JP2001170479A - Device for decomposing treatment of organic halogen compound - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device for decomposing treatment of an organic halogen compound which can improve treating efficiency and can reduce operation cost even though safety is regarded as the first importance. SOLUTION: This device for decomposing treatment of the organic halogen compound is provided with a steam generator 1 which generates a gaseous mixture composed of steam and the organic halogen compound from the supplied organic halogen compound and water, a decomposing device 2 which decomposes the organic halogen compound by subjecting the gaseous mixture supplied from the steam generator 1 to a reaction in plasma and generates a decomposed gas, a neutralizing device 3 which neutralizes the decomposed gas supplied from the decomposing device 2 and an exhauster 5 which exhausts gas in the neutralizing device 3 outside the system. In the device, the exhauster 5 is provided with a CO sensor 55 and a flon sensor 56.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for decomposing organic halogen compounds using plasma.

[0002]

2. Description of the Related Art Organic halogen compounds such as chlorofluorocarbon (hereinafter referred to as "chlorofluorocarbon") and trichloromethane containing fluorine, chlorine, bromine and the like in a molecule are used in a large amount for a wide range of uses such as refrigerants, solvents and fire extinguishers. And its importance in the industrial field is extremely high. However, these compounds have high volatility, and if released untreated into the environment such as air, soil, and water, they may have adverse effects on the environment, such as formation of carcinogenic substances and destruction of the ozone layer. It is necessary to perform detoxification treatment from the viewpoint of environmental protection. for that reason,
Most of the used organic halogen compounds are recovered and processed.

[0003] Conventionally, methods for treating organic halogen compounds have been reported which mainly utilize a thermal decomposition reaction at a high temperature, and this treatment method is further roughly classified into an incineration method and a plasma method. In the incineration method, the organic halogen compound is incinerated together with ordinary waste such as resin.On the other hand, in the plasma method, the organic halogen compound is reacted with water vapor in plasma to produce carbon dioxide, hydrogen chloride, and fluorine. It decomposes into hydrogen and the like.

[0004] Further, as for the latter processing apparatus for decomposing an organic halogen compound according to the plasma method, an apparatus which generates plasma using microwaves has recently been developed. This decomposition treatment apparatus is provided with a neutralization tank containing an alkaline solution, a reaction tube disposed with the open lower end immersed in the alkaline solution, and a communication tube located above the reaction tube and communicating with the reaction tube. The apparatus includes a discharge tube, a microwave generator mounted on the discharge tube, and the like. In this decomposition treatment apparatus, an organic halogen compound (for example, chlorofluorocarbon) and water vapor are supplied to the discharge tube, while a microwave generated from a microwave generator causes a discharge in a microwave electric field formed inside the discharge tube. Is caused, and the organic halogen compound is decomposed by thermal plasma in the reaction tube. On the other hand, this decomposition reaction produces acidic gases, that is, hydrogen fluoride (HF) and hydrogen chloride (HCl), and carbon dioxide (CO ₂ ). These gases are guided into the alkaline liquid by the blowing pipe and agitated and neutralized, and the remaining gas containing CO _{2 and the} like is discharged from the exhaust device.

[0005]

By the way, it is generally unknown which compound is mixed in which ratio in the recovered organic halogen compound. Most of them are chlorofluorocarbon gas, especially chlorofluorocarbon 12 (CCl ₂ F ₂ ), which is the most widely used industrially, but also contains other compounds. This Freon 12 is also said to be the most reactive among the organic halogen compounds, that is, the most decomposable. Conversely, among the organohalogen compounds, the compound having the lowest reactivity, that is, the compound which is most difficult to decompose, is said to have only about half the reactivity of Freon 12. These compounds can be processed only at half the processing speed of fluorocarbon 12 (processable amount per unit time). Therefore, if the operation is performed with the processing speed of the decomposition processing apparatus adjusted to the CFC 12, undecomposed compounds may be discharged. In addition, it is extremely difficult to quantitatively predict the type of decomposition products and the amount of the decomposition products, since the mixed compounds are unknown, and therefore, unneutralized acid gas or carbon monoxide ( C
Various gases such as by-products such as O) may be discharged in large quantities.

