For example, in a semiconductor manufacturing process, a cleaning liquid for a wafer, such as nitric acid, fuming nitric acid, or hydrochloric acid, that can be used as a decomposition accelerator is used. Therefore, if these waste liquids are used as they are as decomposition accelerators, not only will the resources be effectively used, but also the treatment of these waste liquids can be reduced.

The concentration (addition amount) of the above-mentioned decomposition accelerator is optional, and may be appropriately set according to the type and concentration of the peroxide, the liquid temperature, and the like. Waste liquid weight), preferably 0.1 ppm to 5% by weight.

The temperature for the decomposition is not particularly limited, but may be in the range of 0 to 1 which is the normal use temperature range of the mixed chemical solution.
There is no particular problem within the range of 50 ° C. The higher the temperature of the mixed waste liquid, the faster the decomposition (foaming) rate of the peroxide during the decomposition treatment.

When the decomposition accelerator is added, if the mixed waste liquid is sufficiently stirred, diffusion becomes easier, so that the decomposition rate can be improved and the amount of the decomposition accelerator added can be reduced.

In order to decompose more efficiently, it is advisable to inject a decomposition accelerator dropwise while stirring the mixed waste liquid. Since the decomposition reaction occurs very rapidly, it is difficult to control foaming and heat generation when the decomposition accelerator is added at once.

By performing the above-mentioned treatment, the decomposition of the peroxide in the mixed waste liquid is completed in a short time, and the treated liquid must be reused as sulfuric acid (concentrated sulfuric acid, fuming sulfuric acid, sulfuric anhydride). Becomes possible.

Since the decomposition accelerator exhibits its effect with a very small amount, the concentration of sulfuric acid in the mixed waste liquid is hardly reduced, and the regeneration efficiency in purifying the treated liquid after decomposition into sulfuric acid is eliminated. Is remarkably improved, and the cost is also improved.

The storage tank 4 for storing the mixed waste liquid after the decomposition treatment may be of a stationary type or may have a transport function like a container type. In addition, the storage function may include functions such as cooling, degassing (decompression), and stirring.

Further, the storage tank 4 preferably has a function of taking out the mixed waste liquid after the decomposition treatment.
It is preferable to have a filling port so that piping connection to a tank lorry or a regeneration plant is possible. From these filling ports, the mixed waste liquid after the decomposition treatment is taken out using gravity, a pump, a gas back pressure or the like.

The above is the basic configuration of the chemical processing apparatus of the present invention. For example, a chemical processing tank may also serve as a decomposition tank. Alternatively, a decomposition accelerator may be supplied from a pipe of the take-out device 2 so that the storage tank 4 also serves as the decomposition tank 3.

Each unit may be built in the same apparatus (for example, a chemical processing tank), or may be installed and connected to a remote place (for example, on the site of the same factory).

Further, each of these units may have a function of sharing information from each device or another device and controlling each process according to the information.

With respect to the constituent materials of the above-mentioned apparatus, particularly, for the liquid contact portion, resin materials such as fluorine resin and polyolefin resin, quartz, glass, metal (stainless steel, Hastelloy alloy, etc.), ceramics, etc. It is preferable to use a composite material or a coating material of the material.

Next, an example of the configuration of a specific device to which the present invention is applied will be described.

FIG. 4 shows an example of a processing apparatus for performing a decomposition process in a chemical processing tank itself for processing an object to be processed with a mixed chemical.

In this case, only the chemical solution treatment tank 11 and the storage tank 12 can be used as the apparatus configuration, and the apparatus can be made very simple.

The chemical treatment tank 11 has a chemical supply line 13 for supplying a chemical such as sulfuric acid or hydrogen peroxide, a decomposition accelerator supply device 14 for supplying a decomposition accelerator, and a heater 15 for adjusting the processing temperature and the like. In addition, chemical liquid circulation line 1
6 are provided.

The chemical liquid circulation line 16 is provided with a pump 17, a filter 18, a line cooler 19, a line heater 20, and a sensor 21 for detecting the end point of the decomposition of the mixed chemical liquid. , Temperature control and the like.

In this apparatus, the decomposition of the peroxide (hydrogen peroxide) is carried out in the chemical treatment tank 11 or the chemical circulation line 1.
6 by injecting a decomposition accelerator.

