JPH11311510A5 - - Google Patents

Info

Publication number
JPH11311510A5
JPH11311510A5 JP1998132643A JP13264398A JPH11311510A5 JP H11311510 A5 JPH11311510 A5 JP H11311510A5 JP 1998132643 A JP1998132643 A JP 1998132643A JP 13264398 A JP13264398 A JP 13264398A JP H11311510 A5 JPH11311510 A5 JP H11311510A5
Authority
JP
Japan
Prior art keywords
light
minute irregularities
test object
light source
image obtained
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998132643A
Other languages
English (en)
Japanese (ja)
Other versions
JP4158227B2 (ja
JPH11311510A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP13264398A priority Critical patent/JP4158227B2/ja
Priority claimed from JP13264398A external-priority patent/JP4158227B2/ja
Publication of JPH11311510A publication Critical patent/JPH11311510A/ja
Publication of JPH11311510A5 publication Critical patent/JPH11311510A5/ja
Application granted granted Critical
Publication of JP4158227B2 publication Critical patent/JP4158227B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP13264398A 1998-04-27 1998-04-27 微小凹凸の検査方法および検査装置 Expired - Fee Related JP4158227B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13264398A JP4158227B2 (ja) 1998-04-27 1998-04-27 微小凹凸の検査方法および検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13264398A JP4158227B2 (ja) 1998-04-27 1998-04-27 微小凹凸の検査方法および検査装置

Publications (3)

Publication Number Publication Date
JPH11311510A JPH11311510A (ja) 1999-11-09
JPH11311510A5 true JPH11311510A5 (enrdf_load_stackoverflow) 2005-09-22
JP4158227B2 JP4158227B2 (ja) 2008-10-01

Family

ID=15086129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13264398A Expired - Fee Related JP4158227B2 (ja) 1998-04-27 1998-04-27 微小凹凸の検査方法および検査装置

Country Status (1)

Country Link
JP (1) JP4158227B2 (enrdf_load_stackoverflow)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10122313A1 (de) * 2001-05-08 2002-11-21 Wolfgang P Weinhold Verfahren und Vorrichtung zur berührungsfreien Untersuchung eines Gegenstandes, insbesondere hinsichtlich dessen Oberflächengestalt
JP4575202B2 (ja) * 2005-03-24 2010-11-04 日本板硝子株式会社 透明板状体の欠点検査方法及び欠点検査装置
JP2007271510A (ja) * 2006-03-31 2007-10-18 Tsubakimoto Chain Co 外観検査方法及び外観検査装置
US7567344B2 (en) * 2006-05-12 2009-07-28 Corning Incorporated Apparatus and method for characterizing defects in a transparent substrate
JP4960161B2 (ja) 2006-10-11 2012-06-27 日東電工株式会社 検査データ処理装置及び検査データ処理方法
KR101249168B1 (ko) 2009-12-18 2013-03-29 주식회사 포스코 냉간압연에서의 품질이상 예지 시스템과 그 방법
JP5768224B2 (ja) * 2010-03-26 2015-08-26 パナソニックＩｐマネジメント株式会社 欠陥検出装置および欠陥検出方法
JP2014145656A (ja) * 2013-01-29 2014-08-14 Nikka Kk 微粒子付着状態可視化方法、および微粒子付着状態可視化装置
WO2018139237A1 (ja) * 2017-01-25 2018-08-02 国立研究開発法人産業技術総合研究所 画像処理方法
JP7110777B2 (ja) * 2017-07-20 2022-08-02 日立金属株式会社 金属薄板検査装置および金属薄板の検査方法
JP7135297B2 (ja) * 2017-10-27 2022-09-13 株式会社ニコン 検査装置、検査システム、および検査方法
CN110672621B (zh) * 2019-10-10 2021-03-05 清华大学 基于光照亮度调整的汽车涂装表面缺陷图像质量优化方法
JP7634343B2 (ja) * 2020-01-15 2025-02-21 株式会社Uacj 検査方法、検査装置および圧延装置の制御方法
CN111351795A (zh) * 2020-02-27 2020-06-30 杨孝兰 一种基于特殊结构光的镜面物体及透明物体检测方法
CN111443040A (zh) * 2020-05-14 2020-07-24 成都德图福思科技有限公司 反光透光复合材料表面激光打码蚀痕的成像系统及方法
JP7390278B2 (ja) * 2020-12-16 2023-12-01 株式会社日立ハイテクソリューションズ 外観検査方法、外観検査装置、構造体に対する加工方法および装置

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