There is a possibility that such various gases may be discharged due to factors other than the above, for example, factors such as an abnormality of the decomposition processing apparatus. For example, when the microwave output from the microwave generator decreases or when the mixing ratio of water vapor to the organic halogen compound decreases, undecomposed compounds and by-product gases may be discharged. Also,
For example, if neutralization is not performed sufficiently due to poor stirring in an alkaline solution, acidic gas may be discharged.

[0007] Since the emission standard values of various gases that may cause air pollution are set strictly, safety of the operation of the decomposition treatment apparatus is given top priority.
It is made to be much lower than the actual processing capacity. If the concentrations of the various gases to be discharged may exceed the discharge reference values, judging from the operating conditions, the danger can be avoided by immediately stopping the decomposition processing apparatus.
However, if the operation was performed with the processing capacity significantly lower, the processing efficiency was reduced, and as a result, a problem that the collected organic halogen compounds had to be stored untreated for a long time occurred. I will. In addition, even if judgment is made based on the operation status of the decomposition equipment, the method of predicting changes in the concentration of various gases based on the driver's experience, etc. is the mainstream, and such predicted concentrations do not always match the actual emission concentrations. There was not. That is, in some cases, the vehicle must be stopped even though the vehicle can be safely driven. For this reason, there has been a demand for a disassembly apparatus that improves processing efficiency while giving top priority to safety.

The present invention has been made in view of the above circumstances, and improves processing efficiency while giving top priority to safety.
An object of the present invention is to provide an apparatus for decomposing an organic halogen compound, which can reduce operating costs.

[0009]

According to the first aspect of the present invention,
From the supplied water and the organic halogen compound, a steam generator that generates a mixed gas of water vapor and an organic halogen compound, and reacting the mixed gas supplied from the steam generator in plasma to convert the organic halogen compound. A decomposition device that decomposes and generates a decomposition gas, a neutralization device that neutralizes the decomposition gas supplied from the decomposition device, and an exhaust device that exhausts gas in the neutralization device to the outside of the system. In the apparatus for decomposing an organic halogen compound, the exhaust device includes C
An O sensor is provided. According to a second aspect of the present invention, there is provided the organic halogen compound decomposing apparatus according to the first aspect, wherein the organic halogen compound is chlorofluorocarbon, and the exhaust device is provided with a chlorofluorocarbon sensor. And Further, the invention according to claim 3 is the apparatus for decomposing an organic halogen compound according to claim 1 or 2, wherein the exhaust device includes H
An F sensor is provided. Further, the invention according to claim 4 is the apparatus for decomposing an organic halogen compound according to any one of claims 1 to 3, wherein a CO ₂ sensor is provided in the exhaust device.

[0010] With this configuration, the amount of various gases such as CO as a by-product gas, undecomposed chlorofluorocarbon (Freon), and HF and CO ₂ generated by decomposition is discharged to the outside of the system. Device just before
That is, monitoring can be performed in real time in the exhaust device, and the measured value can be fed back to the operation of the decomposition processing device. In other words, the processing efficiency of the decomposition processing apparatus can be stopped or controlled according to the measurement value from each sensor, that is, the CO sensor, the chlorofluorocarbon sensor, the HF sensor, or the CO ₂ sensor. The system can respond immediately even if the operation is performed at a high level, and can strictly control the emission of various gases to the outside of the system.