The heat generation during the decomposition is suppressed by a natural cooler and a line cooler provided in the chemical liquid circulation line 16.
With respect to foaming at the time of decomposition, measures such as opening the upper portion of the chemical solution treatment tank 11 or providing a local exhaust device are taken.

After the decomposition treatment, the mixed waste liquid in the chemical treatment tank 11 is discharged into the storage tank 12, and decomposed substances such as solids are discharged from the recovery line 22.

FIG. 5 shows a configuration in which the mixed waste liquid is discharged from the chemical treatment tank 11 by injecting a decomposition accelerator through the discharge line 23, and the storage tank 12 is used as a decomposition tank.

Accordingly, a decomposition accelerator supplying device 14 for supplying the decomposition accelerator to the middle position of the discharge line 23 is provided.

The storage tank 12 has a stirrer 24,
A liquid level sensor 25, a cooler 26, a vent 27, and the like are provided, and a stirring function, a liquid level detecting function, a cooling function, a pressure releasing function, and the like are provided.

FIG. 6 shows a structure in which the mixed waste liquid is discharged from the chemical treatment tank 11 to the decomposition tank 30 and a decomposition accelerator is supplied thereto to perform forced decomposition.

Therefore, the stirrer 24,
A liquid level sensor 25, a cooler 26, a vent 27, and a detection sensor 28 for detecting the end point of decomposition are attached to perform a series of decomposition reactions.

FIG. 7 shows a structure in which a chemical solution treatment tank 11, a decomposition tank 30, and a storage tank 12 are separately provided, and each of them is configured to separate processing.

In this example, the storage tank 12 may be configured to be transportable, and the mixed waste liquid decomposed by container transportation may be transferred to a sulfuric acid regeneration plant or the like.

The mixed waste liquid (sulfuric acid waste liquid) decomposed by the above-mentioned chemical liquid treatment apparatus does not contain peroxide, so that rapid foaming does not occur, and since it is not diluted, the sulfuric acid concentration is maintained at a high level. Have been.

Therefore, by refining this at a waste sulfuric acid regeneration plant, it can be recycled (concentrated sulfuric acid, fuming sulfuric acid, sulfuric anhydride etc.)
Can be reused as

FIG. 8 shows an example of this waste sulfuric acid purification step.

The sulfuric acid waste liquid subjected to the decomposition treatment is first thermally decomposed in the thermal decomposition furnace 31 together with heavy oil, sulfur and the like. Waste heat from the thermal decomposition is recovered by a waste heat recovery boiler 32 and used in other processes and the like.

The pyrolyzed gas is supplied to the gas cooling and cleaning tower 33.
Mist cotrel 34, drying tower 35, heat exchanger 36,
It is recovered as concentrated sulfuric acid (for example, 98% sulfuric acid) through a converter 37, a smoke tower 38, an absorption tower 39, and the like.

The fuming sulfuric acid is recovered from the fuming tower 38, and a part of the fuming sulfuric acid is removed from the distillation tower 40 and the stabilizing tower 4
By treating with 1 and the like, it is recovered as sulfuric anhydride.
In addition, gypsum and sodium sulfite can be collected as by-products.

The decomposed sulfuric acid waste liquid can be used not only as a regenerated product, but also in an unpurified state, as a sulfonating agent and a hydrolysis accelerator for various compounds, particularly organic compounds.

For example, as a neutralizing agent for an aqueous alkali solution, or as an unsaturated (including aromatic) hydrocarbon organic compound, a halogenated hydrocarbon organic compound, an alcohol organic compound, or an acid anhydride organic compound. And a hydrolysis accelerator for a hydrocarbon organic compound containing an unsaturated bond, a cyano group, an amide group, an acid anhydride group or the like.

More specifically, sodium alkylbenzenesulfonate, which is a synthetic detergent, can be finally synthesized by reaction with alkylbenzene. Or
By reacting with polystyrene, polystyrene that can be used as various dispersants for cement, coal-water slurry, etc., antistatic agent for paper and resin, fiber, flocculant for wastewater treatment, adhesive, ion exchange resin, etc. Sulfonic acid and its sodium salt can be obtained.

Further, ABS (acrylonitrile-styrene-butadiene) resin, SAN (styrene-acrylonitrile) resin, PAN (polyacrylonitrile) resin and the like can be hydrolyzed or sulfonated. It can be modified into a water-absorbing resin.

The organic compound to be treated with the sulfuric acid waste liquid after the decomposition treatment may be unused.
It may be used (waste material) used for some purpose. From the viewpoint of effective use of resources, it is desirable to use waste materials as raw materials.