According to a fifth aspect of the present invention, there is provided the apparatus for decomposing an organic halogen compound according to the first aspect, wherein water or organic water supplied to the steam generator is supplied based on an output from the CO sensor. A control device for controlling the flow rate of the halogen compound is provided. Further, claim 6
The invention according to claim 2 is the apparatus for decomposing an organic halogen compound according to claim 2, wherein control is performed to control a flow rate of water or chlorofluorocarbon supplied to the steam generator based on an output from the chlorofluorocarbon sensor. A device is provided. Further, the invention according to claim 7 is the decomposition apparatus for an organic halogen compound according to claim 3, wherein water or the organic halogen compound supplied to the steam generator is supplied to the steam generator based on an output from the HF sensor. A control device for controlling the flow rate is provided. The invention according to claim 8 is the apparatus for decomposing an organic halogen compound according to claim 4, wherein the CO
₍₂₎ A control device for controlling a flow rate of water or an organic halogen compound supplied to the steam generator based on an output from the _two sensors.

With such a configuration, the CO sensor, chlorofluorocarbon sensor, HF sensor, CO sensor
Based on the outputs from the _two sensors, it is possible to control the automatic operation of the organic halogen compound decomposition treatment device while strictly controlling the discharge amount of various gases to the outside of the system.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First to third embodiments of the apparatus for decomposing an organic halogen compound according to the present invention will be described with reference to FIGS. 1 to 7. FIG. In these embodiments, most of the organic halogen compound is chlorofluorocarbon 12
The description will be made assuming that (CCl ₂ F ₂ ) occupies. Therefore, the organic halogen compound is referred to as chlorofluorocarbon for convenience.

First Embodiment First, a first embodiment will be described with reference to FIGS. 1, 2, 4, and 5. FIG. FIG. 1 shows a schematic configuration of this decomposition processing apparatus (organic halogen compound decomposition processing apparatus). As shown in this figure, the decomposition treatment apparatus includes a steam generator 1 that generates a mixed gas of steam and chlorofluorocarbon from supplied water and fluorocarbon,
A mixed gas sent from the steam generator 1 is reacted in a plasma to decompose chlorofluorocarbons to generate an acid gas (decomposed gas). It includes a summing device 3, a sedimentation / filtration device 4 for sedimenting the neutralized product generated in the neutralization device 3 for solid-liquid separation, and an exhaust device 5 for exhausting the gas in the neutralization device 3 to outside the system. I have.

The steam generator 1 is connected to a water storage tank 11 for supplying water to the steam generator 1 and a recovery cylinder 12 for storing CFCs and supplying the CFCs to the steam generator 1. ing. Water storage tank 11 and steam generator 1
Is provided with a first valve 11a for adjusting the flow rate of water supplied to the steam generator 1, and a path connecting the recovery cylinder 12 and the steam generator 1 is provided with a steam generator 1 Second valve 12 for adjusting the flow rate of Freon supplied to
a is provided. The steam generator 1 generates a mixed gas of water vapor and Freon from supplied water and Freon by a heating means (not shown) provided therein.

A first valve 11a and a second valve 12a
The opening can be adjusted by an actuator (not shown), and the opening is automatically controlled by a control device 61 described later. Such actuators may be mechanical or electromagnetic. A rare gas cylinder for supplying a rare gas such as argon or helium may be connected to the steam generator 1 in order to facilitate ignition prior to generation of plasma (not shown).

The disassembly device 2 includes a microwave generator 21
, A discharge tube 22 and a reaction tube 23. The microwave generator 21 emits a microwave toward the discharge tube 22, and a microwave electric field is formed inside the discharge tube 22 by the microwave. Discharge tube 22
A mixed gas of steam and chlorofluorocarbon is supplied from the steam generator 1 to the upper part of the
The discharge is caused by the microwave electric field inside the discharge tube 22 and heated to a plasma state. Then, the generation of the thermal plasma causes Freon to be easily dissociated into chlorine atoms, fluorine atoms, and hydrogen atoms. Therefore, the inside of the reaction tube 23 provided below the discharge tube 22 is expressed by (Equation 1). Reacts with water vapor to cause a decomposition reaction. (Formula 1) CCl ₂ F ₂ + 2H ₂ O → 2HCl + 2HF + CO ₂ Decomposition gas generated by this (Formula 1), that is, acid gas such as hydrogen chloride (HCl) and hydrogen fluoride (HF), and carbon dioxide (CO ₂ ) Is supplied to the neutralization device 3.

At this time, a reaction different from the formula (1) may occur due to the influence of other organic halogen compounds mixed in the chlorofluorocarbon. In this case, by-products such as CO are generated. In this case, the discharge tube 22
It is necessary to increase the amount of water vapor supplied to the reaction so that the reaction of (Equation 1) proceeds smoothly.

The reaction tube 23 is connected to an air cylinder 24 for supplying air to the reaction tube 23 and a third valve 24a for adjusting the flow rate of the air. This air is supplied to remove moisture remaining in the system and to exhaust gas remaining in the system. In addition to air, a rare gas such as a nitrogen gas or an argon gas may be used. The configuration of the third valve 24a is as follows.
The same as the first valve 11a and the second valve 12a,
The opening is automatically controlled by the control device 61.

The neutralizing device 3 includes a neutralizing tank 31 containing an alkaline solution, a blowing pipe 32 for supplying an acid gas or the like to the neutralizing tank 31, and a stirrer for stirring the alkaline solution in the neutralizing device 31. 33 and a cooler 34 for circulating and cooling the alkaline liquid
It has. The neutralization tank 31 contains an alkaline solution for neutralizing the acidic gas generated in the decomposition device 2, that is, a suspension obtained by adding calcium hydroxide (Ca (OH) ₂ ) to water. . The blowing tube 32 is connected to the reaction tube 23 at the upper end thereof, and opens at the lower end into the neutralization tank 31 so as to blow acidic gas into the alkaline liquid. The acid gas blown into the alkaline solution is expressed by (Equation 2)
It is rendered harmless by causing the neutralization reaction shown in (1). (Formula 2) 2HCl + Ca (OH) ₂ → CaCl ₂ + 2H ₂ O 2HF + Ca (OH) ₂ → CaF ₂ + 2H ₂ O The neutralized product produced by this (Formula 2), ie,
Calcium chloride (CaCl ₂ ) and calcium fluoride (CaF ₂ ) have small solubilities and are partially dissolved in an alkaline solution, but mostly exist as slurries. Further, the carbon dioxide generated by the decomposition reaction of (Equation 1) and the acid gas reduced to a very small amount equal to or less than the emission reference value by the neutralization reaction of (Equation 2) are connected above the neutralization tank 31. The air is exhausted out of the system by the exhaust device 5.

From the tip (lower end side) of the blowing tube 32,
Decomposed gas due to the decomposition reaction is released as bubbles in the alkaline solution, but the neutralization reaction in the alkaline solution involves a large contact area between the bubbles and the alkaline solution, until the bubbles reach the liquid surface. Since the longer the time, the faster the reaction, the neutralizer 31 is provided with a stirrer 33 in the neutralization tank 31 for finely dividing the bubbles to promote the neutralization reaction of the formula (2). The stirrer 33 includes a blade 33b that is driven to rotate by a motor 33a. The blade 33b is disposed above the tip of the blowing pipe 32. For this reason,
Bubbles floating from the tip of the blowing pipe 32 hit the rotating blade 33b and are finely divided. The stirrer 33 also plays a role of creating a suspension of water and water-insoluble calcium hydroxide by stirring the calcium hydroxide powder charged into the neutralization tank 31.

The neutralization tank 31 is provided with a pH sensor (not shown).
It is constantly monitored by a monitoring device (not shown) via the H sensor. For example, when the pH value is 9 (11 to 1 at the start of operation)
In the case of 2), the alarm means is activated by a command from the monitoring device, and the disassembling operation is stopped. As the warning means, any means can be used as long as it can draw attention to the surroundings. For example, means such as blinking a lamp or sounding a horn is adopted.