As described above, although a large amount of water and chemicals have been required for treatment and a large amount of waste has been generated after all, not only the amount of waste can be extremely reduced, but also Waste liquids and plastic waste materials that have been disposed of until now can be converted and used for higher value-added materials.

[0091]

As is clear from the above description, according to the chemical liquid treatment apparatus of the present invention, the sulfuric acid waste liquid containing peroxide can be treated to a state where it can be reused on site. Thereby, inconveniences such as a sudden increase in pressure due to foaming and oxidative deterioration of equipment can be eliminated, and transportation and subsequent regeneration processing can be easily performed.

Further, by using the apparatus of the present invention,
The sulfuric acid waste liquid can be recycled and used effectively, and environmental conservation is promoted from the viewpoint of resource saving, promotion of recycling, reduction of waste, and the like.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a basic configuration of a chemical solution treatment device of the present invention.

FIG. 2 is a characteristic diagram showing the composition of a mixed chemical solution and the presence or absence of decomposition when nitric acid is added.

FIG. 3 is a flowchart of disassembly control.

FIG. 4 is a schematic view showing an example of a chemical processing apparatus that serves both as a chemical processing tank and a decomposition tank.

FIG. 5 is a schematic diagram showing an example of a chemical solution treatment device that serves both as a decomposition tank and a storage tank.

FIG. 6 is a schematic diagram showing an example of a chemical processing apparatus in which a chemical processing tank and a decomposition tank are separated.

FIG. 7 is a schematic diagram illustrating an example of a chemical processing apparatus in which a chemical processing tank, a decomposition tank, and a storage tank are independently provided.

FIG. 8 is a schematic diagram showing an example of a sulfuric acid waste liquid regenerating apparatus.

[Explanation of symbols]

1,11 chemical treatment tank, 2 take-out device, 3,30
Disassembly tank, 4 storage tanks

Claims (12)

[Claims] 1. A chemical treatment tank for treating an object to be treated with a mixed chemical solution containing sulfuric acid and peroxide as main components, a decomposition accelerator is supplied, and a peroxide contained in a used waste liquid after the treatment is provided. And a decomposition tank for forcibly decomposing substances. 2. The sulfuric acid according to claim 1, wherein the chemical treatment tank and the decomposition tank are separately provided, and a transfer means for transferring the waste liquid of the mixed chemical solution from the chemical treatment tank to the decomposition tank without dilution.・ Peroxide mixed chemical treatment equipment. 3. The sulfuric acid / peroxide mixed chemical treatment apparatus according to claim 1, wherein the chemical treatment tank also serves as the decomposition tank. 4. The apparatus for treating a mixed chemical solution of sulfuric acid and peroxide according to claim 1, wherein the decomposition tank has an end point detection mechanism for detecting an end point of a decomposition reaction of the peroxide in the waste liquid. 5. The apparatus for treating a mixed chemical solution of sulfuric acid and peroxide according to claim 1, wherein the decomposition tank has a cooling mechanism for cooling the waste liquid. 6. The sulfuric acid / peroxide mixed chemical treatment apparatus according to claim 1, wherein the decomposition tank has a pressure release mechanism for suppressing a pressure increase due to forced decomposition of the peroxide. 7. The concentration of sulfuric acid contained in the mixed drug solution is 7
The sulfuric acid / peroxide mixed chemical treatment apparatus according to claim 1, wherein the amount is 0% by weight or more. 8. The sulfuric acid / peroxide mixed chemical treatment apparatus according to claim 1, further comprising a storage tank for storing a waste liquid in which peroxide is forcibly decomposed in the decomposition tank. 9. The apparatus according to claim 8, wherein the storage tank has a transportable structure. 10. The apparatus for treating a mixed chemical solution of sulfuric acid and peroxide according to claim 8, wherein the storage tank also serves as a decomposition tank. 11. The sulfuric acid according to claim 10, further comprising transfer means for transferring the waste liquid of the mixed chemical solution from the chemical treatment tank to the storage tank without dilution, wherein the decomposition accelerator is supplied by the transfer means.・ Peroxide mixed chemical treatment equipment. 12. The sulfuric acid / peroxide mixed chemical processing apparatus according to claim 1, wherein the chemical processing tank cleans a semiconductor substrate or a liquid crystal substrate with the mixed chemical.