Further, since the neutralization reaction of the formula (2) is an exothermic reaction, the neutralization tank 31 is provided with a cooler 34 for circulating and cooling the alkaline liquid. This cooler 34
Is provided with a pump 34a for taking out the alkaline solution from the bottom of the neutralization tank 31, and a heat radiating portion 34c through which the processing solution passes and cooled by the fan 34b. Radiator 3
Alkaline solution that has passed through 4c and cooled is returned to neutralization tank 3 again.
It is to be returned to 1. Incidentally, the temperature in the tank is detected by a thermocouple (not shown). Further, a three-way valve 35 is provided on the downstream side of the heat radiating part 34c. By switching the three-way valve 35, the alkaline liquid can be sent to the sedimentation filtration device 4.

The sedimentation filtration device 4 includes a sedimentation tank 41, a stirrer 42 for stirring the alkaline liquid in the sedimentation tank 41, a dehydrating basket 43 for filtering the alkaline liquid, and a drainage passage 44. The settling tank 41 is supplied with an alkaline liquid in a slurry form from a three-way valve 35. Settling tank 4
1 has an agitator 4 driven by a motor 42a.
2 is provided so that the added coagulants (anionic coagulant 47 and cationic coagulant 48) are uniformly dispersed while stirring the supplied alkaline liquid. The aggregated alkaline liquid is sent to a dehydrating basket 43 provided below the settling tank 41, where it is separated into a solid and a liquid. The separated solids are disposed of. Since the liquid is almost neutral at this time, the liquid is appropriately diluted or the like, and is discharged to the sewage through the drainage channel 44. In addition, when discharging to rivers, etc., it passes through a filtration / dilution device 45,
Processing such as filtration or dilution of residual solids is performed, and the water quality is adjusted to the discharge standard value before discharging.

The exhaust device 5 is for exhausting gas from the neutralization tank 31 to the outside of the system, and includes an exhaust path 51 provided above the neutralization tank 31 and exhaust means such as a blower (not shown). I have. As shown in FIG. 2, the exhaust device 5 has C
An O sensor 55 and a CFC sensor (chlorofluorocarbon sensor) 56 are provided. These CO sensors 55
As shown in FIG. 4, the CFC sensor 56 is connected to a control device 61, and outputs the measured amounts of CO and CFC to the control device 61.

The control device 61 also includes a first valve 11a,
It is also connected to the second valve 12a and the third valve 24a. The control device 61 automatically controls the opening of each of the first valve 11a, the second valve 12a, and the third valve 24a based on the outputs from the CO sensor 55 and the Freon sensor 56, and sends the control signal to the steam generator 1. It operates to increase or decrease the supply amounts of water and chlorofluorocarbon or the supply amount of air to the decomposition device 2.

FIG. 5 shows an operation method using the decomposition processing apparatus. First, the supply of CFCs with a differential amount is started (101). Here, the differential amount refers to half the amount of the CFC 12 that can be processed per unit time. As described above, the organic halogen compound which is considered to be the most difficult to decompose can be processed only at a processing speed of about half of the processing speed of Freon 12. Therefore, in order to cope with the case where the fluorocarbon in the recovery cylinder is occupied by such an organic halogen compound, the processing is performed from the processing amount assumed in the worst case.
The control device 61 receives the output from the CFC sensor 56 (102), and determines whether to increase (103) or decrease (104) the CFC supply amount based on this output. When decreasing, the operation is continued until the output from the Freon sensor 56 reaches a predetermined value (105). When the supply amount of CFCs reaches a predetermined value, the control device 61
The output from the O sensor 55 is received (106), and based on this output, it is determined whether to maintain the current state (107) or increase the amount of water vapor, that is, increase the amount of water supply (108). This is because if the amount of water vapor with respect to chlorofluorocarbon is increased, generation of CO as a by-product can be suppressed. Next, the control device 61 controls the CFC sensor 56
(109), and based on this output, maintain the current condition or reduce the amount of CFC supply (110).
To decide. Such an operation is continued until the output from the CO sensor 55 reaches a predetermined value. Although not particularly shown in FIG. 5, it goes without saying that the amount of air supplied to the decomposition device 2 is also appropriately increased or decreased. Thus, the control device 6
Numeral 1 controls automatic operation of the decomposition processing apparatus based on outputs from the CO sensor 55 and the CFC sensor 56.

In the decomposition processing apparatus according to the present embodiment, the CO sensor 55 and the CFC sensor 56 can monitor in real time the amount of CO, which is a by-product gas, and the amount of CFC, which is not decomposed, in the exhaust device 5, and , The automatic operation control of the decomposition processing apparatus based on the outputs from the CO sensor 55 and the CFC sensor 56. Therefore, even if the decomposition equipment is operated with high processing efficiency, it can respond immediately, and the automatic operation that strictly manages the emission amount of CO and CFCs whose emission standard values are strictly set outside the system Control can be performed. This makes it possible to improve the processing efficiency while giving the highest priority to safety, reduce the number of drivers, and reduce the operating cost. Further, even if the type and amount of the other compound mixed in the CFC are unknown, the optimum treatment can be performed.

[Second Embodiment] A second embodiment of the decomposition processing apparatus according to the present invention will be described with reference to FIGS. Note that only components different from those of the first embodiment will be described, and illustration and detailed description of common components will be omitted. The components different from the first embodiment are that the exhaust device 5 is provided with the HF sensor 57, and the control device is adapted to correspond thereto.

As shown in FIG.
A sensor 55, a CFC sensor 56, and an HF sensor 57 are provided. As shown in FIG. 6, the CO sensor 55, the CFC sensor 56, and the HF sensor 57 are connected to a control device 62, and output the measured amounts of CO, CFC, and HF to the control device 62. It has become.

The control device 62 also controls the first valve 11a,
It is also connected to the second valve 12a and the third valve 24a. The control device 61 includes a CO sensor 55, a CFC sensor 5
6, based on the output from the HF sensor 57, automatically control the opening of each of the first valve 11a, the second valve 12a, and the third valve 24a to supply water and Freon to the steam generator 1. It operates to increase or decrease the amount of air or the amount of air supplied to the decomposition device 2.

In the decomposition processing apparatus according to the present embodiment, the HF
Emissions can be monitored in real time and H
Based on the output from the F sensor 57, automatic operation control of the decomposition processing apparatus can be performed. Therefore, it is possible to perform automatic operation control in which the emission amount of HF that may have a serious adverse effect on the human body or the like is strictly controlled, so that the safety can be further ensured while improving the processing efficiency. Also,
When the amount of HF discharged is large, an abnormality is often found in the vicinity of the neutralization device 3, so that an abnormal portion of the decomposition processing device can be quickly identified.

Third Embodiment A third embodiment of the decomposition processing apparatus according to the present invention will be described with reference to FIG. Note that only components different from those in the second embodiment will be described, and illustration and detailed description of common components will be omitted. The components different from the second embodiment are that the exhaust device 5 is provided with a CO ₂ sensor 58 instead of the HF sensor 57, and the control device is adapted to correspond thereto.

The exhaust device 5 is provided with a CO sensor 55, a CFC sensor 56, and a CO ₂ sensor 58.
As shown in FIG. 7, the CO sensor 55, the CFC sensor 56, and the CO ₂ sensor 58 are connected to a control device 63, and output the measured amounts of CO, CFC, and CO ₂ to the control device 62. It is supposed to.

The control device 63 also includes a first valve 11a,
It is also connected to the second valve 12a and the third valve 24a. The control device 63 includes a CO sensor 55, a CFC sensor 5
6, based on the output from the CO ₂ sensor 58,
Valve 11a, second valve 12a, and third valve 24a
Are automatically controlled to operate to increase or decrease the supply amount of water and chlorofluorocarbon to the steam generator 1 or the supply amount of air to the decomposition device 2.

In the decomposition processing apparatus according to this embodiment, not only the amount of CO ₂ discharged from the exhaust device 5 but also the amount of HF discharged can be monitored in real time. That is, as shown in (Equation 1), if 2 mol of HF is generated, 1 mol of CO ₂ is generated. Therefore, if the amount of CO ₂ is measured, the amount of HF that is approximately twice that amount is generated, and the amount of HF can also be calculated. Thereby, for example, when the HF sensor is expensive and it is difficult to use it in terms of cost, by using a relatively inexpensive CO ₂ sensor, it is possible to reduce the cost of the decomposition apparatus and reduce the amount of HF emission. Strictly controlled automatic operation control can be performed.

[0037]

As described above, in the apparatus for decomposing an organic halogen compound according to the present invention, sensors for various gases whose emission standard values are strictly set are provided in the exhaust system. . Therefore, it is possible to provide an apparatus for decomposing an organic halogen compound, which can improve the processing efficiency and reduce the operating cost while giving the highest priority to safety.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram showing a first embodiment of an organic halogen compound decomposition treatment apparatus according to the present invention.

FIG. 2 is a schematic configuration diagram showing the exhaust device in FIG. 1 in an enlarged manner.

FIG. 3 is a diagram showing a second embodiment of the organic halogen compound decomposition treatment apparatus according to the present invention according to the present invention, and is a schematic configuration diagram showing an exhaust device in an enlarged manner.

FIG. 4 is another schematic configuration diagram showing the first embodiment of the organic halogen compound decomposition treatment apparatus according to the present invention.

FIG. 5 is a flowchart showing an operation method of the organic halogen compound decomposition treatment apparatus shown in FIG.

FIG. 6 is another schematic configuration diagram showing a second embodiment of the organic halogen compound decomposition treatment apparatus according to the present invention.

FIG. 7 is a schematic configuration diagram showing a third embodiment of an organic halogen compound decomposition treatment apparatus according to the present invention.

[Explanation of symbols]

1 steam generator 2 cracker 3 neutralizer 5 exhauster 55 CO sensors 56 Freon sensor (chlorofluorocarbons sensor) 57 HF sensor 58 CO ₂ sensor 61, 62 and 63 control device

Continued on front page F term (reference) 2E191 BA15 BC01 BD01 BD18 4D002 AA21 BA05 BA09 BA20 DA05 DA12 DA35 EA03 EA05 EA13 GA02 GA03 GB01 GB02 GB03 GB09 4G075 AA03 AA37 AA62 BA05 BA06 BD12 BD27 CA03 CA26 CA47 EA05 EB05 EB43

Claims (8)

[Claims] 1. A steam generator for generating a mixed gas of water vapor and an organic halogen compound from supplied water and an organic halogen compound, and reacting the mixed gas supplied from the steam generator in a plasma. A decomposer that decomposes the organic halogen compound to generate a decomposed gas; a neutralizer that neutralizes the decomposed gas supplied from the decomposer; and an exhaust that exhausts gas in the neutralizer to the outside of the system. An apparatus for decomposing an organic halogen compound, comprising: a CO sensor provided in the exhaust device. 2. The apparatus according to claim 1, wherein the organic halogen compound is chlorofluorocarbon, and the exhaust device is provided with a chlorofluorocarbon sensor. 3. An apparatus for decomposing an organic halogen compound according to claim 1, wherein an HF sensor is provided in said exhaust device. 4. The organic halogen compound decomposition treatment apparatus according to claim 1, wherein a CO ₂ sensor is provided in the exhaust device. 5. The organic device according to claim 1, further comprising a control device that controls a flow rate of water or an organic halogen compound supplied to the steam generator based on an output from the CO sensor. Halogen compound decomposition processing equipment. 6. The organic device according to claim 2, further comprising a control device for controlling a flow rate of water or chlorofluorocarbon supplied to the steam generator based on an output from the chlorofluorocarbon sensor. Halogen compound decomposition processing equipment. 7. The organic device according to claim 3, further comprising a controller that controls a flow rate of water or an organic halogen compound supplied to the steam generator based on an output from the HF sensor. Halogen compound decomposition processing equipment. 8. The apparatus according to claim 4, further comprising a control device for controlling a flow rate of water or an organic halogen compound supplied to the steam generator based on an output from the CO ₂ sensor. Decomposition equipment for organic halogen compounds.